NCM

K L M B A C (inch) Part no.

ITV-E

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

O

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

O

H andl e caref ul l y w hen operat i ng w i t h out put pressure rel eased t o t he at m osphere, as ai r w i l l cont i nue t o f l ow out . I f suppl y pressure t o t hi s product i s i nt errupt ed or shut of f , w hi l e t he pow er i s st i l l on, t he i nt ernal sol enoi d val ve w i l l cont i nue t o operat e and a hum m i ng noi se m ay be generat ed.

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

CG1

73+l 73+l 82+l 91+l 91+l 46 51 51 62 71 71 93 98 101 113+l 120+l 123+l 114 119 125 134+l 141+l 147+l 67.7 78.7 118 (125) 138 (145) +l 146 (153) 166 (173) +l 98.6 136 (147) 156 (167) +l 168 (179) 188 (199) +l 119.2 136 (147) 156 (167) +l 173 (184) 193 (204) +l Consists of pins, flat washer and hexagon socket head cap bolt.

PFxx-OMS0001CN

200KPa 400KPa 400KPa L/Min L/Min PFMC7202(2000 L/min) kPa L/Min -69No.PF-OMS0001CN-A IN 3F.S.8cm IN OUT [%F.S.]

PFxx-OMP0001CN

min] ON OFF [] PFMB7501 [P_1] OUT1 250 L/min [H_1] OUT1 25 L/min 250 L/min [P_2] OUT2 25 L/min [H_2] OUT2 PFMB7102 [P_1] OUT1 500 L/min [H_1] OUT1 50 L/min 500 L/min [P_2] OUT2 50 L/min [H_2] OUT2 PFMB7202 [P_1] OUT1 1000 L/min [H_1] OUT1 100 L/min 1000 L/min [P_2] OUT2 100 L/min [H_2] OUT2 OUT1OUT2 [F 1]OUT1(28)[F 2]OUT2(36) -22No.PF-OMP0001CN-F <> 1 [P_1][n_1][] 500 L/min

MB

Bore size (mm) Part no. l m L d Dd9 H B C D Applicable cotter pin CJ1 3 x 18 l 4 x 25 l 4 x 35 l 4 x 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 Note 1) When using cotter pin, flat washer is used together.

VZS

DOZ is not available. 2 9 Other Option Electrical entry 3 position closed center G: Grommet Lead wire length: 300 mm L: L plug connector With lead wire LN: L plug connector Without lead wire LO: L plug connector Without connector D: DIN terminal 3 3 position exhaust center 4 M: M plug connector With lead wire MN: M plug connector Without lead wire MO: M plug connector Without connector

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease Volume Part no. 5 g GR-L-005 10 g GR-L-010 150 g GR-L-150 3. Do not wipe out the grease in the sliding part of the air cylinder.

PF2D

L/min Accumulated pulse flow rate exchange 0.05 L/pulse 0.1 L/pulse 0.5 L/pulse value (Pulse width: 50ms) Note 1) Note 2) Real-time flow rate L/min, gal (US)/min Display units Accumulated flow L, gal (US) Accumulated flow range Note 1) 0 to 9 L 2.5% F.S.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

10

Bore size [mm] Dd9 L l m d Part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

PF2D

ZSM PF2 IF Sensor Flow range Data 4 l/min 20 l/min 40 l/min 1.8 l/min 0.4 l/min 10 l/min 0.4 l/min 4 l/min PF2D504 4.5 l/min 0.25 l/min 1.8 l/min 20 l/min PF2D520 1.3 l/min 21 l/min 4 l/min 40 l/min PF2D540 2.5 l/min 45 l/min Rated flow rate range of sensor Set flow rate range of sensor 16-11-47

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Size M4 x 0.7 x 8 L Q'ty 1 BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6 L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 3 Set screw M4 x 0.7 x 8 L 2

2/3 Port Valve

(No need to add options "S" and "L".)

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

EX120/121/122

32.3 28.3 47.3 45 l Terminal no.