3 Port Solenoid Valve Series VQ100

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

ZQ-OM01601

[F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.

Possible to transfer a workpiece at low-speed.

MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

PFxx-OMX0007

mode [ HYS] Hysteresis mode [ ot ] ([1ot ]) Select switch mode [ P] ([ 1_P]) Normal output [ 500] 500 L/min (PF3A701H) [ P] ([P_1 ]) Select input switch operation [1000] 1000 L/min (PF3A702H) [F 1] [ 50] 50 L/min (PF3A701H) [ H] ([H_1 ]) Setting of Hysteresis [ 100] 100 L/min (PF3A702H) ([dt1 ]) Delay time setting ([0.00]) 0.00 s [CoL ] Select display colour [ SoG] ([1SoG]) Green when ON

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

15

L Foot V F Rod flange2 V4 V G Head flange2 V5 D Double clevis3 V 1 Mounting bracket is shipped together, (but not assembled). 2 For horizontal cantilever mounting with the ends tapped, rod flange and head flange, use the actuator within the following stroke range.

HRL

Power consumption P: 20 [kW] Q = P = 20 [kW] Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = V: Power supply voltage P 24 [kW] Power consumption e Derive the heat generation amount from the output. Output (shaft power, etc.) W: 13 [kW] w Derive the heat generation amount from the power supply output.

25

type F Seal material of the liquid contact parts is changed to SF7000 (Perfluoropolyether rubber).

VQ20/30

Pilot Operated 2 Port Solenoid Valve For Dry Air Series VQ20/30 How to Order Valves (Single unit) VQ A C6 2 1 1 1 G Series/ Orifice size Option Symbol 2 3 Nil: None Series VQ20 VQ30 F: With bracket Valve type (A) 2 N.C. 1 L: Type L (VQ20 only) 1 (P) Body type Note) If ordering both options, indicate LF.

energy saving effect

V: Power supply voltage Power consumption P: 20 [kW] Q = P = 20 [kW] P Cooling capacity = Considering a safety factor of 20%, 20 [kW] x 1.2 = 24 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

HRS100/150

V: Power supply voltage Power consumption P: 7 [kW] Q = P = 7 [kW] P Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] Power consumption w Derive the heat generation amount from the power e Derive the heat generation amount from the output. supply output. Output (shaft power etc.)

CE

P-67.5 (YG)

R

A G E H O W T O O R D E R NCRA1 R O TA R Y A C T U AT O R NC RA1BW P I S T O N Basic D Magnetic S H A F T See Accessories Section A U T O S W I T C H T Y P E S Single Rod End W Double Rod End : 30mm Bore Double Rod End Only B O R E ( M M) 30 1 3/16 50 2 63 2 1/2 80 3 1/8 100 4 R O TAT I O N 90 90 180 180 C Both End Cushion A D J U S TA B L E C U S H I O N FOR FURTHER TECHNICAL DETAILS ON

2/3 Port Valve for Various

Option Symbol and Composition Fluid Name and Option Option symbol Seal material Coil insulation type Body, Shading coil material Fluid (Application) Option symbol and body material Brass or BC6 Stainless steel Applicable valve 10A to 50A 10A to 25A F, B L, J B J Note 1) Standard A B C D E F G H J K L N P Q S T NBR FKM Ethyl alcohol Ethylene glycol Caustic soda (25% ) Gas oil Silicon oil

Rodless Cylinder for Vacuum Series CYV ø15, ø32

B T Y L Depth ED T 4-LD PA K 4-MM Counter bore depth C Thread depth M F QW PB N A E depth EK Q + Stroke G Z + Stroke Stroke adjustment screw (inner cover) LW A A HP H HL HA HA HI TA TA R 4-J Depth JK Thread depth PC (from counter bore surface) 2-P 2-Counter bore dia.

Environment

How to Order S 2 B P H S4 200 LEY 63 A2 w y !0 i o e r t q u !1 !2 !3 !