Compact Cylinder with Air Cushion Series RQ Auto switch mounting screw (M3 x 0.5 x 10l) Auto switch spacer Auto switch mounting nut 4 Series RQ Dimensions/20, 25 Refer to pages 12 and 13 for proper auto switch mounting positions and height.
Auto Switch Mounting Direct mount Rail mount Watchmakers screw driver Auto switch mounting screw (M3 x 0.5 x 10l) Set screw Auto switch spacer Auto switch D-A9 D-F9 Auto switch mounting nut When tightening the mounting screw, use a watchmakers screw driver with a handle about 5 to 6 mm in diameter. Tighten with a torque of 0.10 to 0.20 Nm.
Switch mounting screws (M3 x 0.5 x 10l) Switch spacer 32, 40 50, 63 Manufacture of intermediate strokes BQ-2 Method Spacers installed in standard stroke body. Switch mounting nut Ordering Refer to standard part number and ordering on page 1.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
M1 F KK 1/4 1/4 C side A side (E1,E1,E2,E2,E3,E3): Reference dimension for the inserted tubing from the end surface of the nut (E1,E2,E3),L1,L2,L3: Nut material PVDF dimensions H1 H3 (E3,E3) (E1,E1) L3,L3 L1,L1 G D Metric Size MS Model B B side (Center) A side (Left) C side (Right) E1 E1 E2 E2 E3 E3 F G H1 H2 H3 L1 L1 L2 L2 L3 L3 M1 M2 M3 Applicable tubing O.D.
Vertical mounting: 0 (None) The moment load rate must be calculated in accordance with the above formula for all types, M1 to M3. As for Wmax and Mn, refer to the maximum load mass and allowable moment table in the next section. The moment for the inclined mounting must be calculated taking the moment caused by the load into consideration.
Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, SPEED CONTROLLER, FLOW CONTROL, SVD, 8 lb
Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, SPEED CONTROLLER, FLOW CONTROL, SVD, 8 lb
Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, SPEED CONTROLLER, FLOW CONTROL, SVD, 8 lb
Speed controller with one-touch fittings , Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2 , Maximum operating pressure 1MPa, Meter in or meter out control , Port sizes: M3, M5, U10/32, 01, 02, 03, 04 , Various tube O.D. in both metric and inch, SPEED CONTROLLER, FLOW CONTROL, SVD, 6 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL (NPT), AIRLINE EQUIPMENT, AS FLOW CONTROL, E6, AS 3/8INCH COPPER-FREE, .45100 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g)
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, W/FITTING,, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .08818 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, FB, AS1/2INCHSTANDARD (PT), 1.10231 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, CB, AS 1/8INCH STANDARD (PT), .19800 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g)
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, CB, AS 1/8INCH STANDARD (PT), .19800 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g)
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, DB, AS 1/4INCH STANDARD (PT), .23650 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g)
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, 1/8, AIRLINE EQUIPMENT, AS FLOW CONTROL, C7, AS 1/8INCH EUROPEAN, .22046 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, 1/8 NPT H/T, AIRLINE EQUIPMENT, AS FLOW CONTROL, CD, AS 1/8INCH STANDARD (NPT), .19841 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROLLER, AIRLINE EQUIPMENT, AS FLOW CONTROL, 2X, TMH NO SIZE RATING, .19400 lb
Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL, 1/4 NPT, AIRLINE EQUIPMENT, AS FLOW CONTROL, DD, AS 1/4INCH STANDARD (NPT), .71650 lb