Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

Accessories -XB6 Heat resistant cylinder (-10 to 150C) w/o auto switch only Note 1) MK-A012Z MK-A016Z MK-A020Z 12 16 20 25 32 40 50 63 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer -XC22 Fluororubber seals Note 2) Note 1) Except 12 and 16. Note 2) The bumper is a standard product.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, HE, 20MM CM2 DBL-ACT AUTO-SW, 1.32277 lb

Table of Contents

7 No. q w e r t y u i o !

1

MY1M(W) MB 8 Mechanically jointed rodless cylinder MY1 Cam follower guide type With cover (W) is also available.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Sine Rodless Cylinder Series REBR Direct Mount Type

First tentative bore size determination W D 1.6 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation (Refer to page 75 for vertical operation.)

NCG/CG1

Contents Series Bore size (mm) Kit no. 20 25 32 40 50 63 80 100 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W CBG1A50-PS-W CBG1A63-PS-W CBG1A80-PS-W CBG1A100-PS-W Order seal kit in accordance with the bore size.

RSQ

1 w o @0 !7 i !9 !

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Vertical Mounting L W Mounting orientation W L Maximum speed (mm/s) Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 800 All strokes Stroke (mm) (1) (2) (3) 8 Selection graph (4) (5) (6) (7) 12 to 40 Horizontal Mounting W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal.

Series CM2 stainless steel cylinders are compact, lightweight and offer high performance. Improved piston seal and rod seal greatly improve the units life. Rubber bumpers are standard. The CM2 series offers a variety of mounting options and is auto switch capable. Double acting single rod, Bore sizes: 20, 25, 32, and 40 *, Strokes from 25mm through 500mm, Mounts: basic, foot, front and rear

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYLINDER, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, HE, 20MM CM2 DBL-ACT AUTO-SW, 2.42508 lb

SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

Table of Contents - Tubing

Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.

Compact Cylinder with Air Cushion and Lock Series RLQ

Circuit example CLJ2 Retraction locking: B Extension locking: F CLM2 W A B CLG1 1 A Emergency stop Drop prevention CL1 B W MLGC W A CNG B 2 A MNB W B CNA W CNS A A 3 CLS B B CLQ W RLQ W A MLU A 4 B MLGP B W ML1C Mounting Caution 1. Be sure to connect the load to the rod end with the cylinder in an unlocked condition.

Basic Type/Direct Mount Type

9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

Air Cylinder

Not applicable for types: Double rod (W), Trunnion (T), XC8, XC9, XC10, XC11, Over sized rod (XB5) with front mounts.

RZQ

x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

RLQ

Retraction locking: B Extension locking: F CL W CL1 B A MLGC Emergency stop Drop prevention A W B CNG W MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA W CNS W CLS CLQ MLGP W RLQ W MLU ML1C W DPreparing for Operation Warning 1.