VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

MHT2

Rail mounting Direct mounting D-F7BA D-F7lW D-F7lF D-J79W D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lV/J79C D-F9BA D-F9lW D-F9lWV D-F7lWV D-A9l D-A9lV D-F9l D-F9lV D-A79W D-A7l/A80 Bore size (mm) D 8 10.5 13.5 16.5 C 11 15 13 15.5 D 9 11.5 14.5 17.5 C 12 16 14 16.5 D 5 7.5 10.5 13.5 C 8 12 10 12.5 B 7 9.5 12.5 15.5 A 10 14 12 14.5 B 10.5 13 16 19 A 13.5 17.5 15.5 18 B 3.5 6 9 12 A 6.5 10.5 8.5

Rotary Table Series MSU

9, D-T99 D-9A, D-S99, S9P High precision type MSUA 90 3 Single vane 7 180 D-R73, D-T79 D-R80, D-S79, S7P 20 1 D-9, D-T99 D-9A, D-S99, S9P 90 Single vane 3 MSUB Double vane 180 7 D-R73, D-T79 D-R80, D-S79, S7P 20 Double vane is available with 90 rotation setting only.

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

CP95

2 pcs. 25 15 D-Z80L 1 pcs.

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office:

RSH/RS1H

Note 2) The figure shows an extended piston rod. 10-9-10 10 Heavy Duty Stopper Cylinder Series RSH/RS1H Proper Auto Switch Mounting Position Auto switch B A RE A B REC CX CY Proper Auto Switch Mounting Position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models MQQ M D-Y69 D-Y7PV D-Y7WV D-Y7BAL RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS

Pneumatic Transfer System Series MF

32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B

3-Position Rotary Table

(Make sure that there is no rotation backlash in the table.) 3 Tighten both adjustment bolts c and d to approx. 45. Note 1) Tighten both adjustment bolts c and d to approx. 45. Note 1) 4 Lock adjustment bolts c and d with fixing nuts. Note 2) Lock adjustment bolts c and d with fixing nuts.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Piping port M5 x 0.8 GB BA CB D LH LB LY With head cover port in axial position (R) LT BB NB A NA X Y LX LZ S + Stroke Z + Stroke H 2-LC Mounting hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8

Power Clamp Cylinder

to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

SFOD-OMT0012

Current limit is exceeded (1-148) Input RESETSV ON D Remove the obstructions while the actuator moves.

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

SFOD-OMT0011CN

SFOD-OMT0009) d) e) 33 No.SFOD-OMT0011CN-A (1-2) a) View(V) 4.1 (1-1-2) View (V) b) Step No Edit OK c) d) OK (No. SFOD-OMT0009) 4.5 (0,0) (No.

PSxx-OMM0006CN

WF1 ) M35L M45L A D A D M8(3),M8(3).

VCA

Printed in Japan. 1st printing May, 2000 D-SMC.L.A. P-80 (D)

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)