5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

SUP side pressure P1 (MPa) Operating range Double check spacer Cylinder pressure P2 (MPa) 0 1 0 1 The combination of VFS21 0, VFS22 0 and a double check spacer can be used as prevention of falling at the stroke end but cannot hold the intermediate position of the cylinder. 1140 Series VFS2000 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Construction 2 position single

Guide Cylinder Series MGG

6 A @1 @0 !9 !0 #2 $0 A' Ball bushing bearing #5 @5 #0 @8 @6 !7 !0 @1 !3 #8 !2 @9 MGJ Slide bearing y MGP Long stroke 100 MGQ @7 MGG 80, 100 View A-A MGC Component Parts Component Parts MGF Note Material Description No.

LEF-OM006xx

0 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200

Compact Proportional Solenoid Valve Series PVQ

Port size Power supply '$ ( $* ( Coil current ') + Power consumption $ % Coil insulation & '" 0 7 2 9 9 5 5 ' " %2 2 9 9 0 0 ! : 0 7 32 ! 5 0 0 " 2 0 07 2 ; <2 0 2 2 2 0 07 0 0 = ; 3 $" 5 0 0 77 0 77 77 3 0 0" 322 3 7 3 2 2 9 9 7 2 0 77 5 2 5 0 77 7 7 2 9 9 !

Vacuum Ejector Series ZM

0 !4 ZY ZF Component Parts No.

OMS0020

Available Note1) PLS OUT 1 OUT 0 ALARM BUSY DRIVE SVON IN 3 IN 2 IN 1 IN 0 Signal Reserved INP Origin SETUP SVON TL CLR IN 1 IN 0 Condition 0 0 0 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b 1b ASCII hex "0" to "1FFF" Note 1) Changes to "1" after completion of the Return to Origin operation.

HRX-OM-W069

bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 0 Add 0 to the top If it is 0, do not ExOR 3.10 Checksum calculation method HRL Series 3-10 HRX-OM-W069 Chapter 3 Serial communication Calculation example

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

LEY-OM007

ON / 3 0> OFF / 3 2 1 No.0 4 3 No.1 5 0/> No.0 No. mm/s mm % % mm 0 ABS 250 50.00 40 40 20.00 50mm 40mm 60 40% 60% 40 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 No.1 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 0.00 0 0 0.50 0mm 20mm 20 No. mm/s mm % % mm 0 ABS 250 40.00 60 40 20.00 1 ABS 250 20.00 0 0 0.50 (6) 4.3 []P21~P29 ACT

ISA2

9 6 9 6 9 6 9 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 0.3 0.2 0.1 IN IN 0.15 0.1 0.05 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.4 0 MPa 0.2 Left Right Bracket Bracket Stations 3 2 1 Stations 1 2 3 IISA2CSL-3B5DLCE21 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) IISA2VPR-3B5DLC1 set (3 stations manifold part number

E-P HYREG ® Series VY1

1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5%

5 Port Solenoid Valve Series VQZ1000/2000/3000

100 0 Perpendicular, upward actuation Horizontal actuation VQZ VQZ1151-01 SQ VFS 800 700 600 500 400 300 200 100 0 VFR VQZ2151-02 VQ7 900 800 700 600 500 400 300 200 100 0 VQZ3151-03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

Series IDG

Performance Charts IDG1 IDG3 P1 = 0.3MPa Outlet air atmospheric pressure dew point C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.3MPa P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 4 8 12 16 0 10 20 30 40 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG10 IDG5 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0 !

Membrane Air Dryer

0 0 300 200 100 0 240 160 80 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) IDG100LAM3, 100SAM3 IDG100LAV3, 100SAV3 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 Pressure drop (MPa) 0.10 0.08 0.06 0.04 0.02 0 0 400 300 200 100 Inlet air flow rate (L/min [ANR]) 22 Series

HRX-OM-W004

The 2-byte data of the result of (7) is the CRC value. 3.10 Checksum calculation method HRR Series 3-10 HRX-OM-W004 Chapter 3 Serial communication (Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

IP8001 Series

0) or the product with HART communication (IP8001-0*3).

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)