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min (ANR) Effective area (mm2) Flow rate l/min (ANR) Flow rate l/min (ANR) Number of needle rotations Number of needle rotations Number of needle rotations Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) Effective area (mm2) Flow rate l/min (ANR) AS Number of needle rotations Number

Failure to observe this precaution could damage the filter element. 1.9-3 Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR4000, 5000, 6000 AC AV AU AMR3000 AF AR IR VEX AW AMR AWM AWD ITV VBA VE AMR3100 AMR4100 AMR5100 AMR6100 SAMR, #1 SAMR, #2 SAMR, #3 SAMR, #4 VY G N Bracket mounting dimension With auto drain Model Port size A M L K J H G F E D C B U (Body) V (Adapter) L 178

ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output PNP output 1 to 5V output 4 to 20mA output 25 65 26 28 Panel mount B Unit specification Nil M With unit switching function Fixed SI unitI (International System of Units

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Load voltage Lead wire length (m) Auto switch model DC AC Indicator light Special function Wiring (output) Electrical entry Applicable loads Type Reed switch Solid state switch 0.5 (Nil) 3 (L) 5 (Z) None (N) Refer to Page 2 for part numbers of air cylinder mounting brackets other than the basic type. 3 wire (NPN equiv.)

0 06, 08, 10 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] i q y !2 !1 !3 Number of needle rotations Number of needle rotations AS3201F, AS3211F AS4201F, AS4211F r Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Component Parts No.

Nil Without lead wire M5 female thread ZS-46-A1 ZS-46-3L M5 Lead wire with connector (3-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port L Without waterproof cover R1/8 ZS-46-A2 01 R1/8 Piping adapter ZS-46-N1 A2 Bracket B (Horizontal mounting) u Option 3 Symbol Operation manual1 Calibration certicate1 Nil Y K T NPT1/8 N01 NPT1/8 Piping adapter ZS-46-N2 1 All texts

How to Order 30 M BE 02 03 K AR D Common supply Symbol Description Body size 20 30 40 Nil With backflow function Without backflow function With backflow function Nil c Thread type 01 Port size (IN) 02 03 04 01 Port size (OUT) 02 Note 1) 03 Nil Without mounting option B With bracket a Mounting H With set nut (for panel mount) Nil Without pressure gauge Note 2) Note 2) Square embedded type

B PPS Non-leak (106 Pam3/sec), Medium vacuum (0.1 Pa.abs), Oil-free M FKM FKM V C37 Note) The leakage amount (10 6 Pam 3/sec) for the V and M option are values when the differential pressure is 0.1 MPa. 5

KQ2-G Series Applicable Tubing: Metric Size, Connection Thread: M, R, Rc How to Order KQ2 H 06 01 G S 1 4, 6 (Oval type release button) Oval type release button KQ2 8 to 16 H 08 01 G S (Round type release button) Male thread seal method Symbol Seal method Nil Without sealant S With sealant Model Thread material: Stainless steel 303 One-touch fittings Port size/Applicable tubing O.D.

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: 01 (R1/8)

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: 01 (R1/8)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100.0 to 100.0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Piping Specification: R1/8, Lead Wire: -, Bracket: -, Operation Manual: -

VY1 How to Order G Port size (IN, OUT) PPA 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 AL ARJ 3 10 01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Option Body size 0.7 MPa setting (Standard) 0.2 MPa setting (1) Nil 1 S Model With seal Relieving type 10 Note 1) Compared with standard specifications, its adjusting spring has been only changed for 0.2 MPa.

X500 DIN (EN175301-803) terminal Grommet Conduit terminal L-type plug connector M-type plug connector DIN terminal Interchangeable specification with the previous valve mounting hole pitch type (Refer to page 24).

Electrical entry Grommet L-type plug connector M-type plug connector DIN terminal DIN (EN175301-803) terminal Conduit terminal Manual override [IP65 compatible] [IP65 compatible] [IP65 compatible] Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type L: With lead wire (length 300 mm) M: With lead wire (length 300 mm) G: Lead wire length 300 mm H: Lead

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

L L L L L L L L L L L SOLV L L L L: Low fixed (0) Input status area Input status area specifications Item Status State 0 Normal SOLV State of power supply for solenoid valve 1 Abnormal (19 V or less) Output area mapping For EX260-SPL1 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SPL3