Precision Cylinder Series MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Air Cylinder NCQ7 Series Compact Cylinder

Type 19 o{rsut NPN NPN PNP NPN NPN Appllcalion Relay, lC, Squence conlroller 24YDC rclay, 8elay, rc, 24VDC rclay, Eby, rc, 4.s-28VDC 5-24VDC 5-24VDC 12-24VDC 5-24VOC 5-24VDC 24VDC Max. lOmA I Max.2omA Loaal volleEa ZSVDC or ls! Max.28VDC 10-28VDC Max.28VDC 10-28VDC Max. 28VDC Mar(. 150m4 Max.'l00mA 5-t00mA 5-4omA I 6-40ma hEmsl vollrgE drop {kitgr l@d voftlg!

Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

PAB-OM-O003

Actuation P07 Rc 1/8 P07N NPT 1/8 With 1/4" tubing 3 Air operated P07F G 1/8 With nut 1S07 LQ1 size 2 with Rc 1/8 1S07N NPT 1/8 nuts 1S07F G 1/8 Connection method 3S07 LQ3 size 2 with Rc 1/8 Symbol Connection method 3S07N NPT 1/8 nuts S With nutNote 3S07F G 1/8 Note) The nut is a space saving type. 13 8.

VNC

Pilot port Rc A B C D E F H J K L Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 77 96 113 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 229.5 247 270 197 214.5 237.5 55 63 74 17-4-25 6 Series VNC Flange Type Port size: 32F, 40F, 50F Electrical entry hole: G1/2 Pilot port Manual override (Non-locking) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Process Pump

This may cause internal damage to the process pump or liquid leakage. 10 Specifications Model PA3310 PAP3310 Actuation Automatically operated Rc, NPT, G, NPTF 3/8" Female thread Main fluid suction discharge port Rc, NPT, G, NPTF 3/8" 3/8", 1/2" Tube extension Female thread With nut (size 3, 4, 5) 3/8", 1/2" Integrated fitting type Port size Pilot air supply/exhaust port Rc, NPT, G, NPTF 1

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

VCB

Proper tightening torque N m Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc.

VZ3000

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed

AR20-B to AR60-B

E Square embedded type pressure gauge (with limit indicator) G Round type pressure gauge (with limit indicator) M Round type pressure gauge (with color zone) Option *3 Nt b E1*6 Output: NPN output, Electrical entry: Wiring bottom entry E2*6 Output: NPN output, Electrical entry: Wiring top entry E3*6 Output: PNP output, Electrical entry: Wiring bottom entry E4*6 Output: PNP output, Electrical

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Thermo-chiller

6 !2 x 4 !3 w Parts List (170) No.

VM

(PT) (8A), EXH port Rc(PT) (6A) 1 4 1 8 Piping possible to any EXH port.

ATX-OM-F004E

Electric circuit diagram ATX-OM-F004E Air-Cooled Aftercooler 6. Installation 6.

Compact Cylinder with Air Cushion Series RQ

1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.

ZMA

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

3

To maintain p3% F.S. in the specificatioins, use a straight pipe that is 11 cm or longer in length. p2 p0 0 2 4 6 8 10 Straight piping length [cm] 13 For measurable range for ethylene glycol aqueous solution (reference values), refer to page 6.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

TA301

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled.

MB1

10 to 70C (No freezing) With auto switch 10 to 60C (No freezing) Ambient and fluid temperature CJP Lubrication Not required (Non-lube) 50 to 1000 mm/s Piston speed CJ2 +1.0 0 +1.4 0 +1.8 0 Stroke length tolerance Up to 250: , 251 to 1000: , 1001 to 1500: JIS Symbol Double acting Note) Cushion Both ends (Air cushion) CM2 Thread tolerance JIS Class 2 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 3/8 Rc 1