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PRODUCT FEATURES S E R I E S I P 6 0 0 0 / I P 6 1 0 0 I HIGH PERFORMANCE POSITIONER Cross section of the exhaust system. I RESISTANT TO HOSTILE ENVIRONMENTS Employs the combination of the check valve and the labyrinth effect. I EXCEPTIONAL SHOCK AND VIBRATION PERFORMANCE EXH.

VP4

Regarding VP435 (3 position closed center type) Be aware that when the cylinder is in an intermediate stop state, if the supply pressure to the P port is discharged or decreased, this valve is constructed so that the pressure in the cylinder will be discharged to the P port, causing the cylinder to move. 7.

25

150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 0.5 s 0.5 s 150 150 1 s 1 s 200 200 2 s 250 250 2 s 5 s 5 s 300 300 421 IZS40/41/42 Series Note) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Thermo-con/Rack Mount Type

Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

OMU0023

112 70 p 17 11 DC1 49 31 1 81 51 Q 113 71 q 18 12 DC2 50 32 2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B

Hydraulic Cylinders

M2.5 x 4l (included with auto switch) 9 Series CHKDB Made to Order Specifications 1 Contact P/A for detailed specifications, lead times, and prices.

Rotary Actuator NCRA1 Series Single Rack and Pinion

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

P Q Supply valve and release valve Supply valve Except nozzle diameter 05 type Note) Switch mounted style is also available. P. 13-4-17 to 13-4-19 13-4-4 4 Series ZM Vacuum Ejector: With Valve and Switch Construction: LZM1-KL-E Precautions Be sure to read before handling.

NCRAI seies

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

AS-FG/ASD-FG

P-77.5 (YG)

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

Low Maintenance Filter Series FN1

Contact P/A regarding the valves 3 to 5.

VQ4000

Note 1) How to Order Sub-plate Note 2) VQ4000 Note 3) Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc1/4 Rc3/8 Piping B Side piping Note 1) Bottom piping type is applicable to only Rc1/4. Refer to p.1.11-46 for thread standard.

CC

QL QB P NL 100 200 300 400 500 800 700 600 50 9.5 11 0 30 86 3 28 62.5 CC63-lSl1-lG 228.5 278.5 378.5 503.5 603.5 728.5 CC63-lSl1-lG s s s 7 13 2 32 120 5 33 82.5 CC100-lSl1-lG CC100-lll1-lG 286 386 511 611 836 736 s s s CC100-lLl1-lG 7 13 2 32 120 5 33 92 CC160-lLl1-lG 399 524 624 949 849 749 1049 s s CC160-lLl1-lG 7 20 2.5 46 185 0 29 120 * Hexagon socket head cap screw is used for mounting

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

Series LX Acceleration Time Guide

Transfer load 5kg Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 4kg 4kg 50 50 2kg 2kg 0kg 0kg 0 0.1 0.2 0 0.2 0.1 Time (s) Time (s) LXPB2SB/LXSH2SB LXPB5SB/LXSH5SB 200 200 Transfer load 3kg Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load 2kg 2kg 1kg 100 100 1kg 0kg 0kg 0 0.1 0.2 0 0.1 0.05 Time (s) Time (s) 302 Acceleration Time Guide Series LX Acceleration Time Guide

Process Valve

Applicable cable O.D. 6 to 8 (D, DZ) P Pg9 J (DIN terminal: D, DZ) I (Grommet: G) F (Air operated) Pilot port 12 (P1) 2 x (Back side 10 (P2)) 4 x M 8 1 Manual override (Non-locking push type) P1 D S Q E 15 B A H (DIN terminal: D, DZ) G (Grommet: G) A R B C Main port 1 (A) (Back side 2 (B)) Port side: refer to table below Model Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S VNB2V

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.