Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

D-A9V/M9V/M9WV/M9A(V) types cannot be mounted. Caution Since there are other applicable auto switches than listed, refer to page 406 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785. D-A9/M9/M9W auto switches are shipped together (not assembled). (Only switch mounting brackets are assembled at the time of shipment.)

MVGQ

+ , C8D , ) ( ) ( : C%=D C&=D , 9 ! &' = 2 + ! , E , ! !

AMX-OM-Q018E

If they enter the inside of products, they could cause products to malfunction, lower performance or damage the element. d.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

For D-P4DW, 40 to 63 are available. Only D-P4DW type is assembled at the time of shipment. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) J79CN Since there are other applicable auto switches than listed, refer to page 18 for details.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

D Not available at 80 and 100. Note) Mounting brackets are not mounted and are supplied loose at the time of shipment.

Dedicated Controller Series LC1 Uniaxial Type

SYSTEM 90 CN5 CONTROLLER CN6 38 Interface cover 12.5 12.5 80 29 CN3 connector (D-sub 9P) 75 Mounting bracket 244 24 196 24 55 Series LC1 Series LC1/Operating Part Names Encoder/Limit switch signal connector: CN4 Control terminal: CN1 General-purpose input/output: CN2 Motor power connector: CN5 Power supply terminal: TB Connector: CN3 Controller Command Setting List Actuator Control Commands

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

Compact Proportional Solenoid Valve Series PVQ

PVQ30 (1.6) 120 Current decreasing 100 Current increasing Flow rate (l/min) 80 Curve A P = 0.7 MPa 60 Curve C P = 0.35 MPa Curve B P = 0.5 MPa 40 Curve D P = 0.2 MPa 20 0 0 24 VDC 20 40 60 80 100 120 140 160 180 200 12 VDC 0 40 80 120 160 200 240 280 320 360 400 Current (mA) 686 Compact Proportional Solenoid Valve Series PVQ Q. Required flow rate = 0 to 75 l/min.

ø 32, ø 40, ø 50, ø 63 Compact Cylinder With Solenoid Valve Series CVQ

20, 25, 30, 35, 40, 45, 50, 75, 100 IN 840 1400 1960 63 63 OUT 936 1560 2184 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke.

HAW

Accessory (Option) Basic size Symbol Description Nil Applicable air compressor kW Symbol F With screw flange Screw type Reciprocating type D With auto drain Port size 2 2.2 7.5 7 Caution on Design HAW2 Size Applicable model 04 Symbol Rc 06 14 20 30 22 37 55 75 22 37 55 75 110 15 22 37 55 75 1 2 Rc 3 4 Rc 1 1 2 Rc 2 Warning HAW7 HAW22, 37 HAW55, 75 HAW110 1.

MXF

, 100 Mass ( g ) Model Standard stroke (mm) 100 75 50 30 20 10 MXF8 170 130 120 MXF12 360 250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 D-X Individual -X 137

4-channel Flow Monitor ( compatible)

D The setting time from when the input signal reaches the set value, to when the ON-OFF output actually begins working. Delay time setting can prevent the output from chattering. Delay time Shows how precisely the flow can be displayed or set by the digital flow switch.

High Vacuum L Type Valve

H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa G 3 4 2 XLA-16

High Vacuum L Type Valve

H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

XLA Series

(KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38 1 30 17 40 XLA-25 50 113 48 1 12 40 26 39 XLA-40 65 158 66 2 11 55 41 63 XLA-50 70 170 79 2 11 75 52 68 XLA-63 88 196 100 3 11 87 95 70 69 XLA-80 90 235 117 3 11 114 110 83 96 XLA-100 108 300 154 3 11 134 130 102 131 XLA-160 138 315 200 3 11 190 180 153 112 10 XL*-OMI0009-E

XL-OMY0003

E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5 10 XL-OMY0003 6-2 1 2 b 3 1 2 O 4 a aa b O O

Electrostatic Sensor Monitor

Measurement distance or 0.4 kV sensor is settable within 10 to 50 mm, 20 kV sensor within 25 to 75 mm. Distance can be changed by 1 mm. Upper/lower limit of measurement range depends on measured distance. Peak values and bottom values wire reset when measures distance is changed. Drawing above shows 0.4 kV sensor.

Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

VNH

washer) B VNH1-16 VNH2-16 VNH3-16 VNH4-16 How to Order Pilot Solenoid Valves VO301-00 T X302 Light/surge voltage suppressor Rated voltage Nil S Z L With indicator light None With surge voltage suppressor With light/surge voltage suppressor 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 4 220 VAC 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D