CV/MVGQ

seals 110C Heat resistant tarpaulin Double clevis pin and double knuckle pin Maximum ambient temperature for the rod boot itself. 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600 -XC27 50, 63 made of stainless steel -XC28 Compact flange made of SS400 25, 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 -XC29 Double knuckle joint with spring pin

VQ20/30

310.5 269.8 310 300 337.5 348 298.8 252 242 275 285.5 240.8 194 184 212.5 223 182.8 165 155 187.5 198 153.8 136 126 162.5 173 124.8 107 97 137.5 148 95.8 78 68 100 110.5 66.8 49 39 75 85.5 37.8 223 213 250 260.5 211.8 L1 L2 L3 L4 L5 17-2-90 Series VQ20/30 Pilot Operated 2 Port Solenoid Valve For Dry Air Dimensions Plug lead unit manifold (VV2Q32) Mounting hole 2-4.5 through VC VDW VQ VX2

ASR

rotations Number of needle rotations Flow Valve: Series ASQ Meter-out Type (Inlet pressure: 0.3 MPa) ASQ430F ASQ530F ASQ630F 20 10 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 200 15 300 4 500 10 5 200 100 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle rotations Number of needle

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

or less 180 or less 0.8 1.4 100 90 20 14 13.2 Response time (1) (ms) VFN Max. operating frequency (c.p.m.) (2) DC AC DC AC 1.6 2.4 300 360 50 60 24 Weight (kg) 50 Hz Apparent power (VA) Inrush 60 Hz AC 50 Hz Holding 60 Hz Power consumption (W) DC Note 1) Based on JIS B 8375-1981.

2-Color Display

Power supply voltage 24 V: 600 Min. load impedance: 50 Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 The FUNC terminal is connected using a dedicated lead wire (ZS-38-5L or ZS-38-U) when the copy function is used.

SYJ3000

mm) MN: Without lead wire WO: Without connector cable L: With lead wire (Length 300 mm) G: Lead wire length 300 mm + + + + W: With connector cable Note 1) H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector + Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached.

Ionizer Series IZS31

Bar type Bar length Sensor Emitter cartridge type/Emitter material Bar length 300 mm 380 mm 620 mm 780 mm 1100 mm 1260 mm 1500 mm 1900 mm 2300 mm Symbol 300 380 620 780 1100 1260 1500 1900 2300 Without sensor Autobalance sensor [Body-mounting type] Nil E F G Symbol Nil C S J K Emitter cartridge type Emitter material With feedback sensor Autobalance sensor [High-precision type] Tungsten Silicon

MLGP

, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.

Series

mm) MN: Without lead wire L: With lead wire (length 300 mm) G: Lead wire length 300 mm + + + + W: With connector cable Note 1) LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm + + Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve Body Ported/Single Unit

mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire D, Y: With connector Nil: Non-locking push type D: Push-turn locking slotted type E: Push-turn locking lever type + + + + H: Lead wire length 600 mm LN: Without lead wire LO: Without connector MO: Without connector DO, YO: Without connector Light/Surge voltage suppressor + + Electrical entry

How to Order

(With gasket and screws) Body option Electrical entry M: Main/Pilot valve common exhaust type 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Manual override Grommet L plug connector M plug connector M8 connector M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) G: Lead wire length 300 mm MN: Without lead wire WO: Without connector cable Nil: Non-locking push

10-SYJ3000

Electrical entry 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Grommet L plug connector M plug connector M8 connector E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable CE-compliant +Nil Q +CE-compliant Note) CE-compliant: For DC only. + + H: Lead

V1

Rated voltage CE-compliant For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type CE-compliant For AC (50/60Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC Grommet L plug connector M plug connector G: Lead wire length 300 mm L: With lead wire (Lead wire length 300 mm) M: With lead wire (Lead wire

AZ1000

in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig V3 L 1 H 2 4 10 40 -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7 MPa 0 to 28 MPa Ports Code Ports 2 ports 3 ports 4 ports 3) Not available with SHP material. 4) PTFE recommended for applications such as within a process tool. 5) Source pressure rating is limited to 300

Air Cylinder Standard: Double Acting, Single Rod ø 40 , ø 50 , ø 63 , ø 80 , ø 100 Series CA2

, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Refer to pages 19 to 23 for cylinders with auto switches. 80, 100 Intermediate strokes not listed above are produced upon receipt of order.

CYV

Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) MG 15, 32 CX DSpecifications -X 15 32 Bore size (mm) 20Atmosphere to 1.3 x 10-4 Pa (ABS) Operating environment pressure Air/Inert gas Operating atmosphere Data Air/Inert gas Fluid

High Precision Filter for Liquids FGH Series

2 m 4 m 6 m 13 m Filtration efficiency 99% FQ1 HEPO 2 FGH100 to 300 FN The membrane element cannot be selected for FGH100.

FHM

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

PF2D Series Digital Flow Switch For Deionized Water and Chemical Liquids

Port size: (inch) Output specification 11 13 19 PF2D504 PF2D520 PF2D540 3/8 1/2 3/4 Specification PF2D200/300 series PF2D300 series Symbol 1 2 Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.