Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: S6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 300mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 2m, Controller Type: -, I/O Connector: -

Series: LEFB (Belt Drive), Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: S3 (200W Output, Incremental Encoder), Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: S (Standard Cable), Cable Length: 2 (2m)

Accuracy: Basic Type, Size: 40, Motor Type: S2 (100W Output, Incremental Encoder), Lead, mm: H (Size 40: 24mm, Size 63: 30mm, Size 100: 50mm), Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: S (Standard), Cable Length: 2m

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: T6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 300mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: S (Standard Cable), Cable Length: 2m

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: S3 (200W Output, Incremental Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length:

Series: LEFS (Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: T7 (200W Output, Absolute Encoder), Lead: A (LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: S (Standard Cable), Cable Length: 2

Series: Belt Drive, Size: 32, Motor Mounting Position: Top Mounting Type, AC Servo Motor: 200W Output, Incremental Encoder, Lead: S, Stroke: 300mm, Motor Option: None, Auto Switch Compatibility: None, Positioning Hole: Housing B, Bottom, Cable: Standard Cable, Cable Length: 2m, Driver: -, I/O Connector: -

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Incremental Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -,

Series: Ball Screw Drive, Accuracy: Basic Type, Size: 32, Motor Mounting Position: In-line, Motor Type: 200W Output, Absolute Encoder, Lead: LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 300mm, Motor Option: w/o Option, Auto Switch Mounting Bracket: None, Grease Application: with, Positioning Pin Hole: Housing B, Bottom, Cable Type: Standard Cable, Cable Length: 2m, Driver Type: -, I/

Accuracy: Basic Type, Size: 40, Motor Type: 100W Output, Incremental Encoder, Lead, mm: Size 40: 24mm, Size 63: 30mm, Size 100: 50mm, Stroke: 300mm, Motor Option: None, Cover: w/o Cover, Cable Type: Standard, Cable Length: 2m, Driver Type: -, I/O Connector: -, Option: -

Size: 25, Motor Mounting: Top Mounting Type, Motor Type: T6 [AC Servo Motor, (Absolute Encoder), Output 100W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 300mm, Motor Option: w/o Option, Rod End: Rod End Female Thread, Mounting: Ends Tapped (Standard), Actuator Cable Type: Standard Cable, Cable Length: 2m, Controller Type: -, I/O Connector: -

7

Refer to page 118 for details. 141 VXD Series For Air/Water/Oil 4 B Dimensions/VXD2 Body Material: C37, Stainless Steel Grommet C E U 300 T f A B OUT IN OUT IN M 2 x P Port size F b a J I 2 x 8.5 2.6 d e L K (D) Grommet (with surge voltage suppressor) C E U 300 T A OUT IN OUT IN M B (D) L K 2 x P Port size I F J Cable 6 to 12 U V E C DIN terminal G1/2 (44) T 31.5 B A IN OUT M 2 x P Port

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Bore size (mm) 20 25 32 40 20 25 32 40 Clean series Standard stroke (mm) RS Q G 10(Relief type) RS H A 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 RZQ 11(Vacuum type) MI W S Specifications CEP1 Bore size (mm) 10(Relief type) 11(Vacuum type) 20 20 25 32 40 25 32 40 CE1 Fluid Proof pressure Maximum operating pressure Minimum operating pressure Air 1.5 MPa 1.0 MPa CE2 0.035 MPa 0.025 MPa Without

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

134 11 77 99 116 53.5 73.5 53.5 43.5 M12 x 1.75 18 80 100 22 11 154 11 94 117 136 53.5 85 63 43.5 M12 x 1.75 22 100 For details about the rod end nut and accessory brackets, refer to page 7-6-20.

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Guide Cylinder Series MGG

16 54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50