M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Cable with M12 connector (8 pins/Both angle) Cable with connector For output entry D EX9-AC-7 Cable with M12 connector (Plug/A-coded) Terminal plug For EX500 C EX500-AC000-S Terminal plug (M12/8 pins) Seal cap For plug E EX500-AWTP Seal cap (M12/For plug) EX9-AWES Seal cap (M8/For socket) EX9-AWTS Seal cap (M12/For socket) Power supply cable For connecting the SI unit to the power block F

IR1000/2000/3000

12 Series IR1000/2000/3000 Made to Order Specifications: Please contact SMC regarding detailed dimensions, specifications, and delivery times.

3-Position Rotary Table

V Reed auto switch Solid state auto switch 12 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V Relay, PLC Yes Grommet 24 V 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equiv.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

85.2 124.8 150.1 NX 7.3 10.5 14 PA 44 63 113 PB 80 110 132 PC 4 9.4 8.5 PP 5.3 8 16 Q 140 185 290 Model MY2HT16G MY2HT25G MY2HT40G X 7 9 12 Y 5 8 12 Z 160 210 330 U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 XX 12 14 23 "P" indicates cylinder supply ports.

AR20-B to AR60-B

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 63 for size 10.

IDX-OM-W093

T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3 0 IDF60/70/80/90 Series 1-2 IDX-OM-W093 1.2.4 IDF60/70/80/90 Series 1-3 IDX-OM-W093 1.2.5 HFC 1-5 HFC 1 2 3 4GWP

IDX-OM-W029

V 12 V V 12-2 12-1 1. 1 2 2. 3.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Symbol -X80, -X81 Main Value Double Acting Type 1 A N 06 5 1 4 VP31 1 D Z X81 Body size CE marking Nil Q None CE-compliant 4 6 8 1/2 1 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Port size (IN, OUT port) Thread type Symbol VP3145 VP3165 VP3185 Port size Nil F N T D/DO/DZ/DU only Rc G NPT NPTF 03 04 06 10 12 14 20 Type of actuation X80 X81 Double solenoid Single solenoid External pilot Passage, Type

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 12 - LECSS LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter Para. No.

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

IDX-OM-W014

.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E

IDX-OM-V020

Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1 13.1 SAFETY INSTRUCTIONS FOR USE . 13-1 13.2 SPECIFICATIONS . 13-1 13.3 MAINTENANCE . 13-2 Chapter 14 Inspection record . 14-1 14.1 INSPECTION RECORD .

VNH

PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AC Servo Motor Driver (Pulse input type)

Driver Servo amplifier 24VDC (Note 4, 12) Controller (Note 7) Positioning module CN1 QD75D (Note 7) 21 DICOM CN1 (Note 2) Trouble (Note 6) 20 46 DICOM 48 ALM RA1 14 13 Zero speed detection CLEARCOM DOCOM 23 ZSP CLEAR CR 41 RA2 (Note 12) Limiting torque RDYCOM 12 25 TLC RA3 READY 11 RD PP PG NP NG 49 10 11 35 In-position 24 INP 15 16 RA4 PULSE F PULSE F 10m max. 17 PULSE R PULSE R 18 36 4

VP3145/3165/3185

Double solenoid Single solenoid 81 4 6 8 1 2 1 1 Thread type 1 2 Passage, Type of actuation Rc G NPT NPTF T N F Nil Port size (IN, OUT port) N.C.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

IDX-OM-W023

.S 12 S 12-1 IDU8E15E1-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 IDX-OM-W023 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series