How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZM With valve 07 5 K E15 LZ 1 S A H L Supply valve, Release valve ZM 07 H 2 E15 L Without valve Vacuum switch electrical entry Nozzle diameter Nil L Grommet type, with 0.6 m lead wire Grommet type, with 3 m lead wire C Connector type, with 0.6 m lead wire CL Connector type, with 3 m lead wire CN

SMC Electronic Switch Series Variations

ISA Plug (without lead wire) CN ZSE1 ISE1 Output specifications ZSE2 ISE2 14 NPN Open Collector 1 output w/o analog output, 3 revolution adjustment With Connector/How to Order 15 NPN Open Collector 1 output w/o analog output, 200 revolution adjustment ZSP IWithout lead wire (Connector 1 pc., Socket 4 pcs.)

Rotary Actuator/Vane Style Series CRB1

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Nil L C CL CN Rotating angle When ordering the rotary actuator with solenoid valve, Series CVRB1, specify the models of both the rotary and the valve (solenoid valve). Note) For the valve, add * in front of the part number when ordering. Example) CDVRB1BW80-90S-R71 pc.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E B1 B2 B3 L1 TG1 T l1 (Min.) l2 FL H (Max.) d1 d2 d3 CN SR (Max.)

Electric Actuator with Integrated Guide

Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5 5 5 120 130 5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Driver input/output signal list (CN-1/F connector) Driver dimensions Pin no. Pin no.

Rotary Actuator/Vane Type

0 w y t q With auto switch (With auto switch unit and built-in magnet) * Refer to page 99 when the auto switch unit is needed separately. e Shaft type r Size o Electrical entry/Lead wire length 10 15 20 30 40 Nil Grommet/Lead wire: 0.5 m M Grommet/Lead wire: 1 m L Grommet/Lead wire: 3 m CN Connector/Without lead wire C Connector/Lead wire: 0.5 m CL Connector/Lead wire: 3 m * Connectors are

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

C95

16 3 4 4 4 4 4 10 12 16 16 20 20 30 35 40 45 45 55 34 40 45 51 65 75 3.3 4.3 4.3 4.3 4.3 6.3 41 48 54 60 75 85 6.6 6.6 9 9 11 11 10.5 11 15 15 18 18 32.5 38 46.5 56.5 72 89 10 10 10 12 16 16 142 160 170 190 210 230 32 40 50 63 80 100 22 25 27 32 36 41 5.5 5.5 6.5 6.5 10 10 CP95 C95 C92 CA1 Counter pivot ES Counter pivot E CS1 Bore (mm) Bore (mm) d2 CK S5 K1 K2 L3 G1 L1 G2 EM G3 CA H6 R1 CN

JXCx-OMU0004

CN . 17 5.1 . 17 5.2 . 17 (1) . 17 (2) . 18 (3) . 18 6.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

Free Mount Cylinder Series CU

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Series AK1000

Methyl Chloride SF6 CH3Cl Disilane Methyl Fluoride Si2H6 CH3F Silicon Tetrachloride Methanol SiCl4 CH3OH Silicon Tetrafluoride Methylsilane SiF4 CH3SiH3 Dichlorosilane Halocarbon 21 SiH2Cl2 CHCl2F Silane Chlorine SiH4 Cl2 Trichlorosilane Chlorine Trifluoride SiHCl3 ClF3 Sulfur Dioxide Carbon Monoxide SO2 CO Diethyltelluride Germane Te(C2H5)2 GeH4 Tungsten Hexafluoride Hydrogen Sulfide WF6 H2S

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Free mount type Shaft type Double vane Double shaft with single flat (size 10 to 30) Long shaft key, Short shaft with single flat (size 40) W Electrical entry/Lead wire length Grommet/Lead wire: 0.5 m Grommet/Lead wire: 3 m Connector/ Lead wire: 0.5 m Connector/ Lead wire: 3 m Connector/Without lead wire Nil L C CL CN Pattern Vane type Standard Simple Specials/Made to Order S D Single vane

LX Series Compact Electric Actuators

dimensions T-slot B dimensions LXSH _ B .150 6 I 370 277 277 8 47 65 $efie$ [)( tleclnh Arlualors 0inol|$im$ Slido $ffi||l Iy0[ LxsHnsE E;IEI9' With brake Brake electrical circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn

Table of Contents

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW50 CRB1LW63 CRB1LW80 CRB1LW100 Connector/Without lead wire CN Connectors are available only for auto switch types R73, R80, T79. Lead wire with connector part nos.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

B1 Bore size (mm) 32 40 50 63 80 100 125 l2 E B2 B3 L1 TG1 T FL d1 d2 d3 CN R 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32

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avaiab e 20mm lo 6.lmm cn y i 6-,,cylinder stroke (mm) Nole) Sriqe act n!

CRB2/CRBU2/CRB1

P411020-5 P411030-5 P411040-5 P411050-5 Model CRB1LW 50 CRB1LW 63 CRB1LW 80 CRB1LW100 Connector, Without lead wire CN Notes) Connectors are available only for auto switch types D-R73, D-R80, D-T79.

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.