End Lock Cylinder Series CBJ2

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

Coolant Valve

SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual

Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Peltier-type Chiller Thermo-con/ Compact Type

) [mg/L] 50 or less p Standard item Acid consumption amount (at pH4.8) [mg/L] 50 or less p Total hardness [mg/L] 70 or less p Calcium hardness (CaCO3) [mg/L] 50 or less p Ionic state silica (SiO2) [mg/L] 30 or less p Iron (Fe) [mg/L] 0.3 or less p p Copper (Cu) [mg/L] 0.1 or less p Sulfide ion (S2) [mg/L] Should not be detected. p Ammonium ion (NH4+) [mg/L] 0.1 or less p Residual chlorine

Model Selection 1

E G H J K L M N P Q S V Note 1) B Brass/Copper H B Note 1) Stainless steel/Silver High corrosive spec., Oil-free Note 1) Non-leak, Oil-free H Steam (Max. 183C) Brass/Copper Non-leak, Oil-free B Note 1) L, M, V options are for non-lube treatment.

Fluoropolymer Tubing Variations

100 120 140 160 180 200 220 240 260 Operating temperature C Inch size T T 20 TILM01 N 1.2 Max. operating pressure MPa D IDK 1.0 Tubing designation Length per roll Symbol 10 20 50 100 16 33 2S 0.8 Type Length 10 m 20 m 50 m 100 m 16 m (50 ft) 33 m (100 ft) 2 m 0.6 Color indication F Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black (Opaque) 0.4 Roll

Smooth Cylinder Series CQSY

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

Power Valve: Economy Valve Series VEX5

Port size E F G H I L M P Q A Model B J R T U C D K N O S Port 2 (A),1 (P) Port 3 (R) VEX5500 VEX5501 133.5 50 25 10 7 25 80 60 81.5 83.5 1 2, 3 4, 60 143.5 62.5 70 156.5 36.5 16.5 20 Center 2 x M6 Thread depth 9 116.5 1 2, 3 4, 1 1 25 VEX5700 VEX5701 160.5 150.5 62.5 90 60 30 15 7 173.5 37.5 100 60 13 88.5 86.5 18 2 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1, 1 1 c Bracket mounting dimensions

PF2A/PF2W

Flow rate measuring range Minimum set unit PF2 0.5 to 10.5 l/min 0.5 to 10.5l /min 1 to 10 l/min 0.1 l/min 0.1 l/pulse 2.5 to 52.5 l/min 2.5 to 52.5 l/min 5 to 50 l/min 0.5 l/min 0.5 l/pulse 5 to 105 l/min 5 to 105 l/min 10 to 100 l/min 1 l/min 1 l/pulse 10 to 210 l/min 10 to 210 l/min 20 to 200 l/min 2 l/min 2 l/pulse 25 to 525 l/min 25 to 525 l/min 50 to 500 l/min 5 l/min 5 l/pulse IF

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

VCB

E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Smooth Cylinder Series CA2Y 40, 50, 63, 80, 100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2. How to Order Standard L 40 150 CA2Y L Y7BW S 40 150 CDA2Y With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

CJP Rear trunnion Integrated clevis Boss-cut basic Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion T E BZ B L F G C D U CJ2 F Low friction direction Boss-cut front flange FZ CM2 Side at pressure When pressurized on head side Boss-cut front trunnion B Side at pressure When pressurized on rod side UZ C85 CG1 L 40 150 CM2Q F Standard MB C95 CDM2Q L F 40 C73

AR20-B to AR60-B

75 100 125 150 0 0 500 1000 1500 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AR30(K)-B Rc3/8 AR40(K)-B Rc1/2 AR40(K)-06-B Rc3/4 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 00 0 0 1000 2000 3000 4000 5000 0 1000 2000 3000 500 1000 1500 Flow rate L/min (ANR)

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

LFE-OMZ0012

min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200 Flow rate [L/min] -26No.LFE*-OMZ0012 Straight pipe length (reference value) Straight pipe length Straight pipe length Change of accuracy [%F.S.]

PF-OMN0011_C

min (20 L/min 0) 7112 L/min (7 L/min 0) 3.545.0 L/min (3.5 L/min 0.0) 1.718.0 L/min (1.7 L/min 0.0) 0.354.50 L/min (0.35 L/min 0.00) 0.354.50 L/min 1.718.0 L/min 3.545.0 L/min 7112 L/min 20280 L/min 0.01 L/min 0.1 L/min 1 L/min 2 L/min (50 ms) 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse 1 L/pulse 2 L/pulse L/minL 0.5F.S. 0.5F.S. 0.5F.S. 0.5%F.S.(25 ) 9.9 L 9 L 1 0.1L 0.5L 1L NPN