SFOD-OMT0009CN

USB 7. 106 No.SFOD-OMT0009CN-B 7. 7. 4. ( EMG ) 4. 107 No.SFOD-OMT0009CN-B 1. 1.1 LEY/LEYG LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 A B C A B C A B C A B C [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 [mm] 300 300 300 400 400 400 500 500 500 500 500 500 [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 [mm/s] 15 8 4 18 9 5 24 12 6 24 12 6 () [mm/s] 22 12 6 26 13 7 34 17 9 34

Ionizer Gun

150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance

ML2B

Piston speed (mm/s) 1000 Air cushion RS Q G Adjusting Procedure 500 400 300 Lock nut for adjusting bolt Unit holding bolt RS H A Adjusting bolt 200 RZQ Lock plate holding bolt 0.5 100 10 20 30 4050 100 200 300 400500 MI W S W2 max W1 max W3 max CEP1 Allowable load (N) Shock absorber CE1 ML2B40 Horizontal collision: P = 0.5 MPa Lock plate 2.

AC

Q Model Port size A B C D M P B B E F G H J K L N 22 34.2 42.2 8.5 11 13 23 26 5 7 7 50 70.5 88 AC2041 AC3041 AC4041 248.5 300 187.5 3.5 4 1 5.5 7 9 45 58.5 77 24 35 40 35 29.5 38 30 41 50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 90 117 154 164.5 207.5 259 78 92.5 112 45 55 70 33 Option marks in the dimension diagram show the direction of inclination from port center to gauge center.

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Table of Contents

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

Vacuum System Peripherals:

Metal Seal, Rubber Seal 3 port solenoid valve Series VQZ200/300 Piping specifications Solenoid valve Port size Effective area (mm2) (Cv) Flow characteristics C (dm3/(sbar)) VQZ215 VQZ235 VQZ225 VQZ245 VQZ315 VQZ335 VQZ325 VQZ345 1.7 2.3 1.7 2.5 3.0 4.5 2.9 4.4 VQZ 200 1 8 1 4 , Base mounted (With sub-plate) VQZ 300 , 1 4 3 8 Base mounted 3 port solenoid valve Series VK Compact size: Width

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

3 Port Solenoid Valve Series VQ100

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note 2) Stations Note 3) 01 1 station 16 16 stations 2-4-82 Body Ported Series VQ1000 Plug Lead Unit: Cassette Type (M plug connector AC, Latching) 43.5 300 (Lead wire length) 38.5 Lead wire 0.2 mm2 (M plug connector) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Cover 1.4 Lead wire length 300 mm 35.5 (L plug connector

Thermo-con

Heating Capacity HEC001 Circulating fluid: Clear water Circulating fluid: 20% ethylene glycol F 50 70 90 110 130 150 F 50 70 90 110 130 150 600 600 Facility water flow rate: 13. gpm (5 L/min) Facility water flow rate: 1.3 gpm (5 L/min) 500 500 Heating capacity (W) Heating capacity (W) 400 400 Facility water: 86F (30C) 300 300 Facility water: 68F (20C) Facility water: 68F (20C) 200 200 HRG

3 Port Solenoid Valve Series VQ100 1

AXT661-12A Nil 300 mm 600 mm 1000 mm 2000 mm 3000 mm 6 10 20 30 Plug connector lead wire length Passage Indicator light Single Latching type A-C ON (Set) Indicator light Passage The lead wire length of the valve with lead wire is 300 mm.

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Blow Gun Series VMG

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Turning the power back on while in the Aon setting can cause a malfunction. 854 Pressure Sensor Controller Series PSE200/300 Function Details M Unit display switching function Display units can be switched with this function. Units that can be displayed vary depending on the range of the pressure sensors connected to the controller.

Dual Rod Cylinder Series CXSJ/CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum speeds for 10 to 32 are

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Electric Actuator Triple Axis P&P Unit

17.1 150 200 19.2 250 300 21.3 350 400 23.4 450 500 25.5 550 600 27.6 1500 46.5 Stroke(mm) X axis 700 29.7 750 800 31.8 850 900 33.9 950 1000 36.0 1100 38.1 1200 40.2 1300 42.3 1400 44.4 3 Triple Axis P&P Unit How to Order Single Axis LG 240Z 50 Y G J Y axis/Z axis Axis type Ball screw specifications Rolled ball screw (mm) 15, lead 5 15, lead 10 15, lead 20 16, lead 32 Symbol

Uniaxial Electric Actuator Series LJ1

500 100 200 300 500 Figure 1.

Sine Rodless Cylinder Series REA

, 350, 400, 450, 500, 600, 700, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.