ML1C

Applicable bore A B A B A B MY-S25 MY-S32 MY-S40 ML1C25 ML1C32 ML1C40 103 117 35 50 8 5 9.5 5.5 M6 x 1 128 146 45 64 11.7 6 11 6.6 M8 x 1.25 148 170 55 80 14.8 5 14 9 M10 x 1.5 1114 A Hy-rodless Cylinder ML1C Series Construction #9 %7 #8 #7 %6 !0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !

XMD/XYD Series

14 45 80 160 200 Conductance l/s Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

VT317

(Values at the initial period) Note 3) At rated voltage Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT317 VT317V (Vacuum spec. type) VT317E (Continuous duty type) 0.29 kg 2.4 0.26 0.62 2.6 0.34 0.67 2.8 0.25 0.67 2.5 0.37 0.66

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

, specifications, and lead times. q Special Mounting Angle Specification of Pressure Gauge (45, 135, 225, 315) 01 G5 20 ARG A X2101 Mounting angle of pressure gauge Body size Symbol 20 30 40 Port size 1/8 3/8 1/2 Symbol A B C D Description 45 135 225 315 With back flow mechanism Refer to the table below.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

, 60 CS2 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

VSA4

C[dm3/(sbar)] 6.4 8.7 9.2 6.4 8.7 9.2 6.2 8.1 10 6.6 8.9 11 Port size Rc 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 Note) Weight (kg) A/B EA/EB Pilot port size SA C[dm3/(sbar)] 6.3 8.2 9.6 6.3 8.2 9.6 5.8 7.5 9.5 5.5 6.7 9.4 b 0.16 0.28 0.14 0.16 0.28 0.14 0.23 0.27 0.18 0.24 0.25 0.15 b 0.13 0.13 0.17 0.13 0.13 0.17 0.15 0.11 0.14 0.15 0.14 0.14 Cv 1.4 2.1 2.2 1.4 2.1 2.2 1.4 2.0 2.4

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

IDX-OM-W019

Thread symbol SYMBOL DRAIN TUBE SIZE NONE 10mm UNIT : inch (mm) N 3/8 DRAFT AIR OUTLET B Q E D A SWITH WITH LAMP AIR OUTLET EVAPORATION THERMOMETER AIR INLET F G DRAIN SEPARATOR VENTILATION C VENTILATION VENTILATION TERMINAL BLOCK DRAIN TUBE (O.D.10 LENGTH:0.8m) (820) J K L P N M H 4-13 POWER CABLE WITH PLUG (L=2800) Dimensions (inch [mm]) Model Thread Size A B C D E F G H J K L M N P Q IDFB3E

HRX-OM-I051

FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

Multistage Ejector Series ZL112.212

PVF 1 9 Suction cover Sound absorbing material B ZL112-SP01 Without valve PVF 2 10 Front cover Sound absorbing material A (Set no. for 9, 10 & 11) PE 11 3 End cover Suction filter 4 Body 5 Vacuum sensor unit 6 Nozzle 7 Diffuser Detent plug Other than vacuum switch 8 Lead wire cover Vacuum switch specifications With valve 12 Front cover B With valve 13 Valve plate With valve 14 Needle SYJ514

LZ-OM003xx

L[]ZB[]3 5 Across flat 10 10 12 21 L[]ZB[]5 6 Across flat 17 19.5 22 33 Model no. F When mounting the work to the rod end, clamp the end across flat for tightening so that not Model no. A [Tightening torque] L[]ZB[]3 8 14 Across f l at 13 21 L[]ZB[]5 10 22 Across f l at 21 33 Model no. B C D E L[]ZB[]5 M 10 x 1. 25 x 12 deep [24.5Nm ] L[]ZB[]3 M 6 x 1. 0 x 8 deep [5.2Nm ] Model no.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 Thread type 1 2 10 20 Rc G NPT Nil F N Material Brass Stainless steel C S Type 30 OUT port size Stations VVCW20-4A Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 Type 10 is M5 only.

Process Pump

When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time Drive unit fluid is sucked into pump chamber A. 2.

Digital Flow Switch (Integrated display type)

Analogue output A B C Voltage output 1 V 1.5 V (1.4 V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA : The value in ( ) is when PF2W711 is used. Rated flow range Model Min. Max. PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision.

Low torque Metal seal type Rotary joint

#$% 45 " ! #$%& Series MQR & ' !" # $%" # " ) " 4.1 " ( & $ ' # $ % & $ ' ! 4.1 ( # $ % ( 30h8 & * # $ % ( ) ) & ) ) * * + * + * ) + ) + ) ) 25H8 30H8 45 45 +45 +30 ) 22.5 ) * ) %" " # $ % ( $ ' $ ) ' $ $ ' $ $ ( ' , ) * * ) !"

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

ISO Standards [ISO/21287] Compact Cylinder 20,25,32,40,50,63,80,100 Series C55 How to Order B 20 10 C55 B 20 10 M9B S CD55 With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

VFRA3000

51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] VFRA4311-04 3 8 VFRA4411-03 3 position exhaust center 1.2 1 8 PA, B: 51 (2.8) A, BEA, EB: 57.6 (3.2) [A, BEA, EB: 45 (2.5)] 1 2 VFRA4411-04 3 8 65 (3.6) [PA, B: 30.6 (1.7)] VFRA4511-03 3 position pressure center 1.2 1 8 VFRA4511-04 1 2 67 (3.7) [PA, B: 30.6 (1.7)] ( ): in case of normal position.

IDX-OM-U021

2 M3 6.5mm 1.25mm 2 1-3 IDF100150F 1 6 IDX-OM-U021 2 2 2-1 45 45 45 2-1 IDF100150F 2 1 IDX-OM-U021 2 2-2 2-2-1 (1) (85%) () B C 245050 () 2000m ) (2) 2-2 IDF100150F 2 2 IDX-OM-U021 2 2-2-2 P.6-2 6.3 IDF-AB501 14 1 1 1 4 5 3 2 1 600mm 600mm 600mm 600mm 600mm 2-2 IDF100150F 2 3 IDX-OM-U021 2 2-2-3 IDF100F-30 () 2-2 IDF100150F 2 4 IDX-OM-U021 2 2-2-4 60