Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

H I J K Stroke 5 5 D C 20 +38 +10 +28 I 30 +48 +20 40 +84 +30 +54 50 +94 +40 J H F Width across flats 7 Hexagon width across flats 12 M8 x 1.25 Y 2.5 A B Stroke 20 to 50 mm Dimensions: 10 mm Stroke (mm) A B C D F H I J Y Model ZPT40F10-B01-A14 40 43 12.5 18.5 39 51.5 118 5 50 ZPT50F10-B01-A14 50 53 13.5 19.5 40 52.5 119 6 Additional Dimensions by Stroke (mm) I J H Stroke 20 +10 +5.5 0 30

ZR

Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data in 13-1-10 to 13-1-19. 13-3-48 48 Series ZR Large Size Vacuum Module: Vacuum Pump System Vacuum Pump System Mounting Thread Parts List for Unit Combination Without Manifold Manifold Specifications Components Valve unit + Vacuum switch/Filter unit ZX ZR ZM Mounting Thread Parts List

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

4/5 Port Air Operated Valve SYJA3000 Series

characteristics Note 1) Note 2) 4/25/3 (A/BEA/EB) Pilot port size Weight (g) b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] Single Double 34 38 0.41 0.13 0.47 0.41 0.13 0.47 2 position 0.44 0.13 0.49 0.40 0.12 0.44 Closed center M5 x 0.8 SYJA520-M5 Exhaust center Pressure center Single Double 0.37 0.12 0.46 0.43 [0.35] 0.13 [0.10] 0.47 [0.39] 0.51 [0.38] 0.14 [0.10] 0.49 [0.39] 0.42 0.12 0.45 48

4/5 Port Air Operated Valve Series SYJA3000

Valve model Type of actuation Port size 1 4/2 (P A/B) Flow characteristics Note 2) Note 3) Effective area mm2 4/2 5/3 (A/B EA/EB) Weight (g) Pilot port size Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48

Vacuum

Flat wlth rib 1 0 1 2 21 29.946 5 6 1 . 7 1 3 1 5 't2 21 29.946 5 6 3 1 . 8 '19 20 1 6 1 8 12.5 215t301 46.S 5 3.5 Dep type 23 23 22 23 23 22 50 48 50 Applicable Tube ) 56 54 56 54 57 co 57 '5l3e" lube may be subslituled for 4mm.

VDW30/40-XF

E c 48 mm 3 W (Standard) 0.5 W (With power-saving circuit) 50 mm VDW30-XF Quick fastener One-touch fitting VCH Piping labor reduced No torque control needed, easy handling. VDW VDW Quick fastener body One-touch fitting body SX10 Quick fastener clip VQ LVM Male quick fastener ( Male quick fasteners are not included.)

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

100 29.5 30 16 165 175 117 140 40 42 12 60 80 42 39 10 22 62 93 10 70 15 85 146 147 1000 (1001 to 1200) MGF 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48

CV/MVGQ

RHC (mm) 40 50 63 80 100 10 10 10 14 14 8 11 11 13 16 147 157 173 189 203 + 0.058 0 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 10 12 16 20 25 15 18 25 31.5 35.5 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 16 20 20 25 30 32 40 40 52 52 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 30 35 40 48

Clean Room Rodless Cylinder Series CYP ø15, ø32

Dynamic moment Me3 L2 We W = 1/3 14.7 (50 + 27) 103 Review Me3. = 0.38 [Nm] 3 = Me3/Me3 max = 0.38/3 = 0.13 Guide central axis A Me1 W We Me1 = 1/3 We (L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 4 = Me1 /Me1 max = 0.48/3 = 0.16 Review Me1.

Manifold Specifications

Applicable solenoid valve Type 20 How to Order G L M D Option VV4Z1 05 20 1 4(A), 2(B) port VZ1120-M5 Applicable blanking plate assembly DXT170-25-1A Individual EXH spacer assembly DXT170-48-1A Individual SUP spacer assembly DXT170-44-1A Stations P, R port thread type 02 2 stations F: With foot bracket 20 20 stations Nil Rc G NPT 1(P) port 00F 00N 3(R) port NPTF 00T Bracket is not mounted

0.4

Note 9) Refer to Dimensions on page 48 for SI unit and valve, in case of W (Dust-tight, Water-jetproof). SI Unit Part No. (Without option W [Dust-protected (-XP) is included.]) Protocol Symbol CE compliant SI unit part no.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

C6 (SUP) port One-touch fitting for 6 Block bushing assembly Block bushing assembly D side U side Valve Valve Valve SUP/EXH spacer D side U side 48 ~ = Block bushing assembly (6 pcs. attached) 2-4-87 Body Ported Series VQ1000 Manifold Option Parts Can be included in manifold model no.

KR

(mm) Connection thread R Model L1 L2 D1 Applicable tubing KRW06-02S KRW06-01S 1 8 26 41 67 30 47 74 66 76 145 10 42.5 40 46 48 43.5 49.5 51.5 56.5 58.5 65 57.5 59.5 66 10 20 48 46.5 1 4 17 4.0 14 17 12 14 17 12.8 6 8.6 KRW06-03S 47 14.2 3 8 1 8 KRW08-01S KRW08-02S KRW08-03S KRW10-02S KRW10-03S KRW10-04S KRW12-02S KRW12-03S 1 4 3 8 1 4 3 8 1 2 1 4 3 8 51 52.5 59.5 61 66 62 63.5 15.2 12 23

Digital Flow Switch (Integrated display type)

terminology 18 Mounting and Installation 21 Installation 21 Wiring 23 Outline of Settings 27 Flow Setting 28 Simple Setting Mode 29 Function Setting 30 Default setting 31 F0 Fluid/Unit criteria/Measurement unit setting 33 F1 Setting of OUT1 35 F2 Setting of OUT2 40 F3 Digital filter setting 44 F4 Auto-preset function setting 45 F10 Display mode setting 47 F11 Display resolution setting 48

Sine Cylinder Series REC

Y-020B Y-032B Y-040B Size 0.2 0.1 9 Type C9 for shaft 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 0.2 0.1 9 Type C9 for shaft 48 18 20 25 38 9 18 5 14 M10 x 1.25 MQ CDP-1 0.3 0.1 16 3 x 18 l 68 22 24 55 12 38 13 25 49.7 M14 x 1.5 CDP-3 Knuckle pins and retaining rings (cotter pins for 40) are included.

KA

23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26 22.5 24.5 11 16 14 12 15.2 8 23 14.9 18.5 14.9 3 8 KAL08-U03 17 25.5 27 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 1 4 3 8 KAL10-U02 KAL10-U03 30 30.5 17 26.5 17 18.5 10 21 25.0 25.0 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 KAL12-U02 KAL12-U03 31.5 32.5 27 28 17 17 20.9 12 28.5 39.7 22 39.7 Connection thread 1 2 KAL12-U04 31 33.5 22 48

Compact Cylinder with Air Cushion and Lock Series RLQ

CNS 8 4 x 5.5 37 + Stroke 32 17 56 65 86 + Stroke CLS CLQ RLQ Rod end nut 38.5 MLU Head flange style: RLQG32 MLGP ML1C 54.2 48 34 37 + Stroke 32 7 8 56 65 4 x 5.5 84 + Stroke Rod end nut 28.5 Cap bolt 4 x M5 x 0.8 Double clevis style: RLQD32 5 Hole: 10 H10 Shaft d9 52.7 14 37 + Stroke 32 7 20 10 +0.4 +0.2 18 36 -0.1 -0.3 96 + Stroke D106 + Stroke -X Refer to page 857 for details of rod

Base Mounted Metal Seal/Rubber Seal Series VQ

(Pitch) L = 12.5 x n + 10.5 L Dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No. L dimension 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No.