Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection S type: White color L type: Black color Applicable tubing diameter N Applicable tubing diameter E (Mounting hole) B C D E F

FQ1

Filtration accuracy (m) 5 10 20 40 74 105 No.

Compact End Lock Cylinder Series CBQ2

L1 (mm) With rear lock With front lock Bore size (mm) I J K C D E H Standard stroke A B Q A B F Q 32 72.5 65.5 12.5 65 58 7.5 10.5 13 16 45 M8 x 1.25 60 4.5 14 40 82 75 14 71.5 64.5 8 11 13 16 52 M8 x 1.25 69 5 14 10, 15, 20, 25 50, 75, 100 50 83.5 75.5 14 73.5 65.5 10.5 10.5 15 20 64 M10 x 1.5 86 7 17 63 85 77 15.5 79 71 10.5 15 15 20 77 M10 x 1.5 103 7 17 (mm) Bore size (mm) R W Z L M

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

Fieldbus system Ethernet POWERLINK compatible SI unit

Parameter Definition Item Content Default setting 0: -10..10 V 1: -5..5 V 2: -20..20 mA 3: 0..10 V 5 Analog Range Set the analog input range per channel. Selects the analog input range. 0..10 V 4: 0..5 V 5: 1..5 V 6: 0..20 mA 7: 4..20 mA 0: None None 6 Analog Filter Sets analog input filtering time per channel.

Digital Flow Switches Series PF2A

Note 5) The analog output operates only for real-time flow rate, and does not operate for accumulated flow. 11 Digital Flow Switch Series PF2A For Air Flow Characteristics (Pressure Loss) PF2A703H PF2A706H PF2A712H 20 20 20 Pressure loss (kPa) Pressure loss (kPa) Pressure loss (kPa) 10 10 10 600 0 2400 4800 7200 9600 12000 150 0 600 1200 1800 2400 3000 300 0 1200 2400 3600 4800 6000 Flow

10

A Applicable absorber B SR Dimensions RBC08C RBC10C RBC14C RBC20C RBC27C RJ08U 6.5 6.8 6 RJ10U 9 8.7 7.5 X RJ14U 12.5 12 10 16 18 20 RJ2015U 21 25 25 RJ2725U H B T 2 x D MM L Part no.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For details, refer Best Pneumatics Vol. 1.) 5-2-4 3 5 Port Air Operated Valve Series SYA3000/5000/7000 Flow Characteristics/Weight Model/Series SYA320 (Body ported) Port size Flow characteristics Weight (g) Pilot port size (Nominal size) Valve model Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position

CEx-OMG0106

Present Position Next Target Point 20 30 Brake Point There is no braking point within the area Impossible for position determination Operating Condition: a. Speed: 100mm/sec b. Tubings length (form valve): 50cm below c. Supply Pressure: 0.5MPa (for both brake and driving purposes) d.

Short Stroke Electric Actuator Series LX

(B contact) None Nil N.C. (B contact) Refer to the table on the right for proximity switch part numbers. N.O. (A contact) N.C.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

CEx-OMQ0011

8370: JIS B 9960-1:-((1:) JIS B 8433-1:2007--1 *2) 1. 2. 3. a. b. c. 4. a. b.

Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

CY1F

Refer to the Made to Order Specifications on page 20.

MXF

: D-M9BV, D-M9NV, D-M9PV, D-F9WV (mm) B E B Stroke Model Stroke A 100 75 50 30 20 10 100 75 50 30 20 10 MXF8 13.5 6 1 6 14 9 14 MXF12 16 25.1 9.1 9.1 33.1 17.1 17.1 MXF16 21.2 42.3 21.8 11.8 50.8 29.8 19.8 MXF20 23.4 66.7 42.2 18.7 16.7 74.7 50.2 26.7 24.7 ( ): Denotes the values of D-A93.

125

Port size (External/ Internal) Pilot solenoid C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b C [dm 3/(sbar)] b VEX312-01 1/8 2.4 0.19 2.4 0.31 2.3 0.36 2.5 0.22 0.1 0.2 VEX312-02 1/4 3.5 0.35 3.3 0.49 3.1 0.46 3.5 0.33 0.1 0.2 VEX332-02 1/4 4.1 0.36 4.3 0.42 4.1 0.41 4.6 0.25 0.3 0.4 VEX332-03 3/8 8.7 0.29 7.9 0.52 7.8 0.51 8.7 0.33 0.3 0.4 VEX332-04 1/2 9.8 0.37 9.6 0.52 9.1 0.53

AR20-B to AR60-B

pressure switch *5 67 Regulator AR20-B to AR60-B Series Regulator with Backflow Function AR20K-B to AR60K-B Series AC AF+AR+AL AW+AL AF+AR AF+AFM+AR AW+AFM AF Attachment AFM / AFD AR AL AW AR40-B, AR40K-B AR20-B, AR20K-B Nq Body size 20 25 30 40 50 60 Symbol Description c Set pressure *6 Nil 0.05 to 0.85 MPa setting 1 0.02 to 0.2 MPa setting + d Exhaust mechanism Nil Relieving type N Non-relieving

Made to Order Specifications:

Port size Dimensions Dimensions A Connection HA B IN OUT AT IN OUT ID A B AMG AFF AM Drain Misc.

PFxx-OMO0007CN

) [o10] [o11] [o12] (OUT2) 20) [o20] [o21] [o22] () -22No.PF-OMO0007CN (OUT1) 20) [1_n] [1_P] (OUT2) 20) [2_n] [2_P] [Anr] 20 1 atm()65R.H.