Modular/F.R.L. Units Series AC

B B B B B N.O.: Black B Dimensions B B N.C.: Gray O O S S M5 x 0.8 1/8 1/4 Barb fitting Applicable tubing: T0604 10 one-touch fitting Width across flats 17 Width across flats 14 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) H J H H J H J J P1 P2 A B C E F G J K

Digital Flow Switch (Integrated display type) ( compatible)

PF3W704 PF3W720 PF3W740 PF3W711 -100No.PF-OMV0006-B PF3W721 -101No.PF-OMV0006-B Flow characteristics of the flow rate adjustment valve PF3W704S PF3W720S PF3W740S -102No.PF-OMV0006-B Dimensions PF3W704/720/740/711 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model PF3W704 3/8 70 50 30 66 40.6 15.2 24 14 35 26 18 13.6 2.7 depth 14 PF3W720 3/8, 1/2 78 54 30 66 40.6 15.2 27 18

Large Size Vacuum Module: Series ZR

B Bracket B Note) 1 Dimensions for mounting bracket B 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

0.55

2 4(A) (B) (A) (B) (A) 2 4 2 4 B (EB)3 5(EA) 1 (P) VF3000 VF5000 = 2(B) (A)4 5 1 3 1 5 3 (EA) (P) (EB) (P) (EA) (EB) (EA)5 1 3(EB) ; B (P) 2-position double Symbol @ = : 2-position single > > : @; VF1000 4(A) (B)2 (A) (B) (B) (A) 4 2 2 4 5(EA) 1 (EB)3 (P) VF3000 VF5000 2(B) (A)4 5 1 3 3 1 5 = (EA) (P) (EB) (EB) (P) (EA) (EA)5 1 3(EB) ; (P) 3-position closed center/exhaust center/pressure

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

Compact Cylinder with Lock Series CLQ

Hs A B A B 32 to 100 D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V Approx.

A

D I M E N S I O N S S E R I E S (N)VHS S H U TO F F VA LV E S Y M B O L S Model Port Size Exh. Port A B C D E F Lockable Unit. Color may not be available as shown.

Stopper Cylinder

D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs

C85

26 7 23 A B 11.5 Hs Hs 8.5 D-A7H D-A80H 1 10.2 7 22 A B D-C73C D-C80C A 36.7 B 16 Hs Hs 8.5 10 13.3 13.3 D-A73C D-A80C B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H

C85

26 7 23 A B 11.5 Hs Hs 8.5 D-A7H D-A80H 1 10.2 7 22 A B D-C73C D-C80C A 36.7 B 16 Hs Hs 8.5 10 13.3 13.3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-A73C D-A80C B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

%silltr

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 12 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 107.5 100 74 [81] M8

SMC Basic Pneumatics

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 1 2 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

High Purity Chemical Valve

LVC B A B A B A PB Double acting N.C. N.O. Double acting LVA With flow rate adjustment PA PA N.C. B A PB B A Double acting LVH N.C. Double acting With bypass PA PA N.C. LVD PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass LVQ PA PA N.C. PB B A B A Double acting N.C. Double acting LQ1 With indicator PA N.C. B A LVN N.C.

45

Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) SS5X3-45l SS5X5-45l C6 C8 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

CJ2

B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

VZ3000

2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83 0.91 0.32 0.27 0.36 0.19 0.20 0.24 Body ported For internal pilot Type VV5Z3-20 VZ32 Note) Value at manifold

CQS

B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside. B dimension is 72.5 mm.

JXCx-OMX0009

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m (b) (d) Shield Signal name Terminal No.