HRX-OM-W002

No.21 "AL25Contact input signal detection 1" OFF detection timer 0 0 to 10 INP1OVER SEC screen No.22 screen Changing of "AL26Contact input signal detection 2" FLT OFF/WRN/FLT INP2ALARM No.23 "AL26Contact input signal detection 2" reading delay timer 0 0 to 300 INP2DELAY SEC screen No.24 "AL26Contact input signal detection 2" OFF detection timer 0 0 to 10 INP2OVER SEC screen No.25 screen

HRX-OM-X071

INP1DELAY SEC screen No.21 AL25Contact input signal detection 1 OFF detection timer 0 0 to 10 INP1OVER SEC screen No.22 screen Changing of AL26Contact input signal detection 2 FLT OFF/WRN/FLT INP2ALARM No.23 AL26Contact input signal detection 2 reading delay timer 0 0 to 300 INP2DELAY SEC screen No.24 AL26Contact input signal detection 2 OFF detection timer 0 0 to 10 INP2OVER SEC screen

HRX-OM-T004

Set range is 0 to 300 sec. to Contact input signal 2 OFF detection timer Setting and checking 17. Press the [SEL] key once. The set screen of contact input signal 2 OFF detection timer is displayed on the digital display. PV SV 18. Select contact input signal 2 OFF detection timer from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-R028

Set range is 0 to 300 sec. to Contact input signal 2 OFF detection timer Setting and checking 17. Press the [SEL] key once. The set screen of contact input signal 2 OFF detection timer is displayed on the digital display. PV SV 18. Select contact input signal 2 OFF detection timer from the table below with [] key or [] key, and confirm by pressing SEL.

XL-OMV0002

60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 Ass'y 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300

XL-OMY0002

1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-50,XLD-160 XLD-63,XLD-80,XLD-100 S 1 SUS304+ 4 1) S S O 2) S O FKM 5 O 6 S O 2 FKM 9 S SUS304 10 11 XL-OMY0002 6. 6-1.

FGX-OMZ0008

300 X40 0.4m 99.9% Element category Symbol Element J HEPO D Membrane Port size Port size Symbol (Rc) 03 3/8 04 1/2 06 3/4 8/12 FGX-OMZ0008 4.

JXCx-OMX0009

The value of 80h that is the OR (logical add) is output to Sub Function which set in RWw1. *3) Sub Current 3 Function speed Full numerical data instructions F to 8 H Return of Data editing The current speed of the electric actuator is shown in multiples of 1 mm/s when numerical data reading is enabled Example) 300 mm/s (300d=012Ch) is output RWr3012Ch Half numerical data instructions The

JXCx-OMT0062

The value of 80h that is the OR (logical add) is output to Sub Function which set in RWw1. *3) 7 to 0 L Sub 3 Function Current speed Full numerical data instructions The current speed of the electric actuator is shown in multiples of 1 mm/s when numerical data reading is enabled Example) 300 mm/s (300d=012Ch) is output F to 8 H RWr3012Ch Half numerical data instructions The start address

CEx-OMB0060

That is, the shortest reset processing time takes 300 ms and it will be longer for longer reset signal input time. [ Reset input time: 10 ms to 100 ms ] [ Longer reset input time ] Reset processing time Reset processing time (reset input time + 150 ms) 300 ms 150 ms ON ON Reset signal Reset signal OFF 10100 ms Note 8: Reset in RS-232C communication When a reset command is received, a response

Digital Flow Switch (Integrated display type)

Power supply voltage 24 V: 600 Load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 -45No.PF-OMO0012-E Specifications Model PF2W7--28--X560 PF2W7--68--X560 PF2W7--29--X560 PF2W7--69--X560 Voltage output (1 to 5 V) Current output (4 to 20 mA) Load impedance Impedance Output impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Analogue output

Digital Pressure Switch

mode) With auto-shift switch output NPN open collector output type 2 output Max. 28 V, 80 mA Residual voltage 1 V or less -17No.PS-OMM0003-J -V/-T (Analogue output mode) Switch output PNP open collector output type 2 output Max. 80 mA Residual voltage 1 V or less T: Analogue output 1 to 5 V Output impedance 1 k V: Analogue output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300

LA-OMP0023

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

VQZ Series

For VQZ200/300/1000/2000/3000 Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

High Vacuum L Type Valve

H 5 Initial power/ Power 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models.

Digital Flow Switch (Remote type sensor unit)

(reference 25 oC) Operating pressure range 2 Refer to graph of operating pressure and proof pressure Proof pressure 2 Refer to graph of operating pressure and proof pressure Pressure loss Refer to graph of pressure loss Response time 3 1 s Analogue output Voltage output Output voltage: 1 to 5 V, Output impedance: 1 k Current output Current output: 4 to 20 mA Maximum load impedance: 300 for

Digital Pressure Switch

at 12 V power supply voltage 600 at 24 V power supply voltage Min. load impedance 50 -E PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less Analogue voltage output Output impedance approx. 1 k -F PNP open collector 1 output Max. 80 mA Residual voltage 1 V or less Analogue current output Max. load impedance 300 at 12 V power supply voltage 600 at 24 V power supply voltage

XLG Series

H 5 Initial power/ Power consumption (W) 100 VAC 800/180 1200/300 1600/400 200 VAC 3200/180 4800/300 6400/400 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for the size 16 models. The heaters are PTC thermistor type design.

180

(PAT.PEND) Over length L(mm) Gripping moment Weight (g) Bore size (mm) Model (Nm) L MHW2-20D 68 300 20 0.30 MHW2-25D 510 25 0.73 78 905 MHW2-32D 32 93.5 1.61 2135 MHW2-40D 117.5 40 3.70 5100 Auto switch mounting at 4 locations MHW2-50D 154 50 8.27 At the pressure of 0.5 MPa MHZ Two finger types available.

3-Position Rotary Table

Arm Load A CRB2 Displacement CRB1 MSU MSZ10A MSZ20A CRJ CRA1 300 CRQ2 MSQ MSZB10A (Basic type) 400 MSZ MSZ MSZA20A (Basic type) Displacement m Displacement m 250 CRQ2X MSQX MRQ 350 200 40 190 40 30 30 MSZA10A (High precision type) MSZA20A (High precision type) 20 20 10 10 50 40 30 20 10 0 30 25 20 15 10 5 0 Load N Load N MSZ50A MSZ30A 350 300 300 250 250 MSZB30A (Basic type) MSZB50A (Basic