Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32, 4), Stroke: 300mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): 6N (LECA6, Step Data Input Type, NPN), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting
Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32, 4), Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): 6N (LECA6, Step Data Input Type, NPN), I/O Cable Length for LEC: 3 (3m), Controller Mounting: D (DIN Rail Mounting
Size: 25, Motor Mounting: In-line Type, Motor Type: Servo Motor, 24 VDC, Lead: LEY25, 12; LEY32, 16, Stroke: 250mm, Motor: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 3m, Controller Mounting: DIN Rail Mounting, Communication
Size: 25, Motor Mounting: In-line Type, Motor Type: Servo Motor, 24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 250mm, Motor: w/o Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut Included, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 3m, Controller Mounting: DIN Rail Mounting, Communication
Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 6; LEY32, 8, Stroke: 250mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 3m, Controller Mounting: DIN Rail Mounting, Communication
Size: 32, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 300mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 3m, Controller Mounting: DIN Rail Mounting, Communication
Size: 25, Motor Mounting: Top Mounting Position, Motor Type: Step Motor, Servo/24 VDC, Lead: LEY25, 3; LEY32, 4, Stroke: 100mm, Motor: w/o Lock, Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Length: 3m, Controller Type (LEC, JXC): LECA6, Step Data Input Type, NPN, I/O Cable Length for LEC: 3m, Controller Mounting: DIN Rail Mounting, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 150mm, Motor Option: w/Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor,
Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 250mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN,
Series: Clean Series Ball Screw Drive, Accuracy: High Precision Type, Size: 25, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 350mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN,
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 16, Motor Type: A [Servo Motor (24 VDC)], Lead: LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 3m, Controller Type: LECA6 NPN, Servo Motor,
Proposals for Energy Saving Note 2) Power supply 12 months continuous operation (without back lighting) Battery life 250ms Response speed 2% F.S. or less (Temperature conditions: at 25C) Display accuracy 1% F.S. or less (Temperature conditions: at 25C) Repeatability 3% F.S. or less (0 to 50C, based on 25C) Temperature characteristics M5 x 0.8 Piping port 0 to 50C (with no condensation) Ambient temperature 35 to 85%
Double Max 10ms Max 15ms 3-position Max 20ms Max 25ms Life 200 million cycles or more Ambient and Fluid Temperature ( N o t e 3 ) -10 to +50C (14~122F) -5 to +50C (23~122F) Lubricant ( N o t e 4 ) Not required Not required Manual Override Non-locking, Push Non-locking, Push Protection Dustproof Dustproof ( N o t e 2 ) Calculated on the basis of JIS B 8375-1981 (Supply pressure 0.5 MPa {5.1
0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.
0 to 50C Linearity Note 1) 5% F .S. or less 3% F .S. or less Repeatability Note 1) 2% F .S. or less 1% F .S. or less Temperature characteristics 2% F.S. or less (15 to 35C based on 25C), 3% F .S. or less (0 to 50C based on 25C) Pulse output, N channel, open drain, output for display unit PF2W3.
Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.
0 to 50C Linearity Note 1) 5% F.S. or less 3% F.S. or less 2% F.S. or less 1% F.S. or less Repeatability Note 1) 2% F.S. or less (15 to 35C based on 25C), 3% F.S. or less (0 to 50C based on 25C) Temperature characteristics Pulse output, N channel, open drain, output for display unit PF2W3.
(23 to 122F) Inlet air temperature Ambient temperature 5 to 50C (23 to 122F) 5 to 50C (23 to 131F) Outlet air atmospheric pressure dew point Inlet air flow rate l/min (ANR) (SCFM) Note 2) Standard performance 25C (68F) 62 (2.2) 125 (4.4) 250 (8.8) 375 (13.2) 625 (22.1) 900 (31.8) 1190 (42.0) 725 (25.6) 31 (1.1) Outlet air flow rate l/min (ANR) (SCFM) Purge air flow rate l/min (ANR) (SCFM