ZQ

) S R U N L H L H k P a MOD E SET HYS Air supply port (P port) Note 4) (M3 x 0.5, piping not required) 71.9 66.9 (63.1) (M5 x 0.8) 57.3 Vacuum port (V port) Note 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust

Power Valve Precision Regulator

) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Set point Set point Set point Set point Port 1(P) pressure (MPa) Port 1(P) pressure (MPa) Port 1(P) pressure (MPa) VEX1530 3 VEX1730 3 VEX1930 3 Set point Set point Set point Set point Set point Set point Port 2(A) pressure (MPa) Port 2(A) pressure (MPa) Port 1(P) pressure (MPa) Port 1(P) pressure (MPa) Port 1(P)

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

Hygienic Design Cylinder Series HY

4 x UC depth UD F UA (4.7) PB + Stroke (Supply port of head end) P C E N B + Stroke A + Stroke (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 2) PD CJ5 CG5 QA PA HY PB + Stroke C M (mm) A B Bore size C D E F G H J K L MB MA N P PA Standard stroke 30 st or

Modular F.R.L. Unit

Please contact P/A regarding their availability.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Consult P/A.

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) P Part No.

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

Electromagnetic Digital Flow Switch

C O NTE NTS 3-Color Display Electromagnetic Digital Flow Switch LFE Series How to Order p. 3 Specifications (Integrated Display Type) p. 4 Specifications (Remote Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

MY2

M5 x 0.8 1/8 1/4 "P" indicates cylinder supply ports.

CQS

Refer to p.0-39 through 0-46 for Safety Instructions and common precautions.

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

Large Size Vacuum Module: Series ZR

940 to 967 P. 968 to 983 Component equipment Characteristics Ejector unit ZR1-W Nozzle dia.

VXA21/22

Caution Check Safty Instructions on p.0-33 and common precautions on p.0-37 to 0-40. 4.0-14

SYA3000/5000/7000

hole) 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 3/8, 1/4 (A, B port) 21 22.5 2 position double SYA724002 03 11.5 13.5 57 5.1 71.1 61 42 4 2 x M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 15.1 69 2 x 4.3 (For mounting) 96.2 26.5 2 x 1.8 (Ventilation hole) 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1742 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: J, K, T (mm) (mm) Q1 Q2 L2 + (3 x P) L2 + (3 x P) K axis (T axis) J axis Shaft Shaft J K T J K T type type Q1 = M Size Size L1 = L1 + (3 x P) L2 = 10 10 Not available Not available 15 15 M3 M3 20 20 M3, M4 M3, M4 30 30 M3, M4, M5 M3, M4, M5 L2 = Q2 = M Q2 = M 40 40 M3, M4, M5 M3, M4, M5 Symbol: A37 The long shaft can be further shortened

Direct Operated

absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.