AC Servo Motor Driver (SSCNET Type)

1) (Note 1) 31 Overspeed 32 Overcurrent Alarms 33 Overvoltage 34 Receive error 1 (Note 2) 35 Command frequency error 36 Receive error 2 37 Parameter error 45 Main circuit device overheat (Note 1) (Note 1) (Note 1) 46 Servo motor overheat (Note 1) (Note 1) (Note 1) 47 Cooling fan error 50 Overload 1 (Note 1) (Note 1) (Note 1) 51 Overload 2 (Note 1) (Note 1) (Note 1) 52 Error excessive 8A USB

Compact Cylinder with Air Cushion

A A' A' R H R H Piston seals Wide size variations from 20 to 100 Model Counting Rod end configuration Standard stroke Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 R(D)Q25 20 to 100 Direct mount auto switch 32 to 100 rail mount auto switch Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type R(D)Q32 R(D)Q40 Female threads Male threads R(D)Q50 R(D)Q63

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Process Valve Series VNA

JIS Symbol Valve type Operation 3 Port 2 Port 12 (P1) 12 (P1) Air operated 1 2 3 1 2 VNA 7.0 MPa 2Port 3Port VNB SGC 12 (P1) 12 (P1) VNC External pilot Solenoid VNH 1 2 3 1 2 VND VCC 411 Series VNH Dimensions !2 i 12(P1): External pilot port 10(P2) : Pilot EXH port !0 e e u u r i !1 r t !1 !

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

VQ VQ4 VQZ VQD VZS VFS VS VS7 1.13-9 Series VQD1000 Dimensions Plug lead unit manifold(VV4QD12-l) Lead wire length: 300mm 4-Rc(PT)1/8 (P, R port) Light 2-4.5 (Mounting hole) 57 50.5 5.3 5.3 52 0.6 1 3 P R 1 3 R P 30 17 6.5 15 7 10 P=11 0.5 0.5 2n-M5 (A, B port) L2 35 4 M5: M5 thread L1 38 42 M plug connector (M) Station 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15

Vacuum Ejector Series ZM

1 y u i o ZR ZM t t e e ZMA V V ZQ r r ZH !1 Left side Right side ZU ZL ZY ZF Clamp rod part no. (1) ZP Manifold part no.

Air Cylinder NCM Series Stainless Steel Cylinders

NCmRO-OT NCI|RO-OS H3 ).250 | r-24 o.75 |.0010.621 r2s6;; 093t0.22 t0-32 uNFl0.8l L00 1 . 1 20.12 t10-32 UNF $-m 0.62 0.34 0.880.38 3.22 2.66 2.35 1.69 t.312tyt -24 003t025 O-32UNF .12 r25 1.47 0.2,1 llG32 UtlF 1A-20 0.s10.47 1.22 o.62 3.75 3.34 2-93 1.81 ).137 t%^-20 r.25 1.m).12510-38 | r. -20 UNC 't.75 1.93 0.25 t|l-20 LhrC x.-18 1 . 1 20.38 1.57 0.88 4 . 1 9 3.49 3,692.O0 slrc' Air Cvlinder

IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

Compact Cylinder with Air Cushion Series RQ

D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 9 8 9.5 13.5 15.5 10 15 17.5 776 Compact Cylinder with Air Cushion Series RQ Construction 20 to 40 With auto switch (Built-in magnet) A part 50 to

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !

VK3000

Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 NPTF VP4 VZS Type 40: Base mounted (A, B port bottom ported) Applicable solenoid valve VK3140 VK334 How to Order VV5K3 40 05 M5 Type VK334 Type VK3140 VFS Thread type R port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Applicable blanking plate assembly VK3000-7-1A Valve stations VS4 Nil F N T Rc 01 1 station G NPT VQ7 20 20 stations NPTF A port: M5 x 0.8 EVS

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Stroke Reading Cylinder and Counter

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y CEP1 CE1 CE1 r @9 @2 CE2 !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.