Air Cylinder CP Series Cylinder Positioner Assembly 63mm cAt N63-P 80mm cA1N80-P!
C O NTE NTS 3-Color Display Electromagnetic Digital Flow Switch LFE Series How to Order p. 3 Specifications (Integrated Display Type) p. 4 Specifications (Remote Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series
[F 1] Setting of OUT1 completed.
Series PCW PC Wiring System /Series PCW P.593 P.594 P.599 Branch unit: PLC direct connected type Directly mounted on PLC I/O card. Branch unit Connected to PLC I/O card via connection cable. 8 point branch unit Separates two of 8 point I/O transmissions once those are separated from two of 16 point I/O by the branch unit.
Depending on the piping volume (piping length and diameter), if the pressure just before the supply (P) port falls below 0.5MPa, the performance such as vacuum pressure may reduce. Raise the upstream pressure,and the pressure just The pressure just before the supply (P) port is low. before the supply (P) port becomes 0.5MPa.
Pin name 1 2 3 4 DC (+) OUT2 DC () OUT1 1 3 2 x Piping port Z U T S 4 x WX G 2 4 (35.5) 42 H For PF3W721 OUT IN AA G 4 x P K L 2 x Piping port G N DD PF3W504/520/540/511/521 Remote sensor unit Y A E J F 30 W B V 2 x Piping port Z S T U 4 x WX G H 42 (35.5) For PF3W521 IN OUT AA G 4 x P K L 2 x Piping port G N (mm) Bracket dimensions Model Port size A AA B D DD E F G H J K L N P (Rc, NPT,
Filter Series FN1/FN4 Blocking Characteristics (Repeatability) P Fluid: Potable water P Supply pressure: 0.2 MPa P Flow rate: 20 l/min P Test dust: AC course test dust P Test method: Per SMC test method Filter part no.: FN1101N-10-Sl, FN4102N-20-Sl Element: END100-020 (Cylindrical type, 20 m) 0.2 Pressure loss (MPa) 0.1 0.01 0 T1 T2 T3 T4 T5 100% 100% 100% 100% 100% 0 0 0 0 Time it takes
1 4 (Rc, NPTF, G) 1 8 (Rc, NPTF, G) Individual air pressure supply port (P) 1 2 3 4 , Common exhaust port (EXH) (Rc, NPTF, G) Right side/Left side/Both sides Common exhaust port (EXH) location Max. number of stations Silencer Max.10 stations ZZM-SA (With bolts) The common air pressure supply port (P) and individual air pressure supply port (P) can be mounted together.
P Signals and terminal status can be monitored. P Parameters can be set.
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.
CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25
[F 1] OUT1 23 - [F 2] OUT2 OUT2 ONOFF OUT2 OUT2ON (P_1 H_3OFF)OFF ON(P_1 H_2ON), ON ONOFF H_2H_4 (H_1 H_2 + H_4 ) P_1-70.0 kPaH_1:10.0 kPaH_2:5.0 kPaH_3:0.0 kPaH_4:1.0 kPa OUT2 () OUT1 (V) H_2 24 - <> [F 2] ON OFF OFF ON ON [F 2] OUT2 1 2 2 3ON(H_4)OFF(H_2) 25 - [F 3] <> [F 3] , [F 3] 26 - [F 4] <> [F 4] , [F 4] , (28 -) ,ON/OFF 27 - OUT1 , AP1 OUT1 OUT1 OUT1 A1L
215 Electric Actuator/Guide Rod LEYG Series p. 215 Electric Actuator/Slider LEF Series p. 31 Electric Slide Table LES/LESH Series p. 307 Electric Rotary Table LER Series p. 399 Electric Actuator/Miniature LEPY/LEPS Series p. 369 Electric Gripper (2-Finger Type, 3-Finger Type) LEH Series p. 425 * Order the actuator separately, including the actuator cable.
MSU CRJ L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M CRA1 L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRQ2 L2 = L2 = Q2 = M Q2 = M MSQ Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 MSZ (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 CRQ2X MSQX CRQ2X MSQX MRQ Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
mode [ HYS] Hysteresis mode [ ot ] ([1ot ]) Select switch mode [ P] ([ 1_P]) Normal output [ 500] 500 L/min (PF3A701H) [ P] ([P_1 ]) Select input switch operation [1000] 1000 L/min (PF3A702H) [F 1] [ 50] 50 L/min (PF3A701H) [ H] ([H_1 ]) Setting of Hysteresis [ 100] 100 L/min (PF3A702H) ([dt1 ]) Delay time setting ([0.00]) 0.00 s [CoL ] Select display colour [ SoG] ([1SoG]) Green when ON
Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.
L Foot V F Rod flange2 V4 V G Head flange2 V5 D Double clevis3 V 1 Mounting bracket is shipped together, (but not assembled). 2 For horizontal cantilever mounting with the ends tapped, rod flange and head flange, use the actuator within the following stroke range.