MGC

2 !3 !4 !5 !6 !7 !8 No.

MLGC

2 No.

MLGC

2 No.

Compact

Example) CQ-M3 x 25 L 2 pcs.

Compact Electro-pneumatic Regulator Series ITV0000

D side 1 2 3 ...

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

thread) 21 61.5 83.5 4 x M6 x 1 thread depth 12 (Mounting thread) Bottom through hole dia. 5.1 (Mounting hole) 2 x M6 x 1 thread depth 12 (Mounting thread) 47 29 42 58 45 30 32 9 +0.2 +0.1 23 2 34H9 +0.062 depth 4 0 27 30 4 x M6 x 1 thread depth 7 Rc 1/8 (G1/8, NPT1/8) (Finger closing port) 45 (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 32.9 20 20 51 11 11 Rc

SY3000/5000/7000 Series Plug-in Type

As a guide, insert bolts in 2 positions for 2-5 stations, 3 positions for 6-10 stations, 4 positions for 11-15 stations, 5 positions for 16-20 stations and 6 positions for 21-24 stations. Take the same measures for horizontal mounting if the mounting surface vibrates. 2.

Slit Valve

x 10 10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s)

CRB1/Size: 10, 15, 20, 30

-2 (For ClRB1FWl10) Ass'y Part Number: P211090-2 (For CmRB1FWm15) MRQ MSQ MSUB Ass'y Part Number: P211060-2 (For ClRB1FWl20) Ass'y Part Numer: P211080-2 (For ClRB1FWl30) 1.1-6 Series CRB1 Effective Output Direct Mounting of Body L dimensions of the body are shown below.

VP3145-OMM0003

Rc 11/2 4850 Rc 2 4850 +/5 VP3145-OMM0003 VP31 5 3 / ( ) 30 1 ( ) 6 VP3145-OMM0003 VP31 5 3 / DIN DIN 1. 3. 1) 2) 2a 2b 3) 3a 4) 1) ( ) 2) 3) 2a 2b 0.5Nm20% 90 2. 1) 2) No.12 (+/-) 3) 3e (Y ) 3f 0.5Nm15% a) 3f 3d b) O 1.25mm2-3.5 Y 1.25 mm2-4 c) 6~12mm 9~12mm 1) 4 () 2) () M4 0.60.06Nm N.C.

Ejector Valve Unit, Series ZYY/ZYX

Part No. of solenoid for SY3000/SX3000 2.

D-F6N/D-F6P/D-F6B

Auto switch 1 Auto switch 1 Blue Blue Brown Brown Auto switch 2 Auto switch 2 Blue Blue Load voltage at ON = Power supply voltage Residual voltage x 2 pcs. = 24 V 4 V x 2 pcs. = 16 V Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V Example: Load impedance is 3 k. Leakage current from auto switch is 1 mA.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

(at 0.5 MPa, without surge voltage suppressor) Note 2) Minimum operating frequency is once in 30 days. (Based on JIS B 8375.) Note 3) Note 1) and Note 2) are with controlled clean air. Note 4) Based on JIS C 0920.

VFR2000-OMM0001

(Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 16

25

Size Symbol SMC SMC 2 2 1 2 2 2 2 A B C 6 x 4 4 x 3 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" SMC P Panel mount union U Union : Basic size : With reducer : Basic size : With reducer Note) Check the IN/OUT side fitting size and fitting type for selecting the fitting. SMC E 2A SN LQ3 LQ3 fittings Caution 1.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series 10 11 Relief type Vacuum suction type Nil Built-in magnet No D With auto switch (Built-in magnet) 10 C D M 2 L 40 150 A F Z M9BW 21 C D M 2 L 40 150 A Z M9BW Mounting Basic (Double-side bossed) Axial foot Rod flange Head flange Boss-cut, Basic Boss-cut, Rod flange B L F G BZ FZ Solid state Auto switch M9B, M9BW Reed

Fieldbus system Ethernet POWERLINK compatible SI unit

(16 outputs) 0 1 Digital output unit EX600-DYF (16 outputs) 0 1 EX600-DME (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DMF (8 inputs/8 outputs) 1 1 Analog input Unit EX600-AXA 2 (1 word / 1 channel) 0 (2 channels) (2 channels) 0 2 Analog output Unit EX600-AYA (1 word / 1 channel) Analog I/O Unit EX600-AMB 2 2 (2/2 channels) (1 word / 1 channel) (1 word /1 channel) Note) 1 word is equivalent

CG1x-OM0006N

No.CG1*-OM0006N / / C*G5*N**SR/V-* C*G5*A**SR/V-* P2 P4 1. P6 1-1. 2. P7 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P16 3-1. 3-2. 3-3. 3-4. 4. P24 5.