Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ100 Body Ported Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 121.00000 lb

Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ100 Body Ported Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 121.00000 lb

Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ100 Base Mounted Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 83.00000 lb

Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ100 Base Mounted Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 273.00000 lb

Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ200 Body Ported Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 88.00000 lb

Manifold base for VQZ200/300 body ported valves, Top mounted piping, Maximum 20 stations available as standard, 1/8 PT or NPT(VQZ200); 1/4 PT or NPT(VQZ300) P and R ports, Optional DIN rail mount, VQZ200 Body Ported Manifold, VQZ100-300, 3 PORT SOLENOID VALVE, 228.00000 lb

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VFA3000

Lubrication Not required Mounting orientation Impact/Vibration resistance (m/s2) Note) Free 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

ø32, ø40, ø50, ø63 Series CVQM Compact Cylinder with Solenoid Valve/ Guide Rod Type

other than 300 mm, refer to the plug connector lead wire.

Booster Regulator Series VBA1110 to 4200 1

Booster regulator IN port Rc 1/4 Tank IN port Rc 3/8 3 R 1/4 Tank OUT port Rc 3/8 33 10 20 18 8 60.5 (Fully closed) 366 65 (Fully closed) 8.7 3.5 Hexagon across flats19 Drain port 4-11 mounting hole 14-9-8 9 Air Tank VBAT05 to 38 Dimensions VBAT10, VBAT10S With booster regulator VBA1100/VBA1 connected. Tank IN port Rc 1/2 Booster regulator IN port Rc 1/4 F.R.L.

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Air Suction Filter

(Example) For 6 stations 06 How to Order (Single unit) ZFA 100 01 Bracket Air suction filter Symbol Nil L None Bracket ZFA100 1 pc. on the left R LR Body type 1 pc. on the right With both the left and right sides 100 Filtration area (mm2) Symbol L or R shows the left or right of the filter IN when viewed from front. 2110 4210 200 Port size Thread type Applicable model Symbol 02 01 Port

Speed Controller with

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Description Body A Handle Body B Needle Seat ring Needle guide Material Note No.

PFxx-OMO0004CN

) CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB 7 A*8 201 2~200L/min 8 2 (11) S () C8 8(5/16") *6 02*1 Rc1/4 M SI*7 N02*1 NPT1/4 6 F02*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Material Note Description Body Needle Bottom cover Handle Component Parts Chromated Aluminum alloy Brass Aluminum alloy Zinc alloy q w e r No. Description Material Note Body Valve guide Check valve Needle Handle Chromated Chromated Rubber lining Chromated Black painted Aluminum alloy Aluminum alloy Brass Brass Carbon steel q w e r t AS Replacement Parts ASP No. Description Part no.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

Digital Gap Checker

ISA3-B-R Regulator Regulator ISA3---B-LN ISA3---B-RN -24No.PS-OMT0002-E 2 About this product ISA-17 (Bracket when control unit fitted) Y200T-A (Spacer with bracket) ISA-20 (Bracket for centralized lead wire) -25No.PS-OMT0002-E 2 About this product ZS-31-B (Lead wire with connector (Straight)) ZS-31-C (Lead wire with connector (Right angle)) ISA-21(Centralized lead wire) -26No.PS-OMT0002-

Types: Dryers, Method: Hollow Fiber Type, Shape: Standard, Outlet Flow Rate(l/min): 240, Outlet Open Air Pressure Dew-Point(°C): -40, Exit Flow Rate Class(l/min): Up to 300, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 25, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 1/2, Control Side Connection Type: [Rc (R)] Rc, Control Side Plumbing Thread