Series IDG

Performance Charts IDG1 IDG3 P1 = 0.3MPa Outlet air atmospheric pressure dew point C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.3MPa P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 4 8 12 16 0 10 20 30 40 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG10 IDG5 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

0 !

Membrane Air Dryer

0 0 300 200 100 0 240 160 80 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) IDG100LAM3, 100SAM3 IDG100LAV3, 100SAV3 Element saturated state (AFM, AFD) Element initial state (AFM, AFD) P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.7 MPa 0.12 Pressure drop (MPa) 0.10 0.08 0.06 0.04 0.02 0 0 400 300 200 100 Inlet air flow rate (L/min [ANR]) 22 Series

HRX-OM-W004

The 2-byte data of the result of (7) is the CRC value. 3.10 Checksum calculation method HRR Series 3-10 HRX-OM-W004 Chapter 3 Serial communication (Example 1) The least significant bit was a 1. 0 0 0 0 0 0 0 1 1 bit shift in the lowest direction 0 0 0 0 0 0 0 0 1 Add 0 to the top Execute ExOR if 1 (Example 2) The least significant bit was a 0. 0 0 0 0 0 0 0 0 1 bit shift in the lowest

IDG

0 40 80 120 160 20 40 60 80 0 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG20 (Type A products group) IDG30 (Type B products group) P1 = 0.3 MPa P1 = 0.3 MPa 0 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) P1 = 0.5 MPa 10 P1 = 0.5 MPa 10 P1 = 0.7 MPa 20 HA 20 P1 = 0.7 MPa 30 AT 30 40 ID 50 0 40 100 200 300 0 100

IP8001 Series

0) or the product with HART communication (IP8001-0*3).

ITV

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

MHF2

0 !3 !1 !2 !8 !4 @0 @1 o r t !5 y !9 e !7 MHF2-8D2 i !6 Parts list Parts list Note No. Description No.

Low Profile Air Gripper Series MHF2

1 E-E MHL +0.1 0 Close: 0 Open: 121 MHR Use the attached hexagon socket head screws for mounting holes.

E-P HYREG ® Series VY1 1

1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5%

Sine Rodless Cylinder Series REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts Component Parts No. Description No.

2 Phase Stepper Motor/Without Motor Brake Series LXP

8.4 5.4 34 0.02 78 91 94 64 50 10 B 4H9 +0.030 0 depth 6 26 63 73 30 D Stroke + 181 (Stroke: 50 to 100mm) Stroke + 198 (Stroke: 125 to 200mm) 12 5.5 43 Cross section BB Photo micro sensor wire (300mm) Motor wire (300mm) 4H9 +0.030 0 12 6 4.5 3.5 2 1 5 4H9 +0.030 0 3 Section F detail (Scale: 2/1) 49 38 6 Section C detail (Scale: 2/1) Stroke + 104 (Stroke: 50 to 100mm) Stroke + 121 (Stroke:

PF2A/PF2W

Note 6) The display unit is comformed to CE mark. 16-11-19 16 Series PF2W Flow Characteristics (Pressure loss) PF2W704, PF2W504 PF2W720, PF2W520 PF2W740, PF2W540 0.030 0.05 0.07 0.025 0.06 Pressure loss (MPa) 0.04 Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0

24

0 !2 !6 w u !4 t !0 @4 @1 u q !6 y @3 r !0 w !2 !4 o t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more MGJ 12 to 25 50 stroke or less JMGP MGP MGP MGPW 12 to 25 Over 50 stroke MGQ 50 or more MGG MGC MGF Component Parts Component Parts MGZ No.

Modular Design with Uniform Body Style

0 !1 q r e w t i y u o !0 !

Digital Flow Switches

Note 6) The display unit is comformed to CE mark. 14 Series PF2W Flow Characteristics (Pressure Loss) PF2W720, PF2W520 PF2W740, PF2W540 PF2W704, PF2W504 0.030 0.05 0.07 0.025 0.06 Pressure loss (MPa) 0.04 Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5

MXS

0 !1 !2 !3 !4 !5 !6 !7 !8 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

0.043 3-4 depth 8 +0.02 0 Misc.

Fieldbus System

How to Order Valves (With mounting screw) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

EXxx-OMZ0016

Bit area Input (RX) Output (RY) EX600-WSV* (32 points) 0 32 EX600-WSV* (24 points) 0 24 EX600-WSV* (16 points) 0 16 Wireless Remote WSV EX600-WSV* (8 points) 0 8 EX600-WSV* (0 points) 0 0 EX600-DX *B (8 points) 8 0 EX600-DX *C (8 points) 8 0 EX600-DX *C1 (8 points) (with broken 8 0 Digital input unit line detection) (EX600 Series) DX EX600-DX *D (16 points) 16 0 EX600-DX *E (16 points) 16