MNB

12.5 35 27 1/4 40 18 65 58.5 75 120.5 Up to 600 15 14 104.5 19 15.5 32 -X 56.5 63 11 20 17.5 35 27 1/4 45 18 75 68 90 134.5 Up to 600 12 14 119.5 23 16.5 32 72 80 13 25 22 40 32 1/4 45 22 95 81 102 169 Up to 750 18 20 150 19 33 37 2089 100 16 30 25 40 41 1/4 55 26 114 96 116 189 Up to 750 20 20 170 19 37.5 37 Data T V VA W ZZ MB K MM N P S GR GE GF J Q H Bore size (mm) 32 27 6.5 6 4 205 M10

MK

149 H 4.9 Clamp part 600 418 300 182 R 6 Performance of non-rotating 0.7 to 1.4 32 16 CE1 800 557 400 243 H 8 Clamp (Retracted stroke end) 1050 731 525 319 R 10.5 40 16 CE2 1250 870 625 380 H 12.5 1648 1149 825 502 R 16.5 50 20 ML2B 1961 1365 980 596 H 19.6 2801 1950 1400 851 R 28 63 20 C J G5-S 3121 2172 1560 948 H 31.2 Note) Theoretical output (N) = Pressure (MPa) x Piston area (cm2) x

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Cylinder with Lock Series CNS

IY-12 IY-14 IY-16 125 140 160 4 x 40 l 4 x 40 l 4 x 40 l 25 0.065 0.117 28 0.065 0.117 79.5 69.5 2 x 4 drill 86.5 76.5 32 0.080 0.142 94.5 84.5 Cotter pins (2 pcs.) are included. Rod End Nut 30 d Material: Rolled steel (mm) Applicable bore size (mm) d H B C D Part no.

Low Friction Cylinders Series MQ

, but unassembled. 30 10, 20, 30, 40, 50, 75, 100 40 10, 20, 30, 40, 50, 75, 100 Bore size Strokes are available in 1 mm increments by installing a spacer in standard stroke cylinders. 10 16 20 25 30 40 10 mm 16 mm 20 mm 25 mm 30 mm 40 mm Port thread type M thread Rc NPT G 10 to 20 Nil 25 to 40 TN TF The MQQ series is not auto switch capable.

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

MNB

B2 H S + Stroke ??

HRX-OM-W002

1000 40 1000 1000 1000 1000 500 500 500 500 500 500 500 500 500 500 0 0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating

High Vacuum Angle Valve, XL Series

Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

MY1

(Except 50) MY2 H/HT MY1MW16, 20, 50, 63 MY1CW16, 20, 50, 63 Side port Side port Front port Front port MY3A MY3B L L L L L L R R R R R R MY3M R L R L R R L L Bottom port Bottom port L R Slide table operating direction MY1MW25, 32, 40 MY1CW25, 32, 40 This port cannot be used.

24

FC FD H MGJ FH JMGP 4 x FG through B + Stroke C + Stroke FB FA G FF FE MGP MGP (mm) MGPW Bore size B C FA FB FC FD FE FF FG FH G H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

+ Stroke A + 2 stroke 32 40 50 RSQB Bore size: 32, 40, 50 2 x P (Rc, NPT, G) Q Z F Stroke J I 0 0.1 D M E T V B + Stroke H + Stroke M 4 x N through A + 2 stroke E 8 x O depth of counterbore Built-in One-touch fittings (20 to 50) Tubing O.D.

15

(Table clearance is included.) 832 Motorless Type Electric Actuator/High Rigidity Slider Type Ball Screw Drive LEJS Series LEJS40, 63 How to Order q H NZ 40 500 e r t A w LEJS q Accuracy e Motor type w Size t Stroke [mm] r Lead [mm] 200 to 1500 Nil Basic type H High precision type 40 63 Symbol LEJS40 LEJS63 H 24 30 A 16 20 B 8 10 Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting

Modular Type Filter Regulator Series AW

Accessories Note 3) Applicable model AWM20 to 40 AWM20 to 40 AWM30, 40 AWM20 to 40 AWM20 to 40 AWM20 to 40 Description With bracket Float type auto drain (N.C.) Note 2) Symbol Nil B C D E G H Port size Body size Symbol Port size Float type auto drain (N.O.)

Free Mount Cylinder Series CU

through A1 H E 4-T counter bore 0.5 B S Z (mm) S Z T QA R Q A A1 P GB MM B C D E GA L J H GC Bore size 5 30 40 50 5 10 15 20 25 30 40 50 15 20 25 10 4.5 2 16 12 9 4 20 16 12 11 5.5 4.5 26 20 40 32 8 6 30 27 6 5 16 14 19 16 22 19 21.5 19 116 126 135 145 M6 x 1.0 M5 x 0.8 14 12.5 40 36.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 100 88.5 110 98.5 93.5 103.5 108.5 113.5 7.6 depth

CLS

Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 250 Bore size (mm) Stroke range (mm) 125 140 160 180 200 l P S N RR T U V W Z ZZ f h Z1 ZZ1 S e MA MB MM Z 383 ZZ 412 Z1 406 ZZ1 435 35 35 39 39 39 49 1/2 1/2 3/4 3/4 3/4 1 29 32 36 44 44 55 5 5 5 35 40 45 50 50 65 98 30 30 30 383 412 40 40 40 45 45 55 30 to 1000 75 133 406 435 Up to 1000 98 M30 x

HRX-OM-X071

] 1000 32 32 25 25 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circullating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR050-A/W-20-) 9.5.2 HRR050-A/W-402000 2000 Ambient temp Ambient temp 1500 1500 Heating capacity[W] Heating capacity[W] 40 40 32 32 25 25 1000 1000 5 5 500 500 0 0 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature

REA/REB

side REAS15 High Precision Guide Type REAH (mm) A B C D d EA EB FA FB G GP H HA HG Model REAS15 7.5 9.5 5 16.6 12 6 13 3 6 6.5 52 40 29 13 REAS20 10 9.5 5 21.6 16 8.5 62 46 36 17 Max.

RHC

Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-