MHS

=20mm 3263 =30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3

High-precision Digital Pressure Switch ( compatible)

Device state parameters (index 36) Readable device states are as follows.

Digital Flow Switch

to 1000 L/mim 20 to 2000 L/mim Instantaneous flow 5 to 525 L/mim 10 to 1050 L/mim 20 to 2100 L/mim Set flow rate range Accumulated flow 0 to 999,999,990 L Instantaneous flow 1 L/min Flow Minimum setting unit Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.) 1 L/pulse 10 L/pulse Accumulated value hold 2 Every 2 minutes or every 5 minutes Rated pressure range 0 to

High-precision Digital Pressure Switch

Device state parameters (index 36) Readable device states are as follows.

PFxx-OMK0003CN

PF-OMK0003CN-E A 1L(2) L () M315L L () / ZS-36-A1 1 L (2 ) (M315 L)2 ZS-36-A2 2 L (2 ) (M325 L)2 ZS-36-A3 3 L (2 ) (M335 L)2 ZS-36-A4 4 L (2 ) (M345 L)2 ZS-36-A5 5 L (2 ) (M355 L)2 -11No. PF-OMK0003CN-E DIN -12No. PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S.

LEC-OM038xx

CN2: TB/PC connector.31 9. 1 How to use.31 10. LED display.32 10. 1 LED display.32 10. 2 Controller IF communication status and LED display.33 11. Mode.34 11. 1 Outline.34 11. 2. Step data input mode .34 11. 3. Numerical data input mode.34 11. 4. Data writing mode.36 12.

PC Wiring System Series PCW

8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

Series CE1

151 14 20 18 36 10 57.5 71.5 65.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 83.5 78 8 14.7 9 39 173.4 79 95 6.6 9 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 215.7 71 94 91 91 97 9 16.2 11 46 177.4 95 9 9 80 92 60 203 238 14 224 20 30 22 44 14 89.5 219.2 84.5 109.5 113 107 108 * Dimensions for auto switch model D-F79W. 4.4-13 3 Point

2-Color Display High Precision

0.3 36 x n pcs. + 4 x (n pcs. 1) 36 0.3 36 0.3 4 x R3 or less 4 x R3 or less 67 or more Panel thickness 1 to 5 mm Note) This is the minimum value for the piping method 01 or N01.

SI unit for DeviceNet ®

36 -1No.EX-OMN0013-I Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

1

Applicable bore size B (C) (D) d H JSN-020B 20 24 (27.7) 24 M18 x 1.5 7 JSN-032B 25, 32 30 (34.6) 30 M22 x 1.5 7 JSN-040B 40 36 (41.6) 36 M27 x 2.0 8 10 JCM Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height Solid state auto switch D-M9m D-M9mW D-M9mA Hs1 B 22 (24) A Hs2 ( ): Dimension of the D-M9mA.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

PSxx-OMU0002CN

DC1224 V10% DC1224 V 10 DC(+) DC(-) 8 DC1224 V10% DC1224 V10% DC(+) DC(-) 9 ( ) 10 11 -71No.PS-OMU0002CN-D No. / 5 m / 12 1015 10 SI (kPaMPa) ( ) 13 SI kPa,MPa 14 15 16 FUNC 17 -72No.PS-OMU0002CN-D No. 4 m 4 m FUNC (Er13) 18 10 10 () 19 () / ( ) () -73No.PS-OMU0002CN-D 80 mA 7 F.S.(3.5F.S.) 1 1F.S. 1 -74No.PS-OMU0002CN-D ZSE20A() ZSE20AF() ISE20A() 0.0-101.0 kPa -100.0100.0

Precision Cylinder Series MTS

SMTS40, #1 (#1 + #4) SMTS40, #2 (#2 + #4) SMTS40, #3 10

PSxx-OMM0002CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 9 / / 10 () 11 /5 m / 12 10~15 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -47No.PS-OMM0002CN-F No. 14 15 16 () 17 () ( ) () / -48No.PS-OMM0002CN-F 80mA 10 1 1dight 1 -49No.PS-OMM0002CN-F ISE80() ISE80H() ZSE80() ZSE80F() -0.11MPa -0.12MPa 0-101kPa -100100kPa -0.1051.1MPa -0.1052.2MPa 10-111kPa -110110kPa 2 MPa 4 MPa 500 kPa 0.001 MPa

A

155 128 143 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 5 Soft Start-up Valve AV2000/3000/4000/5000 Modular F.R.L.

Soft Start-up Valve AV2000/3000/4000/5000 1

155 143 128 3/4, 1 74 46 06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations

Plug-in/Plug Lead: Single Unit

installed ( 261.5 with AMC810-14 installed) L2 L1 P = 41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed