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Closing the valve for initial pumping and the valve for main pumping When the initial and main pumping solenoid valves are de-energized, the valve S and M will return and start sealing. 9 XL-OMM0005-A 5 Dimensions 57.6 XLDV-25 (For AC) 55.4 (For DC) 2.2 8.5 C E B 1(P) D (KF flange) Fn G M5 1(P) SUP A M5 3(R) EXE H A XLDV-40160 C C E B 8.5 8.5 5.5 D (KF flange) Fd (K flange) M5 G Fn 1(P) SUP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.

Suite D Poway, CA 92064 TEL: (858) 679-190s FAX: (858) 679-1904 ARGENTINA SMC Argentina S.A. CHILE SMC Pneumatics (Chite) Ltda.

IDX-OM-W032-D / Series IDFA22E-23C,K,L,R,T,V IDFA37E-23C,K,L,R,T,V IDFA55E-23C,L,R,T,V IDFA75E-23C,L,R,T,V URLhttps://www.smcworld.com/ English instruction manual can be downloaded from our URLhttps://www.smcworld.com/ SMC () * 1 ) JIS B8370 * 2 ) ISO4414 *1) ISO4414Pneumatic fluid power General rules and safety requirements for systems and their components *2) JIS B8370 URLhttps:/

Note 3) 1 Direct Operated Precision Regulator/Modular Style Series ARP20 to ARP40 Series ARP20K to ARP40K Direct Operated Precision Regulator with Backflow Function/Modular Style ARP40/ARP40K ARP30/ARP30K ARP20/ARP20K Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Nil R Flow direction d

For D-P4DW, 40 to 63 are available. Only D-P4DW type is assembled at the time of shipment. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are other applicable auto switches than listed, refer to page 18 for details.

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

45.5 55.5 55.5 37.5 34.5 24.5 24.5 24.5 30.5 3 20.5 13-/22-MXQ20(L) 81.5 75.5 78.5 43.5 47.5 37.5 27.5 37.5 35.5 3 37.5 27.5 17.5 27.5 25.5 33.5 65.5 68.5 73.5 23 13-/22-MXQ25(L) 92.5 64.5 92.5 50.5 56.5 46.5 36.5 36.5 50.5 3 46.5 36.5 26.5 26.5 40.5 40.5 54.5 82.5 73.5 27 800 MXQ 1322Air Slide Table Dimensions: MXQ6 1322Basic 2 x M2.5 x 0.45 thread depth 3 2 6 Operating port 2 x M5 x 0.8

Option NIL Without photoelectric sensor *1 NIL Without option S Photoelectric sensor *2 D With 2 three meter length exhaust duct hoses with 2 hose bands attached *1: Connect a switch to the external input terminal on the back side of the product. P With 2 dust bags with 2 hose bands attached *2: This is a regression reflection type photoelectric sensor.

Dimensions E C D E E L (Width across flats) M (Width across flats) M8 (KF Flange) (K Flange) Fn Fd C Detail of (a) (a) M Rc1/8 J H K B A G A Model A B C D E Fn Fd XLGR-80*-1* 90 250 117 45.5 38.5 114 110 XLGR-100*-1* 108 270.5 154 55 38.5 130 102 XLGR-160*-1* 138 339 200 65 38.5 180 153 Model G H J K L M XLGR-80*-1* 83 105 44 9 13 4 XLGR-100*-1* 102 92 58 9 13 4 XLGR-160*-1* 153 124 62 12.5

D) In the state of C), adjust shim so that the arm side block contacts the workpiece. E) Exhaust the air while in the clamped state, and confirm that the clamp arm does not open. 7 - Relation between shim thickness and clamping force 3 Use this figure as a guide as there is a tolerance of about 10% in the clamp cylinder body.

FRANKLIN ROAD INDIANAPOLIS INDIANA 46226 PHONE: 317-899-4440 FAX: 317-899-3102 TOLL FREE: 1-800-SMC-SMC1 1978-2000 SMC Pneumatics, Inc. All Rights Reserved. JB

Supply pressure MPa 1.0 1.0 1.0 1.0 1.0 1.0 Supply pressure MPa 0.9 0.9 0.9 0.7 0.8 0.9 0.6 0.7 0.8 0.9 0.9 Valve output pressure (MPa) Valve output pressure (MPa) Valve output pressure (MPa) 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.8 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.6 0.1 0.2 0.3 0.4 0.5 0.5 0.1 0.2 0.3 0.4 4000 6000 2000 200 400 600 800

ii'lri-tr'i"d'..r..t to the inside. Panel mount bracket Phillips type screwonver Removing Tube Installing Tube OPush in evenly on the release button. (DCul the tube perpendicularly, being caretul not to damage the oulside sulace, use tube culler TKA-1.

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc. (Cleveland) 2305 East Aurora Rd., Unit A-3 Twinsburg, OH 44087 Tel: (330) 963-2727 FAX: (330) 963-2730 SMC Pneumatics Inc.