ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

CEx-OMI0064

10% A DOWN DOWN +12V 10% B C B A A : 5 sec C : 5 sec B : 5 sec ,CEU5 (78 ) CEU5 , 23m ,, CEU5 (DC12V,60mA)DC12V , 8 - 5 F.G.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

VNC

N.O. 5.7 5.5 2 VXA 1 4 VNC0 VNC02 10.4 10.2 50 VN 12 (P1) 10 (P2) Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room (1 l/min flow rate).

Wireless System

A 14 A B A B A 14 A B A 14 A B 3 2 A 14 U side D side D side U side 0 1 5 4 2 3 B 12 B 12 B 12 B 12 B 12 7 8 1 2 3 4 5 Valve stations EX600-ED4 1 set EX600-WEN1 1 set EX600-EU1 1 set SS5Y3-10S6WE72-05B-C6 (Type 10 5-station manifold base, Wireless EtherNet/IP) Negative common, M12 connector IN/OUT pin arrangement 1, I/O unit: 2 stations * SY3100-5U1 3 sets (2-position single part no.) *

KK/KK13

Body size Part no. 4 6 8 10 6 8 10 12 12 16 4 6 8 10 6 8 10 12 12 16 KK3P-04L -06L -08L -10L KK4P-06L -08L -10L -12L KK6P-12L -16L KK3S-04L -06L -08L -10L KK4S-06L -08L -10L -12L KK6S-12L -16L 1/8 1/8 1/4 1/4 1/2 1/2 Bulkhead type with One-touch fitting Bulkhead type with One-touch fitting Applicable tubing O.D. mm Applicable tubing O.D. mm Body size Part no.

ZSE30/ISE30

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Elbow Straight A One-touch fitting size 4, 5/32" 6 1/4" C 18 20 20.5 B 10.4 12.8 13.2 B A 20 22.4 22.8 C B 14.4 11.2 B Straight Elbow With One-touch fitting With bracket 42.5 10 15 4.2 3 22 30 20 25 20 SMC 45 30 1.8 35 35 16-2-10 11 Series ZSE30/ISE30 High Precision, 2-color Display Digital

VQC

VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2

90

20 30 40 50 0 10 20 30 40 50 Units used Units used Released into atmosphere IR Special bleeding structure No fixed throttle in the new design.

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

Air Suction Filter

ZFA200 ZFA100 Nil T Rc B NPTF F G ZFA200 How to Order Manifold (2 to 10 stations) Symbol Indicate both the symbols for air suction filter and bracket part no.

Series DXT474

(Example) 2000mm lead wire length Cover Groove Pin 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm Lever 6 10 15 20 25 30 50 DC indicator Socket DXT170-71-1 For DC SY114-5LOZ SY100-30-4A-20 For AC SY114-1LOZ SY100-30-1A-20 Connector Hook Lead wire 10 World Wide Support... Europe ENGLAND SMC Pneumatics (U.K.) Ltd.

ALB900

Description Type Model ALB900-10 ALB900-20 ALB900-30 VBA Oil can be replenished by merely opening and closing the oil filler plug without stopping the air line.

ISE70/75/75H

Note Bracket B and the bracket assembly make up one set.

Process Valve

6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2

E-P HYREG

k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

VJ10-36-1A-10 . 2 pcs.

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3