Exhaust Cleaner for Clean Rooms AMP Series

76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

PF2W5--1 (With voltage output type) A (mm) 4 A B Output specification Display unit (PF2W30/31) Output for display unit only 42 62 12 to 24 VDC Brown Sensor unit 2-3.4 43 1 2 6 Output for display unit + Analog output 52 72 Flow direction Analog output Main circuit Main circuit 4 8 Load 2 + Switch output White 4 3 7 Model PF2W504 PF2W520 L dimension 100 106 Black 3 1 5 Blue Load is an analog

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 58 40 Station 20 346 328 Station n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 39 Series SYJ5000 [ ]: AC Type 40: Bottom Ported/SS5YJ5-40Stations -M5 Grommet (G) Approx. 300 (Lead wire length) 9 L2 L1 4-4.5 (For mounting) 13 36.9 (DIN 38.1) 21.5

Profile Design ISO/VDMA Air Cylinder Series CP95

CS95-100 1.8-8 ISO/VDMA Air Cylinders Series CP95 Dimensions standard specifications [mm] CP95SB-stroke Stroke end cushioning STROKE STROKE CP95SB-stroke W STROKE STROKE STROKE Bore AM B D EE PL RT I12 KK SW G BG I8 VD VA WA WB WH ZZ ZY E R I2 I9 32 22 30 12 G1/8 13 M6 6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

0.07 10.2 2 Compact Cylinder Series CQS OUT IN Double Acting Single or Double Rod Theoretical Force Operating pressure Piston area MPa 0.3 psi 43.5 MPa 0.5 psi 72.5 MPa 0.7 psi 101.5 Bore size Operation Rod diameter Theoretical Force (in 2) (mm 2) (inch) N lbf N lbf N lbf (mm) 25 84.8 0.131 IN 5.6 42 13.3 59 9.4 12 6 0.24 34 113 0.175 OUT 7.6 57 17.8 79 12.8 45 151 0.234 IN 10.1 75 23.8 106

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Theoretical Output (N) Operating pressure (MPa) Rod diameter (mm) Piston area (mm) Operating direction Model 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.15 39.2 33.6 28.0 22.4 16.8 8.4 11.2 56 OUT M L 4 CXS 6 21.7 18.6 15.5 12.4 9.3 4.6 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106

Cylinder with Lock Series MNB

2 68 72 37.5 15 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106

Modular Type Lubricator Series AL

90 106 E Port size Bracket (option) 70 66 3.2 13 11 C P IN OUT H OUT With float switch B 210 Specifications Contact capacity: 15VA(AC) 15W(DC) Contact point: 1a, 1b B 210 Min. clearance for maintenance G 1/2 Float switch Part number: IS400-1 to 2 Min. clearance for maintenance With bracket B With float switch B 374 383 383 382 385 C E Model Port size H 25 18 16 35 35 P 47 47 AL30 AL40 AL40

Ambient Dryer Series AMG

1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

63 80 100 125 160 Bore size (mm) 5.01 Basic type 9.55 16.55 1.59 2.27 2.85 7.49 (0mm stroke) Basic weight 7.14 Foot type 16.14 27.25 2.10 3.23 4.09 10.93 5.97 Flange type 12.51 27.42 1.84 2.71 3.42 9.19 6.77 Front trunnion type 14.05 24.39 1.86 2.72 3.35 10.39 6.52 Center trunnion type 13.31 23.46 2.01 2.99 3.62 10.18 Additional weight per 10mm stroke 0.38 0.62 0.94 0.18 0.16 0.20 0.48 106

Hydraulic Cylinders

(mm) Rod end male threads a b c e f g h Bore size (mm) 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 86 40 26 30 M20 x 1.5 7 19 40 95 50 31 35 M24 x 1.5 8 24 46 106 63 41 45 M30 x 1.5 9 30 58 125 80 56 60 M39 x 1.5 14 41 77 155 100 71 75 M48 x 1.5 21 50 101 197 7 Series CHKDB Auto Switch Specifications Auto Switches: Proper Mounting Positions and

Air Fittings Fitting Series For Special Environment

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

D Piping port 2-M5 x 0.8 33 10 J 5 12 9.5 Mounting reference planes B D Section AA MXP12-25 Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 2-M2 x 0.4 depth 3 For magnet mounting 8 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) Z MXP12-15 MXP12-25 SMXP12, #1 (#1 + #3) SMXP12, #2 (#2 + #4) L K J V H S G M W Model 24 22 68 59 40 15 76 10 29 55 MXP12-15 42 40 98 89 60 25 106

MXS Series Air Slide Table

-1) x H G H 11 5.5 5.5 11 A B 3.2 6.5 7 7 12 4 NN-M4 x 0.7 thread 8 deep A B 3H9 2.5 deep +0.025 0 3H9 2.5 deep +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 GA 11 21 31 43 41 HA 20 20 20 30 48 N 4 4 6 6 6 G 6 6 11 13 17 H 25 35 20 30 24 NN 2 2 3 3 4 I 10 10 7 19 25 J 17 27 40 50 60 K 22.5 32.5 42.5 52.5 62.5 Z 41.5 51.5 61.5 83.5 99.5 M 42 52 62 84 100 ZZ 48 58 68 90 106

For Water Digital Flow Switch Series PFW

(+) Main circuit Black (4) OUT 34 54 44 Blue (3) DC () Use this sensor by connecting it with the P/A remote type display unit series PFW3. (1), (3), and (4) are connector pin numbers. , , and are the series PFW3 terminal numbers. 2-Port size 4-4.5 40 50 (43.5) Connector pin numbers 2 1 42 4 3 4 Pin description DC (+) N C DC () OUT Pin no. 1 2 3 4 2-3.4 43 Flow direction Dimension L 100 106

Square Tube Type Air Cylinder Series MB1

800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106

5 Port Solenoid Valve SY Series

1.9 6.6 SY520 --C4 SY920 --03 One3 8 3 position 3 position 8.7 (8.3) 0.34 (0.40) 2.2 (2.3) 0.84 (0.84) 0.64 (0.53) 0.30 (0.27) Exhaust center Exhaust center touch fitting 0.75 0.36 0.19 8.0 0.33 1.9 117 122 164 279 285 327 172 335 for 4 8.9 (3.3) 1.5 0.34 (0.40) 0.25 2.2 (0.82) 6.5 0.78 (0.71) 0.27 0.44 (0.37) 0.57 0.21 (0.18) 0.84 Pressure center Single Pressure center Single 1 8 88 91 106

5 Port Solenoid Valve, Series VQC

A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 23 12 20.5 8 77.5 95.5 75.5 61.5 1.5 43.5 11.5 21.5 (6.5) 27 31 38.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 2-Rc 1/8 (Pilot EXH port) (mm) Formulas: L1 = 25n + 106

VH Series, 4 Way Hand Valve

/8,1/2NPT 6 Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150 151 48 25 4-3/4,1NPT 3 (R) 40 7 Series VH Panel mount/Dimensions (mm) / Panel mount type Dimensions VH21 -N02 VH31 -N02/N03 Scale: 40% 4 (B) 2 (A) 25 25 25 4 (B) 1 (P) 3 (R) 1 (P) 74 62 62 49 2 (A) 49 45.5 46.6 62 134 97 125 94 1.5 45 1.5 106