Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

ZX

Nil Grommet (0.6 m) L Grommet (3 m) Nil Y M5 x 0.8 M6 x 1 (Option) C Connector (0.6 m) Filter case CL Connector (3 m) Caution 1. The case is made of polycarbonate.

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Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N P P P p p IC circuit 3-wire (NPN) 5 V,12 V 3-wire (PNP) M9PV M9P P P P p p 2-wire 12 V M9BV M9B P P P p p Solid state auto switch 3-wire (NPN) 5 V,12 V M9NWV M9NW P

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) M plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

3 Port Solenoid Valve Series SYJ300/500/700

connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (W0): SYJ34-W0-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to the page 68 for dimensions with connector cable. 6 Series SYJ300 Manifold

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

M5: M5 thread 4 2-C6 3(R) EXH port 80 (L plug connector) 86 (M plug connector) 92 (L plug connector) FG R2 R1 SG S2 S1 0V 24V SMC ERR RUN TRD R R 49.3 23.2 5.5 35 ADDRESS 8 4632 D F 6 20.2 SA MODEL 4 2 12.2 P P 3 2-C6 1(P) SUP port DIN rail clamp screw L3 L4 57 (M plug connector) Indicator light 51 (L plug connector) Applicable connector: Flat ribbon cable connector (26P) (Conforming to

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

O.D.: 3.2 (VAC. port) KJS23-M5 Applicable tubing O.D.: 4 (VAC. port) KJS04-M5 Applicable tubing O.D.: 6 (VAC. port) KJS06-M5 16.5 15.5 16.38 15.3 15.6 KJL23-M5 KJL04-M5 8.4 9.3 Applicable tubing O.D.: 3.2 (VAC. port) Applicable tubing O.D.: 4 (VAC. port) 10.6 10 P port (for ejector) Applicable tubing O.D.: 4 (P. port) KJS04-M5 Applicable tubing O.D.: 6 (P. port) KJS06-M5 16.38 15.5 Applicable

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

KK130 P.198 Universal nipple M-5ALU-6 Body rotates at 360 around the stud axis P.197 P.196 DM M5 male x M5 male PAT.

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

for 1/4" M5: M5 thread 53 13.8 A 2 10 Manual override 24.5 7.8 (N1, N3, N7) (M5: 5.7) Cover diameter 1.4 Cross sectional area 0.2mm2 (Lead wire length) 300 SMC 27.5 16.3 18 13.6 7 23.4 Mounting holes 41 M5 x 0.8 P port M5 x 0.8 R port R 3 P 1 10.7 9 M5 x 0.8 External pilot port 32 (Only external pilot port type(R)) L type plug connector (L): VQZ115L -N1, N3, N7, M5 M type plug connector

MXQ

Dimensions are the same as standard type. 8-5-42 43 Air Slide Table Series MXQ External Dimensions of Adjuster Metal Stopper (CS/CT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P D A B C F G M D E P *1) H J K Q 1) L MXQ-CS6(L) 5 15.5 MXQ6(L) M 6 19 7 7 M2.5 x 6 14.5 12.5 M2.5 x 8 8 2.5 7 8.3 M5

Rotary Actuator/Vane Type

F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.

Stainless Steel 316 Fittings

Inch P. 5 P. 11 Plug KQG2P Metric Inch P. 7 P. 13 Different Diameter Straight KQG2H Union Elbow KQG2L Metric Inch P. 4 P. 10 Metric Inch P. 6 P. 12 1 Stainless Steel 316 One-touch Fittings Applicable Tube: Metric Size, Connection Thread: M, R, Rc Series KQG2 RoHS Metric Size KQG2 Inch Size KQG2 Metric Size KFG2 Inch Size KFG2 KQG2 Specific Product Precautions KFG2 Specific Product Precautions

Stainless Steel One-touch Fittings Series KG

Body rotates at 360 around the stud axis. 6/4-M5 6/4-M5 MS-5ATHU-6 MS-5HLH-6 P. 133 P. 134 Applicable MS-5ALHU-6 MS-5HLH-4 MS-5HLH-6 MS-5ATHU-6 only Gasket Gasket(H) To seal M5 thread. M-5GH To seal M5 thread M-5G1 P. 134 P. 134 132 Miniature Fittings Series MS Barb fitting for soft nylon: MS-5AU-3, -4, -6 Effective orifice(mm 2) Weight (g) D L Part No.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

3 (R) L plug connector (L) VQZ200 N.C. 3 Port M plug connector (M) 0.45 0.6 (Option) 100V AC 200V AC 110V AC 220V AC (A) 2 VQ M plug connector (M) VQZ 1 (P) 3 (R) N.O.

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Vacuum Pad

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Compact Rotary Actuator Series CRQ2

(Example) For M5: L2 = 10 Applicable shaft types: K, T, X Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5,