48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.

SMC Basic Pneumatics

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

%silltr

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Air Catch Sensor Series ISA

01G ISG ZSM Accessory Bracket: ISA-1-A Gauge: G33-3-01 DIN rail: ISA-2-1 to 7 Gauge: G33-3-01 Bracket: ISA-1-A DIN rail: ISA-2-1 to 7 10 (Hexagonal) Material: SPC (Nickel plated) Material: Aluminum 100 110 q we r t L 90 4 x 4.5 10 25 5 7.5 30 R 1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model ISA -1 ISA -2 ISA -1 ISA -3 ISA -2 ISA -4 ISA -3 ISA -5 ISA -4 ISA -6 ISA -5 ISA

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

PFxx-OMX0007

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

IDX-OM-M051

1 2 1 Anti-corrosive treated copper tube (option C) . 1 2 1 2 2 With Chinese labels and a Chinese operation manual (option G) . 1 2 1 2 3 Medium pressure type (option K) . 1 2 1 2 4 Metal name plate (option P) . 1 2 1 2 5 Ground fault circuit interrupter (option R) . 1 2 1 2 6 Timer type solenoid valve with auto drain (option V) . 1 2 1 2 7 Facility water piping direction . 1 3 1 3 Name

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

High Vacuum L Type Valve

Bonnet assembly/construction part number:1 Temperature Valve size specifications 25 40 50 General use XLD25-30-1 XLD40-30-1 XLD50-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H Temperature Valve size specifications 63 80 100 160 General use XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 High temperature XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H Note1) The magnet for auto

Series VQ Base Mounted Metal Seal/Rubber Seal

(1) [EX124-SCS2](2) EX120-SMJ1(-XP)(1) [EX124-SMJ1](2) AXT100-1-P (4) U S w e r U S U S VZ AXT100-1-F (4) U S AXT100-1-GU20 Note 1) Suffix XP for dust-proof SI unit.

Pin Cylinders Series CJP2/CJP

Allowable lateral load 1 Allowable lateral load (N) 0.8 16 0.6 0.4 10 D0.2 6 -X 4 0 Individual -X 0 5 10 15 20 25 30 35 40 45 Stroke (mm) Technical data 25 Series CJP2 Construction CJP2B4 CJP2B6 i e u q i r u q w Built-in magnet Built-in magnet !4 !5 !1 o r !0 !2 w t t y !1 o !0 !2 !4 !5 CJP2B10, 16 i e u q Built-in magnet !1 o r !0 !3 !2 t w !5 !4 Component Parts No.

XL-OMY0002

P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401

CLQ

Horizontal (without switch) Horizontal (with switch) 30 30 10 10 100 100 Load weight m (kg) Load weight m (kg) 80 5 5 80 63 63 50 50 40 40 1 1 0.5 0.5 32 32 25 25 20 20 0.1 0.1 10 100 10 100 Eccentric distance + Stroke L (mm) Eccentric distance + Stroke L (mm) m l S l: Eccentric distance (mm) S: Stroke (mm) L Allowable kinetic energy Pneumatic Circuits Extension locking, Without cushion Retraction

XLG Series

Bonnet assembly (Construction part no.) 1 Temperature Specifications Valve size 16 25 40 50 For general environments XLG16-30-1 XLG25-30-1 XLG40-30-1 XLG50-30-1-1 For high temperature XLG16-30-1H XLG25-30-1H XLG40-30-1H XLG50-30-1H-1 TemperatureSpeci fications Valve size 63 80 100 160 For general environments XLG63-30-1-1 XLG80-30-1-1 XLG100-30-1-1 XLG160-30-1-1 For high temperature XLG63

HRX-OM-K003

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Circulating fluid disposal. 1-15 1.7.2 System disposal . 1-15 1.8 Material Safety Data Sheet (MSDS) . 1-15 Chapter

A-HEC-OM-J004

1-2 1.1.3 Symbols. 1-2 1.2 Hazard Warning Labels . 1-4 1.2.1 Location of hazard warning labels . 1-5 1.3 Location of Model Label. 1-7 1.4 Safety Measures . 1-8 1.4.1 Precautions. 1-8 1.4.2 Protective Equipment . 1-9 1.4.3 Long-term Storage . 1-10 1.4.4 Disposing of Product . 1-10 1.5 Interlock List . 1-10 Chapter 2 Description and Function of Each Part . 2-1 2.1 Liquid Tank/Controller. 2

Rotary Clamp Cylinders

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

ITV

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Input impedance 1 to 5 VDC (Load impedance: 1 k or more) 4 to 20 mA (Sink type) (Load impedance: 250 or less) Analog output Output signal (3) (Monitor output) NPN open collector output: Max. 30 V, 30 mA PNP open collector output: Max. 30 mA Switch output Within 1%