Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

Table of Contents

200 203 Series CDQ2 With Auto Switch.

MU

Possible to install auto switches Series Variations Standard stroke (mm) Rod end configuration Applicable auto switch Action Type Bore size (mm) 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Single rod 32 Reed switch D-A7 D-A8 (2-color) D-A79W Double acting 40 50 Double rod Male thread, Female thread 63 Solid state switch D-A7 D-J79 (2-color) D-F7W D-J79W 25 32 Spring return

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) Courtesy of Steven Engineering

MXH

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Up to 300 Up to 100 Up to 500 Up to 100 Up to 300 Up to 500 Maximum speed (mm/s) (2) 50 (7) 100 (5) 50 (4) 100 (8) 200 (9) 100 (11) 50 (10) (1) 200 (12) 200 (6) Load eccentricity (l mm) (3) Selection graph L: Overhang (the distance from the cylinder

08-cs1-e

Air Cylinder/Standard Type: Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube Type: 125, 140, 160, 180 200, 250, 300 Air-hydro Type: 125, 140, 160 Replacement Procedure is P.287 Construction Lube #1 @7 @3 @5#0@8@4 @9 @6 @6 200: More than 998st When the target class 2 pressure vessel #1 @7 @3 @5#0@8@4 @9 @6 Non-lube @6 @6 200: More than 998st When the target class 2 pressure vessel

Lock Unit Assembly, MWB, TIE ROD CYLINDER W/LOCK, O08, 1.73 lb

Lock Unit Assembly, MWB, TIE ROD CYLINDER W/LOCK, O08, 1.57 lb

Lock Unit Assembly, MWB, TIE ROD CYLINDER W/LOCK, O08, 1.618 lb

The MB series medium duty tie rod cylinder offers an improved design that enhances cylinder operation and ease of use. The standard air cushion utilizes a floating cushion seal to eliminate piston rod bouncing. The cushion volume has been elevated permitting about 30% more allowable kinetic energy absorption. The port and captive cushion adjustment valve are located on the same side of cap

Lock Unit Assembly, MWB, TIE ROD CYLINDER W/LOCK, O08, 1.49 lb

Cylinder, MWB, Tie Rod, TIE ROD CYLINDER W/LOCK, O08, 2.01000 lb

Cylinder, MWB, Tie Rod, TIE ROD CYLINDER W/LOCK, O08, 2.97000 lb

EXxx-OMO0027

Selects the time to hold the input signal. 15 ms 200 ms Memorizes the number of times the input device is ON. Generates error per channel when the operation count exceeds the set value. 3 Enable Generates an error.

Fieldbus system EtherCAT compatible SI Unit

values Enum0803 0=LSB-MSB 1=MSB-LSB 1: x = Unit No. -99No.EX-OMA1023 Digital input unit (EX600-DX###) Index Name (Meaning) Type Value 40x0:0 Unit parameters UNSIGNED8 10 40x0:01 Monitor short circuit(power) Enum0800 0=Disable 1=Enable 40x0:05 Inrush current filter Enum0800 0=Disable 1=Enable 0=0.1 ms 1=1 ms 2=10 ms 3=20 ms 40x0:09 Input filtering time Enum0806 0=1 ms 1=15 ms 2=100 ms 3=200

SI unit for Ethernet POWERLINK

OFF Note 1: ON/OFF 50 ms flashing Note 2: ON 200 ms single flash, OFF 1 s Note 3: ON/OFF 200 ms double flash, OFF 1 s Note 4: ON/OFF 200 ms triple flash, OFF 1 s Note 5: ON/OFF 200 ms flashing -15No.EX-OMV0023-A Switch setting The switches should only be set with the power supply turned off.

HRX-OM-W038

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Recommended earth leakage breaker Model Power supply Sensitivity voltage Cable qty. x size Rated Rated of leak voltage current current [V] [A] [mA] 1-phase 200-230V AC (50/60Hz) 3 cores x12AWG HRS040-A-20 200, Recomm 230 20 30 Terminal (3 cores x3.5mm2) HRS040-W-20 block ended (including ground) screw crimp diameter terminal

HRX-OM-O021

Table 3-3 Power supply cable and Earth Leakage BreakerRecommended Terminal block Recommended earth leakage breaker screw Recom Tightening Model Power supply Cable qty. x torque Rated Sensitivity Rated diameter mended voltage size voltag of leak current crimp e current [A] terminal [V] [mA] 3coresx12AWG 1-phase (3 cores 200-230V AC HRS050-A-20 200, x3.5mm2) (including 230 20 30 M4 5.5-4 1.5Nm

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.