Ionizer

10 5 5 0 0 500 1500 2000 0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Nil W 2-5-5 Base Mounted Series VQ4000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 0 1 G H 2 position single: VQ415 155.5 105.5 155.5 105.5 42.5 50 42.5 50 Indicator light 23.5 23.5 11 (12.5) 11 (12.5) 2(B) port 4(A) port VQC 5 3 4 2 SQ 9 38 48 A B 38 24.6 10.5 48 11 1 A 4 2 VQ0 3 5 1 14 12 13.5 13.5 30 45 2-5.6 Mounting hole 30 45 VQ4 2-5.6 Mounting hole Manual override 5-Rc 1/

Common Supply Regulator

Note 5)Select with an option E1, E2, E3 or E4. -8- 5.

JXCx-OMT0028CN

No.1 2 =0 39 - 11. 11.1 [IN] Bit/Byte / Address ID No. 0 OUT0 bit 0,1 1 OUT1 bit 0,1 2 OUT2 bit 0,1 3 OUT3 bit 0,1 0 4 OUT4 bit 0,1 5 OUT5 bit 0,1 6 bit 0 7 bit 0 0 BUSY bit 0,1 1 SVRE bit 0,1 2 SETON bit 0,1 3 INP bit 0,1 1 4 AREA bit 0,1 5 WAREA bit 0,1 ID1 6 ESTOP bit 0,1 7 ALARM bit 0,1 2 H 3 4 0.01mm 2147483647 4 5 L 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 H 11 4 0.01mm

Fieldbus system EtherCAT compatible SI Unit

(AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

AHC System Series MA

24.5 31 20.8 6 16.8 Bottom hole dia. 2.6 through 4 x M3 x 0.5 depth 5 Not possible to use a through-hole when using an auto switch.

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Brake mechanism added

11 D-G5/K59/G5W D-K59W/G5BA D-G5NT/G59F D-G39/K39 D-G39C/K39C D-A5/A6 5 6 6.5 6.5 7 D-B5/B64 D-A59W 13 13 14 15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

Air Slide Table Series MXW

60 90 210 105 420 MXW25-150 180 5 65 92 225 110 445 Note) Stopper bolt Y shown in the section above is attached only on B type (with shock absorber). 164 Series MXW Air Slide Table MXW25/Stroke: 175, 200, 225, 250, 275, 300 mm Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) J 20 Width across hexagon socket hole 5 MXH 11 66 MXU Note) If long bolts are used, they can touch the guide block and cause

CE2

11 11 CC Grommet (In-line) 13 14 13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also

MXH Series Compact Slide

18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 0 1 Meter-out Meter-in 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

AC Servo Motor Driver (Pulse input type/Positioning type)

Driver Servo amp lifier (Note 7) (Note 7) (Note 4, 9) (Note 2) 24VDC CN1 CN1 1 DICOM 9 ALM Trouble (Note 6) RA1 13 DOCOM 10 SA Speed reached (Note 3, 5) Forced stop RA 2 EM1 SON RES 8 4 3 (Note 9, 11) Servo-on 11 RD Ready RA 3 (Note 9, 10, 12) Reset Electromagnetic brake interlock 12 MBR Speed selection 1 RA 4 SP1 5 6 Forward rotation start Reverse rotation start ST1 ST2 7 10m max. 10m max

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

10 2 pcs. 15 Operating Range (mm) Bore size Auto switch model 12 16 20 25 32 40 50 63 80 100 D-A9/A9V 7 9.5 9 9 9 9 9 10.5 10 10.5 D-M9/M9V D-M9W/M9WV 4 5.5 5 5 5.5 5 5.5 5.5 6.5 7 D-Z7/Z8 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 11 11 13 13 8.5 9.5 9.5 11 14 5 8.5 9 10 10 6 6 6.5 8.5 11.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable