FSQ seies Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
Nil Without auto switch Bore size B L F G C D T Basic/without bracket style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style B L F G C D T For the applicable auto switch model, refer to the table below. 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Rod Single rod Double rod Nil W Stroke (mm) Refer to Standard
Nil Aluminum tubing F Front flange type F Steel tubing G Rear flange type Steel tubing is not available with auto switches. Number of auto switches C Single clevis type Cylinder 2 pcs. Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs.
1N X430 03 AR 30 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 Body size Body size X430 X440 Low temperature 20 25 30 40 50 60 High temperature Thread type Thread type Rc NPT G Nil N F Rc NPT G Nil N F Port size Port size Body size Port size Body size Symbol Port size 25 30 40 50 60 Symbol 20 25 30 40 50 60 02 03 04 06 10 1/4 01 02 03 04 06 10
Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G G L Fluid name Applicable element type, material Nominal filtration accuracy (m) Fiber element Polypropylene 10 Industrial water Fiber element Polypropylene 20 Water for cleaning Fiber element Polypropylene 20 Water Fiber element Cotton 10 Fragrances Micromesh element Stainless steel 316 10 Hot water Micromesh element Stainless
P Dimensions (mm) DIN flange 80 A B C D E F G K L M N P Model IDFA150F Port size 950 1290 1332 268 720 1432 475 20 990 217 935 1030 100 IDFAE/F Series Options 1 For How to Order optional models, refer to pages 92, 95 and 98.
Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 ZFC F One-touch fitting (KQ2H1002AS) is not included.
(T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual EXH spacer 49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801
Bellows seal C Double acting Bellows seal F Single acting (N.C.)
QA Tubing O.D. 6 J QB Q F Built-in One-touch Fittings Stroke 13 20 Stroke 8 Applicable tubing O.D.
outputs) 0 2 Digital output unit EX600-DY#F (16 outputs) 0 2 EX600-DM#E (8 inputs/8 outputs) 1 1 Digital I/O unit EX600-DM#F (8 inputs/8 outputs) 1 1 -80No.EX-OMZ0024 Allocated bytes (continued) Allocated bytes Unit Unit part number Input Output EX600-AXA 4 (2 bytes per channel) 0 (2 channels) Analogue input Unit EX600-AXB 8 (2 bytes per channel) 0 (4 channels) (2 channels) 0 4 Analogue
Example AC30-03DM-KSTV-13NR-A AC 30 03 DG 1N A F 1N 1 3 4 5 6 2 1 Symbol Description Body size 10 20 25 30 40 Nil Metric thread (M5) c Pipe thread type 2 Note 1) Note 2) Port size 3 Nil Without auto drain a Float type auto drain N.C. (Normally closed) Drain port is closed when pressure is not applied. Note 4) Note 3) N.O.
(For F, L, S, T kit) VVQ4000 3A 1 VVQ4000 2A 1 Electrical entry Electrical entry L F C L F C F , L, T, S kit F kit (Connector side) C kit (Plug lead type) F , L, T, S kit F kit (Connector side) C kit (Plug lead type) (1) (1) Option Option VQC Nil W CD SD Standard IP65 enclosure For exhaust cleaner mounting Direct exhaust with silencer box Nil W CU SU Standard IP65 enclosure For exhaust cleaner
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Note 2) For ZSE40 (F)/ISE40--22 62 Note 3) For ZSE40 (F)/ISE40--30 70 Note 4) For ZSE40F (compound pressure) with psi indication, this is 0.03 to 0.04 psi. Note 5) For ZSE40F (compound pressure) with psi indication, zero clear is in the range of 0.01 psi.
F F 7 1 5 The model selected in Step or can be used. The model selected in Step or can be used. 1 5 Selection result Selection result: IDH4 Selection result: IDH6 Select the built-in products. (Refer to page 3.) Select the option. (Refer to page 3.) Select the built-in products. (Refer to page 3.) Select the option.
.S. or less (with rated pressure range), 5% F .S. or less (with extension analog output range) 1% F .S. or less Linearity 1% F.S. or less Repeatability 1% F.S. or less based on the analog output at 18 V ranging from 12 to 24 VDC Power supply voltage effect Enclosure IP40 Environmental resistance Operating: 0 to 50C; Stored: 10 to 70C (No freezing or condensation) Temperature range Withstand
F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37
Nil V Standard For vacuum X505 Series VPA500 Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF Series VPA700 Specifications Fluid Air Type of actuation N.C. or N.O.