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Pilot port position for pilot valve 18 Revision history A:Create New 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved 19

If the electric-pneumatic valve is thought to have an error, please return it as it is. 15 VEP-OMM0002-C A Safety Instructions Po B Renewal QR Revision history C Renewal TY 1st printing:NP 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

If the product malfunctions, please return the valve as it is. 11 No.VEX-OMA0019-C Revision history AE ARenewal Ny A BE ASafety Instructions Po A CE ARenewal WU 1st printing : January 1987 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 13 VFR3000OMH0003B S Revision history A Renewal KQ B Renewal PP 1st printing: HT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on

If the product malfunctions, please return the valve as it is. 10 VT307-OMQ0002-B Revision history A Precautions on Design / Selection QZ B Renewal VS 1st printing:QV 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

Prohibited way of using the valve which is written at "Precautions" section in this operation manual In addition, in the case of trouble, please send it back to the supplier for repair or replacement. 12 VT315-OMH0002-D S Revision DE ATightening torque change 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

If the product has failed, then please return the valve as it is. 11 VT317-OMH0001-B Revision history AE ASafety Instructions Po A BE ARenewal Wo 1st printing :MX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

IR20-OM02-F -14- Revision history A creation B Thread type (NPT,G) addition C Format change and content review D Sectional view filter deletion of P.5 E Name plate layout change F Content review 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

. -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Bad characteristic Plugged restrictor Disassemble and clean Deformed diaphragm Replace diaphragm -9- No.IL01-OM06-C -10- No.IL01-OM06-C -11- No.IL01-OM06-C Safety instructions update Drawings update Spare parts list, Drawings update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject

Spare Parts List 290301 Diaphragm Assy NBR 1 Part number Part name Material Quantity 29038 Diaphragm NBR 1 29063#1 Valve NBR 1 JIS B 2401, P3 O ring NBR 2 JIS B 2401, P7 O ring NBR 1 JIS B 2401, P10 O ring NBR 1 JIS B 2401, P34 O ring NBR 1 -9- #1 -9-10-10- Revision A Format change and content review B Drawing update 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

SJ2000-OMM0001-B Revision history BRENEWAL 2020.7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved No. SJ2000-OMM0001-B

VQC4000 : 46Nm 20 No.VQC4000V-OMX0001 S Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved No.VQC4000V-OMX0001

. * If the product has failed, then please return the valve as it is. 12 No.VT325-OMK0002-B Revision history AE A Renewal PS A BE A Renewal WQ 1st printing: KS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Leakage due to deterioration of rubber parts Consult SMC. 9 -13- -14- Revision history A Thread type (NPT,G) addition B Format change and content review C Sectional view filter deletion of P.5 D Name plate layout change E Content review F P.5 Sectional view change 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note

(See Fig.13) Replacement part: Shock absorber Bore size Part no. 32 RB1007-X225 4050 RB1407-X552 Lever Hexagon socket head set screw Push down Fig. 11 10 - Lever Shock absorber 11.Internal construction 12 16 Push down Replacement Grease applied Approx.5mm Fig. 12 Fig.13 20 11 - 32&50 Component Parts (12&50) 12 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81

Large amount of coolant leakage to the secondary side (2 port) Precautions for replacement of the valve 12 SGC200-OMM0002-F A Renewal oy B Safety Instructions oy C Renewal RP Revision history D Renewal RW E Renewal TP F Renewal UX 1st printing: Mo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications

SYJ500*-OMJ0001-A -- Revision history A Safety Instructions oP 1st printing : Jy 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved No.SYJ500-OMJ0001-A

[July 2017] F: Revision [February 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2010-2019 SMC Corporation All Rights Reserved No.EX-OME0004-F