Digital Flow Switch ( compatible)

(page 83) 2030 0x07EE 0 R/W Cut (Zero cut-off setting) U8 1 Y Setting range 0 to 10 1.0% increments 0: oFF 1: rAC 2040 0x07F8 0 R/W inP (External input setting) U8 1 Y (Accumulated value reset) 2: rPb (Reset peak/bottom) 2100 0x0834 0 R/W AoUt (Setting of analogue output) U8 0 Y 0: 1-5 (1 to 5 V) 1: 0-10 (0 to 10 V) Setting of analogue output (Voltage output type only) 1 R/W FrEE (Analogue

XLA Series

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

VXP21/22/23

VXP2260-10 Size 1 4 3 8 1 2 3 4 AC Thread 1 1 VXP2270-12 1 4 1 2 1 VXP2380-14 DC 2 VXP2390-20 VXP2270-32 VXP2380-40 VXP2390-50 Note) Surge voltage suppressor is attached in the middle of lead wire. 32A 40A 50A Flange Made to Order Specifications Splashproof Specifications ( ) Based on JIS C 0920 Based on IEC529IP-X4 Ordering example (Example) Series VXP22, Rc 1 1/4, 100 VAC Grommet (Part

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

VXD21/22/23

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

MXH Series Compact Slide

(See drawing at right) L Cylinder shaft center m Load center of gravity Selection Graphs 1 to 3 (Vertical Mounting) Graph 1 Maximum speed 100(mm/s) or less Graph 3 Maximum speed 500(mm/s) or less 1 100 10 0.1 Weight m(kg) Weight m(kg) Weight m(kg) 20 16 10 0.01 6 1 20 16 10 6 0.001 0.1 20 40 60 80 100 0 Overhang L(mm) 20 40 60 80 100 0 Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph

Clean Air Module

F1 F 1 LLB3 Standard (100 L/min (ANR)) LLB4 High flow type (500 L/min (ANR)) F 1 Filter F With filter Port size 1 3 3N 12 One-touch fitting Rc 3/8 NPT 3/8 Restrictor Note) Use a resin fitting (no metal) for Rc and NPT thread.

39

A 45 R25 33 M6 x 1.0 780.05 6.5 10 1 1 R25 19 18 19 R6 A B 90.0 120.0 150.0 Weight kg 0.8 0.9 1.1 Part no.

Ejector Valve Unit Series ZYY/ZYX 1

V B A B A P1 Hysteresis setting trimmer 28.1 Pressure setting trimmer 28.5 25 15.8 8 Accessory (packed together) 1. Silencer (AN203-KM81 pc.) 51 26 16 2.

Parallel Style Air Gripper: Wide Type Series MHL2

54 96 116 Model MHL2-20D MHL2-20D1 MHL2-20D2 58 100 120 71 113 133 38 80 100 82 142 162 122 222 262 160 260 300 32 68 88 D(mm) Note 1) J dimension is at fully closed.

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

PROFIBUS DP Compatible Fieldbus System

(Tightening torque: 0.6Nm) SW3 SW2 SW1 Address 1 2 0 0 0 0 1 1 0 0 2 2 N.C. 9 9 99 0 0 100 0 1 101 1 2 5 125 Bus terminator switch ( SW4 ) This switch can set the bus terminator. -19No.EX##-OMO0019 Configuration In order to configure the GW unit in the PROFIBUS DP network, the appropriate device master file (GSD file) for the GW unit will be required.

HRX-OM-X084

HRX-OM-X084 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

High Purity Chemical Valve

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PPS Valve type PFA Type Symbol Basic type N.C. PA PA PB N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C. With bypass PA PA N.C.

Prevents Micro-Bubbles

LVA10 LVA20 LVA30 LVA40 LVA60 12 22 LVA50 Model Orifice diameter 2 4 8 20 Body material Note 1) Port size Stainless steel (SUS316) 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 PAX PPS Valve type PFA PB Type Symbol Basic type N.C. PA PB PA N.O. A B B A B A PB Double acting N.O. Double acting N.C. With flow rate adjustment PA PA N.C. B A B A Double acting PB Double acting N.C.

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

FQ1

for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult SMC for detailed dimentions, specifications and lead times. 1 Without V-band Support -X19 3 Chemical Resistant Type -X68 Useful for reverse IN-OUT installation

Process Valve

6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2

VM

A) 2 (A) 54 46 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-Rc 3/4 4-Rc 1/4, 3/8, 1/2 5-8-14 9 Hand Valve Series VH Precautions Be sure to read before handling.