2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3
With rod boot (mm) Symbol Z h l Stroke f e 1 to 50 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 Bore 68 81 93 106 131 12.5 25 37.5 50 75 160 173 185 198 223 17 36 20 72 85 97 110 135 12.5 25 37.5 50 75 164 177 189 202 227 17 36 25 72 85 97 110 135 12.5 25 37.5 50 75 166 179 191 204 229 17 36
22 Hastelloy C-22 316L SS PCTFE (Option: Vespel) Wetted Parts Body Surface finish Poppet Diaphragm Nozzle Seat 50 0.34 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 Dimensions inch (mm) 20 0.14 AZ1400T 2.12 (53.8) 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P) 0 0.00 0 40 80 120 160 200 Flow rate (slpm, N2) AZ1400T 2000 psig (13.8 MPa) 200 psig
D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)
/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175
/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175
A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5
Supply port ISA3-C: Rc1/8 ISA3-F: G1/8 1 3 DC () 4 OUT1 Unit: mm Stations 1 2 3 4 5 6 1: Conforming to ISO1179-1 (49) 45 L1 38 76 114 152 190 228 (3.7) 18 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5 Detection port ISA3-C: One-touch fitting ISA3-F: G1/8 1 Piping type C (4 One-touch fitting) C (6 One-touch fitting) F (G thread) H 13 13.6 19 17 3-Color Display Digital Gap
500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) 7 Series MXQR Dimensions: MXQR 6 For detailed dimensions about the stroke adjuster, refer to Adjuster Options.
3306 Y type 200/220 VAC [230 VAC] 240 VAC 24 VAC Circuit with indicator light (Built-in connector) Applicable crimped terminal O terminal: Equivalent to R1.25-3 that is specified in JIS C 2805 Y terminal: Equivalent to 1.25-3, which is released by JST Mfg.
E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.
Auto switch mounting surface Bore size (mm) 12 16, 20 32, 40, 50 Port side Port side C A C A B B Auto switch mounting surface Auto switch mounting surface Auto switch mounting surface Auto switch model Port side A, B, C side A, B, C side Only auto switch mounting rail surface qBQ-2 wBQ2-012 Two kinds of auto switch mounting brackets are used as a set. qBQ-1 wBQ2-012 Two kinds of auto switch
AD27-D With bowl guard AD27-C-D AD37m-D AD47m-D Normally open (N.O.)
Driver CN3 Actuator cable Electric actuator Moter CN2 4.3 CN4: Serial I/O connector (1) Connection with the teaching box Driver CN4 Teaching box (The 3m cable is provided.) 22 - (2) Connection with a PC Driver PC 120.3 120.3 mm mm 200 200 mm/s mm/s USB cable (A-miniB type connector) Communication 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN4 cable (The PC should
N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.
60% Ethylene Glycol Physical property value Temperature Density Specific heat C [kg/m 3] [g/l] ([kcal/kg C]) [J/(kgK)] 1.10 x 10 3 3.02 x 10 3 (0.72) 10C 1.08 x 10 3 3.15 x 10 3 (0.75) 20C 1.06 x 10 3 3.27 x 10 3 (0.78) 50C 1.04 x 10 3 3.40 x 10 3 (0.81) 80C Water Density : 1 x 10 3 [kg/m 3] [g/l] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kg C]) 79 Thermo-chiller Series HRZ Fluorinated
IP63, JIS C 0920 Rainproof construction Except solid state switch with timer (D-M5TL, G5NTL/F7NTL/F5NTL) and magnetic resistant 2-color indication type solid state switch (D-P5DWL). D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).
(Example) 40: D-A3;C-4, 50: D-A3;C-5, 63: D-A3;C-6, 80: D-A3;C-8, 100: D-A3;C-10 BA4-040 BA4-040 BA4-063 BA4-080 BA4-080 [Stainless Steel Mounting Screw] The following stainless steel mounting screw kit (including set screws) is also available. Use it in accordance with the operating environment. (Since the auto switch mounting bracket is not included, order it separately.)
Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to