Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

2-Color Display

Settings can be copied to up to 10 slave sensors at once. (Max. transmission distance: 4 m) Unit 1 Unit 2 Unit 10 1) The sensors are connected by a dedicated lead wire (ZS-38-5L (for master and one slave) or ZS-38-U (for master and up to 10 slaves)).

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C

Low Profile 2/3-Port Solenoid Valve

[Inrush] Rated voltage [Holding] 1 2 35% (SX090) 42% (SX9 ) of rated voltage 0 V 100 10 ms T1 (ON) (2 s or more) T2 (OFF) Energized condition -8- Dimensions 2-port SX91/Normally closed SX92/Universal 10 Base hole dimension 4.5 0.05 2 x M2 x 0.4 Thread depth: 6 or more 9.8 0.3 7.4 38.1 (Lead wire AWG#26) 300 5 5 10 3.4 +0.05 0 2 x 3 (Port hole dimension) (4.5 0.05) 10.3 8.4 8.3 8.9 C0.2 or

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Low Profile

P) port 2(A) port 1 (IN) 3-port SX090/Universal Base hole dimension q 10 2 x M2 x 0.4 9.8 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 1.7 1.7 11.6 0.8 2.45 1.5 2.3 (Lead wire AWG#26) 300 54 3.4 10 5 3 3 1.7 10 Base hole dimension w Mounting screw (Included) M2 x 11 2 x M2 x 0.4 Thread depth: 6 or more Tightening torque: 0.1 to 0.14 Nm 3 4 4 (11.6) 4 4 2.1 1.7 1.7 3 2.45

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

RSH

40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy Duty Stopper Cylinder Series RSH Operation Guide Precautions qAdjustment of shock absorber capacity (50 to 80) When a transported object is to stop softly loosen the set screw (M4) on the stopper section, turn the adjustment dial to set the energy absorption value for

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

ARJ310

01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

MGC

timer Grommet 3 wire(NPN) IC 5V, 12V G59F With diagnostic output (2 color) 4 wire(NPN) Latch with dianostic output (2 color) H7LF *Lead wire length 0.5m (Example) B80C 5m Z (Example) B80CZ 3m Z (Example) B80CL N (Example) B80CN * : Manufactured upon receipt of order Stroke Long stroke (mm) Standard stroke (mm) Model Bearing Bore size (mm) 20 25 32 40 50 75, 100, 125, 150, 200 250, 300

Miniature Regulator Series ARJ310

01 BG ARJ 3 10 F BG With One-touch fitting 04 01 Body size Option specifications 0.7MPa setting (standard) 0.2MPa setting With thread sealant Nil 1 S Model Relieving type 10 When set at 0.2MPa, a pressure gauge is not included.

Regulator for 2 MPa Series ARX20

400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 AU Flow rate (/min (ANR)) Flow rate (/min (ANR)) AF AR ARX21-01 ARX21-02 0.35 0.35 IR 0.30 0.30 Outlet pressure (MPa) Outlet pressure (MPa) VEX 0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)

SYJA3000

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

Return Filter FH100 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM FH FH HOW Model/Rated Flow Rate Model Port size (Rc) Rated flow rate (L/min) Micromesh Paper FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 60 50 1 100 80 1 1/4 150 120 1 1/2 200 160 2 300 260 2 1/2 550 450 3 700 600 Description Part no.

I/O Configurator (NFC version)

The Wireless Remote is 10 already registered. 3. When another Wireless Base is in pairing 3. Another Wireless Base is mode, the Wireless Remote will be displayed for the Base. Keep one Wireless Base in pairing mode. in pairing mode. -122No.EX-OMV0017-C 10. Release Notes Revision No.

I/O Configurator (NFC version)

The wireless slave is 10 already registered. 3. When another wireless master is in pairing 3. Another wireless master is mode, the wireless slave will be displayed for the master. Keep one wireless master in pairing mode. in pairing mode. -121No.EX-OMV0017-B 10. Release Notes Revision No.

I/O Configurator (NFC version)

The wireless slave is 10 already registered. 3. When another wireless master is in pairing 3. Another wireless master is mode, the wireless slave will be displayed for the master. Keep one wireless master in pairing mode. in pairing mode. -121No.EX-OMV0017-A 10. Release Notes Revision No.