Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Series MXP/MXPJ6 11226, 10, 12, 16 Air Slide Table How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicone-free + Low particle generation Number of auto switches Nil S n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke (mm) Auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table below

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

MIW/MIS

Refer to pages 16 through 18 for safety instructions, actuator precautions and auto switch precautions. Mounting Selection Handling of Adjuster Options 3. Please observe the specified torque limits when tightening screws to mount the attachment.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

300 500 1000 1500 0.1 CXSL (ball bushing) Cylinder speed Vp (mm/s) 4 Series CXS-XB19 Dimensions CXS6--XB19 58.5 + ST ST 16 45 + ST 6.5 7 14 1 3.25 13 10 + 1/2ST 2-3.4 through 2-6.5 counter bore depth 3.3 3 3 OUT 9 2-1.2 x 12l AW (spring pin) 1 (16) 5.6 3.2 28 0.2 28 0.2 22.7 37 35 16 6.3 5 2.1 M3 x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

Part No. 07 1/4" 09 5/16" Part no.

Series 10-MGF ø40, ø63, ø100 Guide Table

Auto Switch Proper Mounting Position (Detection at Stroke End) A B Proper Mounting Position (mm) Bore size A B 40 63 100 32.5 0 16 0 27.5 0 Note) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

VXH

V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) Class B G C D, T S S L, Z Note) Be sure to read this before handling the products.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

7 8 16 155 10 30 Product label Octagonal width across flats 30 (176) 189 171 Caution label Hexagon width across flats 27 HA Drain outlet 1/2 female thread (Refer to How to Order for type of thread.)

ADM200

No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

. (-1: Haploid 100 VAC, -2: Haploid 200 VAC) Note 6) means voltage indication symbol (IDU3D to 15C). (-1: Haploid 100 VAC, -2: Haploid 200 VAC) 14-14-4 3 Data: Calculation of Condensed Water Amount & Dew Point Conversion Chart Calculation of Condensed Water Amount Atmospheric pressure Relative humidity Water vapor (g/m3) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

INFORMATION Step Motor Controller 5 types of communication protocols New New

mA or less 130 mA or less 200 mA or less 100 mA or less 100 mA or less Compatible encoder Incremental A/B phase (800 pulse/rotation) Protocol EtherCAT*2 EtherNet/IP*2 PROFINET*2 DeviceNet IO-Link Communication specifications Applicable system Version*1 Conformance Test Record V.1.2.6 Volume 1 (Edition 3.14) Volume 2 (Edition 1.15) Specification Version 2.32 Volume 1 (Edition 3.14) Volume

99

cm 2 [Measuring conditions] Element used: ED801S-X20 Element size: 70 x L247 Classification 0.2 m 0.4 m Fluid: Ultrapure water (resistivity value 17.9 Mcm) Flow rate: 10 L/min DI water (Deionized water), ultrapure water, ion-exchange water, distilled water Water 20 Sodium hydroxide (10%) Potassium hydroxide (10%) Ammonia water (28%) Ammonia water (28%) 18 Alkalis Resistivity value (Mcm) 16

200 to 1000

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

200 to 1000

200 to 1000

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32, 40, Ball screw drive , Applicable stroke range: 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000, 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or DIN