ASR

Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle

High-precision Digital Pressure Switch ( compatible)

For precise pressure detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. Unit s selection function is not available for fixed to SI units type.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

MTS Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa. CY Note 3) This data is considered typical but not guaranteed. 10-9 MG Leakage test result CX 10-10 0 5 10 DTime [min] -X e e a a l l k k w w a a 2 o o g g 1 O-ring seals separate vacuum and atmosphere.

Non-contact Gripper

8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) Size: 80 Size: 100 30 50 0.4 (MPa) 0.4 (MPa) 25 40 0.3 (MPa) 0.3 (MPa) Lifting force (N) Lifting force (N) 20 30 0.2 (MPa) 15 0.2 (MPa) 20 10 0.1 (MPa) 0.1 (MPa) 10 5 0 0 0 1 2 3 4 5 6 7 8 9 10 Distance from the workpiece (mm) 0 1 2 3 4 5

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-53 12 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 @1 !

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Formula for Obtaining the Set Value A B ZSP P_1 or P_3 P_2(H_1) or P_4(H_2) PSE200 PSE300 P_1(P_3)=A-(A-B)/4 P_2(P_4)=B+(A-B)/4 Hi Auto-shift input PS H_1(H_2)=(A-B)/2 Lo ISA B Switch output response time at time of auto-shift input A Auto-shift input time C Precision indicator setting PSE PSE200 PSE300 15 ms or less 10 ms or more This function eliminates slight differences in the output

EXxx-OMY0004

For your safety . 10 2.1. General safety notes . 10 2.2. Electrical safety . 11 2.3. Safety of the machine or system . 12 2.4. Directive and standards . 12 2.5. Documentation . 13 2.6. Abbreviations used . 13 3. Product Summary . 14 3.1. Features . 14 3.2. Structure . 15 3.3. Safe digital inputs and clock outputs UT1 and UT2 . 16 3.4. Safe power supply (outputs) . 20 4.

Ejector Valve Unit Series ZYY/ZYX

ZX B B A B A B ZR P1 A A ZM 10 9 4 5 ZMA ZQ 3 ZH ZU ZL ZY ZF 11 ZP Section A-A' (Ejector) 12 SP 2 7 ZCUK AMJ 8 AMV AEP HEP Related Equipment 6 1 Section B-B' (Solenoid valve) Component Parts Replacement Parts Description Material Note Description Part no. No. No.

LEKF-OMZ0035

lock A 12 16 20 1200 1200 B 6 8 10 *Refet to Applicable Stroke Table.

I/O Configurator (NFC version)

Number of registered slave Setting range: 0/15/31/63/127 pcs. Set the data update time of the analogue output unit connected to the wireless slave. Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) : The analogue input update time can also be set for every wireless slave unit. Refer to "(A) Slave unit setting" (page 38).

4 Port Solenoid Valve Series VQD1000

M5 (A, B port) C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 20 237 229 19 226 218 17 204 196 15 182 174 13 160 152 11 138 130 9 116 108 7 94 86 6 83 75 18 215 207 5 72 64 16 193 185 4 61 53 14 171 163 3 50 42 12 149 141 L2 L1 2 39 31 10 127 119 8 105 97 637

3 Port Solenoid Valve Series VQ100

White Black Black Red Red Red Black Black White 1 station SOL. 2 stations 2 SOL. 3 3 stations SOL. 4 stations 4 SOL. 5 5 stations SOL. 6 stations 6 SOL. 7 7 stations SOL. 8 stations 8 (a) SOL. 9 9 stations (2) SOL. 10 stations 10 SOL. 11 11 stations (b) (1) Black White SOL. 12 stations 12 SOL. 13 13 stations SOL. 14 stations 14 SOL. 15 15 stations SOL. 16 stations 16 How to Calculate the

MHL2

M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

o

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(H) 10-32NOM tMs) L Type Plug Connector(L) M Type Plug Connector (M) TUpe 531/ Side Ported ' t NW5J3-S31-@0116-r-M3 1 O-32 NOM (M5) 4 ports i (e R p"") 6 T--9. , 64 (41.7) 11 81 (300) 2 09 I (531 I Stations 2 7 u, I 10 I l 12 13 14 15 16 17 '18 t9 L1 1.40 (35.5) 1.81 2.22 {46) (s6.b) 2.M (67) \77 5) 3.46 (88) 3.88 (98.5)4.29 (109)4.70 (119.51 5_12 5.53 (130) (140.5) 5.94 6.36 6.77 (1sr) (

Manifold Specifications

Station 15 Station 20 C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1.3 0.12 0.31 1.5 0.12 0.37 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.33 1.6 0.11 0.36 1.4 0.12 0.35 1.6 0.10 0.36 1.4 0.14 0.36 1.5 0.11 0.35 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) Manifold Option Parts Assembly Individual SUP spacer An individual SUP spacer set on manifold block can form SUP port for every valve.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

17

support A MY-SA 2 x G F 2 x H E C D A B Side support B MY-SB 2 x J MY1B MY1B MY1H E A B MY1B C D MY1M (mm) MY1C A 61 70 87 B C D E F G H J Part no.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60