Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ø4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate: A (Calibration

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: C (Bowl Guard), Semi-Standard 2: Standard

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: 16C (1 + 6 + C), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units:

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: Standard, Semi-Standard 2: NRZ (N + R + Z)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: 1 (0.02 to 0.2MPa Setting), Semi-Standard 2: Standard

Body Size: 20, Thread: N (NPT), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: Standard, Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: G (Size 20 25, 30, 40: Round Type Pressure Gauge w/Limit Indicator; Size 10: Round Type Pressure Gauge w/o Limit Indicator), Attachment: V (3-Port Valve for Residual Pressure Release; Mounting: AF+AR+V), Semi-Standard 1: Standard, Semi-Standard 2: Standard

/N.C.), 1st Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 1st Selection Quantity: 1

Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: A (Calibration

HRX-OM-X037

9.4.15 HRL200-W-40-T2 CH1 .9-19 9.4.16 HRL100/200-W-40-T2 CH2 .9-19 9.5 Pump Capacity . 9-20 9.5.1 HRL100-A/W-40 CH1 .9-20 9.5.2 HRL200-A/W-40 CH1 .9-20 9.5.3 HRL300-A-40 CH1 .9-21 9.5.4 HRL-A/W-40 CH2 .9-21 9.5.5 HRL100/200/300-A/W-40-T2 CH1 .9-22 9.5.6 HRL300-A-40-T3 CH2 .9-22 9.6 Types of Hazard Labels . 9-23 9.6.1 Positions of danger warning label .9-24 9.7 Standards . 9-25 9.8 Daily

7

P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

, D-A93(V), D-A96(V) Auto Switch Specifications D-A96 D-A90 D-A90V D-A93 D-A93V In-line D-A96V Auto switch part no.

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

17

12 V IC circuit 12 V 5 V, 12 V 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 5 V, 12 V IC circuit Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V 3-wire (NPN equivalent) Grommet 24 V A96V A96 IC circuit 5 V Yes A93V2 A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V A90V No 100 V or less 1 Water resistant type auto switches

CE

F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 200 V A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Grommet 12 V 2-wire Connector 3-wire (NPN) Relay, PLC Yes 24 V Diagnostic