Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: G (Grommet), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C8 (ø8 One-touch Fitting), Option: F (Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread: Rc (or None), Option

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Push-turn Locking Lever Style), A, B Port Size: C8 (Body Ported ø8 One-touch Fitting)

Type of Actuation: 1 (2 Position Single), Manifold Type: 60 (Body Ported, Casette Style), Pilot: Internal Pilot, Specifications: Standard, Voltage: 3 (110VAC 50/60HZ), Electrical Entry: D (DIN Terminal w/Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C8 (Body Ported ø8 One-touch Fitting)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C8 (Body Ported ø8 One-touch Fitting), Thread

Series: 5 (SY5000), Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot Type: Internal Pilot, Coil Specification: Standard, Rated Voltage: 5 (24VDC), Electrical Entry: H (Grommet Lead Wire 0.6m), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, A,B Port Thread: C8 (Body Ported ø8 One-touch Fitting)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C8 (Body Ported ø8 One-touch Fitting)

Series SV

Model 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB) 4, 2 (A/B) 1, 5, 3 (P/EA/EB) C[dm3/(sbar)] Cv Cv b b C[dm3/(sbar)] C6 SS5V1-16 C8 0.89 0.22 0.23 0.22 0.21 0.98 C8 SS5V2-16 C10 2.3 0.50 0.56 0.28 0.18 2.7 Note) Value is for manifold base with 5 stations and individually operated 2 position type.

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

VQC

Dept. code 24 Manifold Specification Sheet Series VQC2000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 2 1 08 FD1 B C8 F P T Kit / / 1 2 3 8 VV5QC 2 1 08 SDQ B C8 S Kit Fill out for I/O serial kit only.

SV

Note Symbol 02 Stations 2 stations Double wiring specifications (1) 09 02 A, B port size (Metric) 9 stations 2 stations Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series Specified layout (2) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8

The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication

VQ4000

1/8 (External pilot port) 73 106.5 59 44 62 50.5 9 9 R4.5 U side 12 X n 2n-Rc 1/4, 3/8, C8, C10, C12 4(A), 2(B) port 4 A 2 B 8 Rc 1/4: Rc 1/4 thread 4 A 2 B A A B A B A B A B A B A Rc 3/8: Rc 3/8 thread SMC SMC SMC SMC SMC SMC SMC 7 B B B A A A A A A A C8: One-touch fitting for 8 4 A 2 B C10: One-touch fitting for 10 6 C12: One-touch fitting for 12 4 A 2 B 5 L1 L2 4 A 2 B 4 B B 4 A 2 B 3

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 23 Manifold Specification Sheet Series VQC2000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 2 1 08 FD1 B C8 F P T Kit / / 1 2 3 8 VV5QC 2 1 08 SDQ B C8 S Kit Fill out for I/O serial kit only.

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

2 (R)wGwC6, C8, C10, 02 300 (Lead wire length) 19 130 58 24.4 9 9 R3 SY A 2 4 18 13 SMC SMC 4 Cover diameter 1.6 Cross section 0.34mm2 B SYJ 2-C6, C8, C10, 02 38 23.4 Mounting holes Manual override C6: One-touch fittings for 6 SX C8: One-touch fittings for 8 M5 X 0.8 External pilot port (Only external pilot style(R)) C10: One-touch fittings for 10 VK 02: Rc(PT)1/4 VZ (C6, C8) 17.5 10.5

Plug-in Unit

SMC SMC SMC 95.5 101 20.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 SQ 72 12 60 43.5 42.7 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A VQ0 15.7 21.5 (6.5) 11.5 VQ4 External pilot port 2-Rc 1/8 Pilot exhaust port 2-Rc1/8 27 31 38.7 VQ5 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> P=25 65.5 Rc 1/4: 1/4" Female thread VQZ Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 :

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

Intrinsically Safe Valve

4 1 1/4 53-SY9000 1 (P) (EA) 5 3 (EB) 3/8 One-touch fitting (Metric size) Note) 2-position double F2: With side bracket 2 (B) (A) 4 Symbol Port size Applicable series 2 C4 C6 C8 C8 C10 C8 C10 C12 4 One-touch fitting (EA) 5 1 (P) 3 (EB) 6 One-touch fitting 53-SY5000 8 One-touch fitting 3-position closed center 2 (B) (A) 4 8 One-touch fitting 3 Note 1) 53-SY7000 10 One-touch fitting Bracket