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mA inrush current) 0.4V or less (At 16 mA inrush current) Output Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Maximum response frequency 500Hz Indicator light Red LED (lights up when ON) Ambient temperature 10 to 55C Environmental resistance Ambient humidity 45

55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 18 18 18 12 15 15 44 50 56 138 150 171 4 5 5 1/4 1/4 1/4 to 1000 to 1000 to 1000 7 Series MGZ Non-rotating Double Power Cylinder Applicable auto switches

Gripping force per finger Effective value N Action Internal gripping force External gripping force 4 55 9.8 10 MHZ2-10D (N) 17 Double acting Single acting 6 115 30 16 40 MHZ2-16D (N) 10 235 42 20 66 MHZ2-20D (N) Single acting type, normally open 14 430 65 25 104 MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45

mm) AA AE AP BP BZ C D F G GC MXW Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/8 20 25 32 40 75, 100, 125, 150, 200 13 70 94 11 35 32 50 6.8 11 depth 8 28 16.5 M6 X 1depth12 135 73.5 26.5 118 16 75 15 40 37 50 8.6 14 depth 10 29 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 75, 100, 125, 150, 200, 250, 300 MXP 16 75 15 40 37 50 8.6 14 depth 10 30 160 86.5 31.5 140 104 19 M8 X 1.25 depth 16 19 18 45

Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10

75 HA 19.5 39 HB 8.5 19 HG 8.5 19 HI 23 39 HL 38.6 64.9 HP 44 73.5 HS 27 49.5 HT 19.5 39 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 Model +0.030 0 +0.030 0 CYP15 CYP32 LD 5.6 8.6 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 P M5 x 0.8 Rc 1/8 N 4.5 7.5 PA 25 50 PB 60 100 Q 105 138 QW 48 87 R 45 79.5 T 23 29 TA 13 17 TB 18 22 W 69 115 WA 32 46 WB 17 27 Y 2.5 3.5 Z 118 155 L 67 90 Model CYP15 CYP32 Note 1)

A Top cover Aluminum alloy 18 41 Chromated Electroless nickel plated Aluminum alloy Side plate B Cushion seal holder Aluminum alloy 19 42 CYP32 only Nickel plated Urethane Hexagon socket head cap screw Bumper Chrome molybdenum steel 20 43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45

A Top cover Aluminum alloy 18 41 Chromated Electroless nickel plated Aluminum alloy Side plate B Cushion seal holder Aluminum alloy 19 42 CYP32 only Nickel plated Urethane Hexagon socket head cap screw Bumper Chrome molybdenum steel 20 43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

Response time (1) 10 ms or less (AC), 45 ms or less (DC) 1,500 c.p.m. (AC), 180 c.p.m. (DC) Non-locking Max. operating frequency (2) VK Manual override Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)

9 For details about certified products conforming to international standards, visit us at www.smcworld.com. 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VT317 How to Order V100 Compact yet provides a large flow capacity Dimensions (W x H x D)45 x 89.5 x 45 (Grommet) C: 2.6 dm3/(sbar) (Passage 2 3) Suitable for use in vacuum applications 101.2 kPa (For vacuum specifications

(Value in the initial stage) Vibration resistance: No malfunction from test with 45 to 2000 Hz one sweep, to axis and right angle direction of main valve, each one time when pilot signal ON and OFF. (Value in the initial stage) Note 4) As per JIS C 0920 Manifold possible. When requiring bottom piping, please specify it.

Note 2) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

(Values at the initial period) Vibration resisitance: No malfunction occured in a one-sweep test between 45 and 2000 Hz. Test was perfomed at both energized and deenergized states in the axial direction and at the right angles to the main valve and armature.

Confirmation of the working pressure differential LVH LVD 0 / # 0 /" " / + 0 $ $$ + / 1 $ # 2 / + / ' / + # Series VX31/32/33 LVQ LQ 2 45*6+,7 LVN TI/ TIL 4. Reference to the flow characteristic table PA Series VXA21/22 Series VXA31/32 0 " / / " PAX 5. Choice of the power supply voltage and electrical entry PB / # 17-3-3 The models VX21/22/23 have been revised.

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.2 0.3 40 34 29 11 23 17 57 OUT 6 3 29 25 21 8 17 13 42 IN 71 61 51 20 40 30 OUT 101 8 4 53 45 38 30 15 23 IN 75 158 136 113 90 45 68 OUT 226 12 6 119 102 85 68 34 51 IN 170 281 241 201 161 80 121 OUT 402 16 8 211 181 151 121 60 91 IN 302 440 377 314 251 126 188 OUT 628 20 10 330

CQ2 75, 100, 125, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 20 Built-in Magnet Cylinder Model Double acting Action D 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 RQ If a built-in magnet cylinder without an auto switch is required, there is no need to enter the symbol for the auto switch. (Example) CDQSL25-30D 25 For Manufacture of Intermediate Strokes, refer to page 552.

30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Symmetric type Standard type (mm) Model Width Height Total length MXJ4 MXJ6 MXJ8 20 22 26 10 11 13 43 43 45 Note) Values of stroke 10 mm.