Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

(b) Vcc B-1 Brown 12 5 5m GND A-1 Black 13 8 8m* A B-2 Red 7 A A-2 Black 6 A 10m* B B-3 Orange 9 B 15m* B A-3 Black 8 SD+(RX) B-4 Yellow 11 C 20m* SD-(TX) A-4 Black 10 Black 3 * Produced upon receipt of (c) Signal name Terminal No.

Stability of suction position,

Suction Verification C.

Rotary Table/

C D Small sizes 1, 2, 3, and 7 are newly introduced to the series! Small sizes 1, 2, 3 and 7 are newly introduced to the series! 2 types of shock absorbers are available, for low energy and high energy.

LX

(5.1) 10 5.8 4 5.5 36 1 0.2 6.5 6.5 1 3 39 28 10.5 3.3 T-slot A +0.030 0 depth 4 +0.030 0 depth 4 C 4H9 L-M6 Refer to Cross section C-C.

33

10 to 30 Cooling capacity Note 3), 11) (50/60 Hz) W 1000/1200 For option -T: 900/1100 1400/1600 For option -T: 1300/1500 Temperature stability Note 4) C 2 Circulating fluid system Pump capacity (50/60 Hz) Note 5) MPa 0.08 (at 7 L/min)/0.11 (at 7 L/min) For option -T: 0.13 (at 7 L/min)/0.18 (at 7 L/min) Rated flow (50/60 Hz) Note 6) L/min 7/7 Tank capacity L Approx. 5 Port size Rc1/2 Fluid

OMU0023

Function Description 1 N C Not connected 1 2 N C Not connected 3 SD + Connect + signal lead 1) 4 SD Connect signal lead 1) 5 N C Not connected 6 N C Not connected 8 CN3 7 N C Not connected 8 N C Not connected Note 1) Refer to the operation manual for the controller module to be connected before wiring. If the functions are indicated as A / B, connect the signals as + / -.

90

Note 7) Cannot be selected for vacuum pump system.

Integrated Controller

Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

VZ3000

Applicable connector: 26 pins MIL (Conforming to MIL-C-83503) (mm) Stations 4 5 94.5 76.5 12 234.5 216.5 L1 L2 3 77 59 112 94 6 129.5 111.5 7 147 129 8 164.5 146.5 9 182 164 10 199.5 181.5 11 217 199 Built-in One-touch fittings C4: MAX. 7 C6: MAX. 7.5 2n-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-27 For details about certified products conforming to international

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CE

d H B C D Part no.

VZ100/300/500

Applicable cable O.D.: 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306. Connector Assembly with Protective Cover Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector assembly with protective cover enhances dust protection.

AC Servo Motor Driver (CC-Link Type)

Refer to "LECSB2-T Operation Manual (Simplified Edition)", section 5.7 for how to set the Point table. -32- LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) 20 10 5 20 10 5 (Including pulley (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Electric Rotary Table

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 28 Series LECP1 Controller Details e r Details No.

Digital Flow Switches

Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Compact Rotary Actuator Series CRQ2

-XC69 6 Fluororubber Seal -X6 7 Shaft, Parallel Key Made of Stainless Steel Spec. C RQ2B CDRQ2B Refer to How to Order on page 256. S-X6 C RQ2B CDRQ2B XC69 Shaft type Size Rotation Fluororubber seal Shaft, parallel key made of stainless steel Refer to How to Order on page 246 for further information. Seal material is changed to fluororubber.

Air Fittings Fitting Series For Special Environment

O e b u t ) h c n I ( . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D L A * M . t W ) f g ( 6 9 . 0 ) 5 . 4 2 ( 1 8 . 0 ) 5 . 0 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 8 / 1 S 4 3 7 0 H R K 9/ 6 1 ) 9 2 . 4 1 ( 3 6 . 0 ) 6 1 ( 1 1 5 7 . 0 ) 9 1 ( 6 1 4 / 1 S 5 3 7 0 H R K 8 9 . 0 ) 5 2 ( 4 / 1 8 / 3 S 6 3 7 0 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 7 . 0 ) 5 . 8 1 ( 8 2 0 4

Fieldbus system PROFINET compatible SI Unit

Pin 2 (I/Q) Byte N Byte N Byte N Byte N EX245-LA1 only Bit 1 Bit 3 Bit 5 Bit 7 (For EX245-LB1 bits are fixed at 0) Digital input Pin 4 (C/Q) Byte N Byte N Byte N Byte N Available when the Digital input sub-module is configured. Bit 0 Bit 2 Bit 4 Bit 6 Pin 2 Digital output Pin 4 (C/Q) Byte N Byte N Byte N Byte N Available when the Digital output sub-module is configured.

MXQ

7 !8 !