Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

AU

G46-10-01) indicates the type of threads used for connection. For Rc, leave the symbol blank, and for NPT, enter N. Please contact SMC concerning the supply of NPT pressure gauges. Relieving type is provided as standard for AU100.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported

AU

G46-10-01) indicates the type of threads used for connection. For Rc, leave the symbol blank, and for NPT, enter N. Please contact SMC concerning the supply of NPT pressure gauges. Relieving type is provided as standard for AU100.

Modular Type Lubricator Series AL

Drip failure can cause damage to the components that need lubrication. 0.04 0.02 0 0 2000 4000 6000 8000 Flow rate L/min (ANR) 51 Lubricator AL10 to 60 Construction AL10 AL20 w w e q q t IN OUT IN OUT y y r u u AL30, 40 AL50, 60 w w q t q e e t IN OUT OUT IN y r i r u y u Parts list Description Material Note No.

Low Differential Pressure Sensor

ZS-27-01) M3 x 8L Panel mount adapter (Part no. ZS-27-C) Rotate 90 to mount. 14 Series PSE Specific Product Precautions 3 Be sure to read before handling. Set differential pressure range & Rated differential pressure range Caution Set the pressure within the rated differential pressure range.

3 Port Air Operated Valve Series SYJA300 1

SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O. Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

PFxx-OMJ0005CN

/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

ASD230F-M5-04D-X12 744 ASDF-D Series Dual Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting How to Order ASD 3 3 0 F 01 06 S D Made to Order Lubricant: Vaseline X12 AS-F Ex.)

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

(N specifications) AS4200-04 How to Order 01 S AS 2 2 0 0 AS3200-03 Body size AS2200-02 1 2 3 4 M3, M5 standard AS2200-01 AS1200-M5 Made to Order Refer to page 647 for details. 1 8 1 4 , standard standard standard 8 3 2 1 Lock nut option Type J Hexagon lock nut Round lock nut Nil AS1200-M3 Direct cylinder elbow type 2 Option AS1400-M3 Direct cylinder flat elbow type 4 Nil None With seal S

SYJA3000

11 (0.6) 2 position double 110 SYJA7220-01 Body ported Base mounted (With sub-plate) 8.5 (0.47) 9 (0.5) [6.5 (0.36)] 3 position closed center SYJA7320-01 1/8 M5 X 0.8 3 position exhaust center SYJA7420-01 120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7

Microspeed Cylinder

(1mm/s for 16 or smaller) Operates smoothly with minimal stick-slip CJ2XB10-60 CQSXB20-20D Average speed 0.85mm/s Average speed 0.88mm/s 2.0 Average speed 0.43mm/s Average speed 0.43mm/s 2.0 Speed waveform Speed mm/s Displacement mm Speed waveform Speed mm/s Displacement mm 0 0 Operating direction in Operating direction out Operating direction in Operating direction out 2.0 -2.0 60 40 Displacement

CJ2X/CUX/CQSX/CQ2X/CM2X

(1 mm/s for 16 or smaller) is achieved.

CJ2X/CUX/CQSX/CQ2X/CM2X

(1 mm/s for 16 or smaller) is achieved.

AZ1000

Single Stage Regulator for Ultra High Purity Low to intermediate flow Series AZ1000 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity Standard: to 30 slpm HF (option): to 120 slpm Body material: 316L SS Hastelloy internals available for corrosion resistance How to Order Port Number q w e r AZ10 S FV4 FV4 01 2PW Delivery pressure Code Delivery pressure

This is a legacy product, and replaced byZSE20A-Y-01-J, SWITCH, VACUUM SERIES, ZSE30 VACUUM SWITCH, JC, ZSE30 1/8 PORTED, .32388 lb, ModelRated pressure rangeSet pressure rangeWithstand pressureMinimum unit settingApplicable fluidPower supply voltageCurrent consumptionSwitch output--RepeatabilityHystere- sisAnalog outputDisplayDisplay accuracyIndicator lightEnviron- ment resistanceTemperature

s2 in X, Y, Z directions, 3 times each (De-energized)?

s2 in X, Y, Z directions, 3 times each (De-energized)?