JXCx-OMT0002

280 420 280 Min. speed [mm/s] (Independent and interpolation) 30 20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 Supplement 1.7 Initial setting of LEH series Model LEHZ(J)10 LEHZ(J)16 LEHZ(J)20 LEHZ(J)25 LEHZ32 LEHZ40 Lead symbol K Lead [mm] 251/73 249/77 246/53 243/48 242/39 (6.205) 254/43 (5.907) (3.438) (3.234) (4.642) (5.063) Max. speed [mm/s] 80 80 100 100

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

Lightweight and Compact

20 s Max.

Step Motor Controller

to the control panel,s protective earth (PE).

Transfer

A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Slider Type/Ball Bushing Bearing

J A N PS W PP Z + Stroke Square nut insertion Square nut insertion TW NL (mm) PA 65 66 Model A 125 132.5 CY1HT25 CY1HT32 EB 79 90 H 63 75 HA 46 52.5 HB 46 57.5 HC 61.5 72.5 HG 19.5 25 HP 58.5 69.5 HT 35 43 J M6 x 1.0 M8 x 1.25 LL 56 63.5 LW 119 130 M M6 x 1.0 M8 x 1.25 MM 10 12 N 20.5 23 NL 18 22.5 NT 9 12 EA 28.5 30 Model PB 108 115 CY1HT25 CY1HT32 PS 51 61 S 209 219 TW 110 124 W 136 150

Rotary Table/Rack & Pinion Style Series MSQ

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 79.5 (Max. approx.

LEY-OM007

40[%] INPON 2[mm] j 1[mm] j AREA ON OFF ON INP OFF 0 10 20 30 40 50 60 70 80 90 100 [mm] 102 -26- 3 INC a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 INC 100 10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 1 INC 100 -10.00 3000 3000 0 0 0 100 10.00 20.00 0.50 ABS()/ / INC()/ / 1 30[mm] No.0 No.0INC 10 (INC) c 50[mm] 0 10 20 30 40 50 [mm] 2 30[mm] No.1 No.1INC

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

Digital Flow Switch (Remote type sensor unit)

dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010-J Dimensions of lead wire with M8 connector (ZS-40-A) -47No.PF-OMN0010-J Made to Order Change the seal material of the wetted parts to EPDM.

10

N S SJ SN 2 pcs. 3 pcs.

FGX-OMZ0008

300 X40 0.4m 99.9% Element category Symbol Element J HEPO D Membrane Port size Port size Symbol (Rc) 03 3/8 04 1/2 06 3/4 8/12 FGX-OMZ0008 4.

PA3145/3165/3185

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Port size (IN, OUT port) Single Port size Rc size VR VPA3145 VPA3165 VPA3185 Symbol Body size 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 VH 04 06 10 12 14 20 8 1 2 1 Valve option VHS Nil For general purpose (32A) 1 4 1 (40A) 1 2 1 Body ported

AW20-B to AW60-B

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Y (Upward), Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: N (NPT), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 40, Backflow: without Backflow Function, Thread: Rc, IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: J (Right Angle Square Type Pressure Gauge w/Limit Indicator), Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

AS-FPQ/FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.